9/21/2010	9:40:58 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/21/2010	9:40:58 AM	Recipe started at 9:40 AM
9/21/2010	9:40:58 AM	H2 valve closed
9/21/2010	9:40:58 AM	BCl3 valve closed
9/21/2010	9:40:58 AM	PH3 valve closed
9/21/2010	9:40:58 AM	SiCl4 pre valve closed
9/21/2010	9:40:58 AM	SiCl4 post valve closed
9/21/2010	9:40:58 AM	Main Vac valve closed
9/21/2010	9:40:58 AM	Bypass valve closed
9/21/2010	9:40:58 AM	Bubbler valve closed
9/21/2010	9:40:58 AM	Helium valve opened
9/21/2010	9:40:58 AM	Helium MFC set to  500.000000
9/21/2010	9:40:58 AM	H2 MFC set to  0.000000
9/21/2010	9:40:58 AM	BCl3 MFC set to  0.000000
9/21/2010	9:40:58 AM	PHl3 MFC set to  0.000000
9/21/2010	9:40:58 AM	SiCl4 MFC set to  0.000000
9/21/2010	9:40:58 AM	Bypass solenoid MFC set to  0.000000
9/21/2010	9:40:59 AM	Tube furnace set to 0
9/21/2010	9:42:19 AM	Helium valve closed
9/21/2010	9:42:19 AM	H2 valve closed
9/21/2010	9:42:19 AM	BCl3 valve closed
9/21/2010	9:42:19 AM	PH3 valve closed
9/21/2010	9:42:19 AM	SiCl4 pre valve closed
9/21/2010	9:42:19 AM	SiCl4 post valve closed
9/21/2010	9:42:19 AM	Main Vac valve closed
9/21/2010	9:42:19 AM	Bypass valve closed
9/21/2010	9:42:19 AM	Bubbler valve closed
9/21/2010	9:42:19 AM	Helium MFC set to  0.000000
9/21/2010	9:42:19 AM	H2 MFC set to  0.000000
9/21/2010	9:42:19 AM	BCl3 MFC set to  0.000000
9/21/2010	9:42:19 AM	PHl3 MFC set to  0.000000
9/21/2010	9:42:19 AM	SiCl4 MFC set to  0.000000
9/21/2010	9:42:19 AM	Bypass solenoid MFC set to  0.000000
9/21/2010	9:42:19 AM	Tube furnace set to 0
9/21/2010	9:42:19 AM	Run finished at 9:42 AM
9/21/2010	9:42:19 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/21/2010	9:56:15 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/21/2010	9:56:15 AM	Recipe started at 9:56 AM
9/21/2010	9:56:16 AM	Helium valve closed
9/21/2010	9:56:16 AM	H2 valve closed
9/21/2010	9:56:16 AM	BCl3 valve closed
9/21/2010	9:56:16 AM	PH3 valve closed
9/21/2010	9:56:16 AM	SiCl4 pre valve closed
9/21/2010	9:56:16 AM	SiCl4 post valve closed
9/21/2010	9:56:16 AM	Main Vac valve closed
9/21/2010	9:56:16 AM	Bubbler valve closed
9/21/2010	9:56:16 AM	Bypass valve opened
9/21/2010	9:56:16 AM	Helium MFC set to  0.000000
9/21/2010	9:56:16 AM	H2 MFC set to  0.000000
9/21/2010	9:56:16 AM	BCl3 MFC set to  0.000000
9/21/2010	9:56:16 AM	PHl3 MFC set to  0.000000
9/21/2010	9:56:16 AM	SiCl4 MFC set to  0.000000
9/21/2010	9:56:16 AM	Bypass solenoid MFC set to  0.000000
9/21/2010	9:56:16 AM	Tube furnace set to 0
9/21/2010	9:56:56 AM	Helium valve closed
9/21/2010	9:56:56 AM	H2 valve closed
9/21/2010	9:56:56 AM	BCl3 valve closed
9/21/2010	9:56:56 AM	PH3 valve closed
9/21/2010	9:56:56 AM	SiCl4 pre valve closed
9/21/2010	9:56:56 AM	SiCl4 post valve closed
9/21/2010	9:56:56 AM	Bubbler valve closed
9/21/2010	9:56:56 AM	Main Vac valve opened
9/21/2010	9:56:56 AM	Bypass valve opened
9/21/2010	9:56:56 AM	Helium MFC set to  0.000000
9/21/2010	9:56:56 AM	H2 MFC set to  0.000000
9/21/2010	9:56:56 AM	BCl3 MFC set to  0.000000
9/21/2010	9:56:56 AM	PHl3 MFC set to  0.000000
9/21/2010	9:56:56 AM	SiCl4 MFC set to  0.000000
9/21/2010	9:56:56 AM	Bypass solenoid MFC set to  0.000000
9/21/2010	9:56:56 AM	Tube furnace set to 0
9/21/2010	9:56:56 AM	Run finished at 9:56 AM
9/21/2010	9:56:56 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/21/2010	9:58:26 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/21/2010	9:58:38 AM	Recipe started at 9:58 AM
9/21/2010	9:58:38 AM	Helium valve closed
9/21/2010	9:58:38 AM	H2 valve closed
9/21/2010	9:58:38 AM	BCl3 valve closed
9/21/2010	9:58:38 AM	PH3 valve closed
9/21/2010	9:58:38 AM	SiCl4 pre valve closed
9/21/2010	9:58:38 AM	SiCl4 post valve closed
9/21/2010	9:58:38 AM	Main Vac valve closed
9/21/2010	9:58:38 AM	Bubbler valve closed
9/21/2010	9:58:38 AM	Bypass valve opened
9/21/2010	9:58:38 AM	Helium MFC set to  0.000000
9/21/2010	9:58:38 AM	H2 MFC set to  0.000000
9/21/2010	9:58:38 AM	BCl3 MFC set to  0.000000
9/21/2010	9:58:38 AM	PHl3 MFC set to  0.000000
9/21/2010	9:58:38 AM	SiCl4 MFC set to  0.000000
9/21/2010	9:58:38 AM	Bypass solenoid MFC set to  0.000000
9/21/2010	9:58:38 AM	Tube furnace set to 0
9/21/2010	9:58:38 AM	Helium valve closed
9/21/2010	9:58:38 AM	H2 valve closed
9/21/2010	9:58:38 AM	BCl3 valve closed
9/21/2010	9:58:38 AM	PH3 valve closed
9/21/2010	9:58:38 AM	SiCl4 pre valve closed
9/21/2010	9:58:38 AM	SiCl4 post valve closed
9/21/2010	9:58:38 AM	Bubbler valve closed
9/21/2010	9:58:38 AM	Main Vac valve opened
9/21/2010	9:58:38 AM	Bypass valve opened
9/21/2010	9:58:38 AM	Helium MFC set to  0.000000
9/21/2010	9:58:38 AM	H2 MFC set to  0.000000
9/21/2010	9:58:38 AM	BCl3 MFC set to  0.000000
9/21/2010	9:58:38 AM	PHl3 MFC set to  0.000000
9/21/2010	9:58:38 AM	SiCl4 MFC set to  0.000000
9/21/2010	9:58:38 AM	Bypass solenoid MFC set to  0.000000
9/21/2010	9:58:39 AM	Tube furnace set to 0
9/21/2010	9:59:39 AM	H2 valve closed
9/21/2010	9:59:39 AM	BCl3 valve closed
9/21/2010	9:59:39 AM	PH3 valve closed
9/21/2010	9:59:39 AM	SiCl4 pre valve closed
9/21/2010	9:59:39 AM	SiCl4 post valve closed
9/21/2010	9:59:39 AM	Bubbler valve closed
9/21/2010	9:59:39 AM	Helium valve opened
9/21/2010	9:59:39 AM	Main Vac valve opened
9/21/2010	9:59:39 AM	Bypass valve opened
9/21/2010	9:59:39 AM	Helium MFC set to  100.000000
9/21/2010	9:59:39 AM	H2 MFC set to  0.000000
9/21/2010	9:59:39 AM	BCl3 MFC set to  0.000000
9/21/2010	9:59:39 AM	PHl3 MFC set to  0.000000
9/21/2010	9:59:39 AM	SiCl4 MFC set to  0.000000
9/21/2010	9:59:39 AM	Bypass solenoid MFC set to  0.000000
9/21/2010	9:59:39 AM	Tube furnace set to 0
9/21/2010	10:00:39 AM	Helium valve closed
9/21/2010	10:00:39 AM	H2 valve closed
9/21/2010	10:00:39 AM	BCl3 valve closed
9/21/2010	10:00:39 AM	PH3 valve closed
9/21/2010	10:00:39 AM	SiCl4 pre valve closed
9/21/2010	10:00:39 AM	SiCl4 post valve closed
9/21/2010	10:00:39 AM	Bubbler valve closed
9/21/2010	10:00:39 AM	Main Vac valve opened
9/21/2010	10:00:39 AM	Bypass valve opened
9/21/2010	10:00:39 AM	Helium MFC set to  0.000000
9/21/2010	10:00:39 AM	H2 MFC set to  0.000000
9/21/2010	10:00:39 AM	BCl3 MFC set to  0.000000
9/21/2010	10:00:39 AM	PHl3 MFC set to  0.000000
9/21/2010	10:00:39 AM	SiCl4 MFC set to  0.000000
9/21/2010	10:00:39 AM	Bypass solenoid MFC set to  0.000000
9/21/2010	10:00:39 AM	Tube furnace set to 0
9/21/2010	10:01:39 AM	H2 valve closed
9/21/2010	10:01:39 AM	BCl3 valve closed
9/21/2010	10:01:39 AM	PH3 valve closed
9/21/2010	10:01:39 AM	SiCl4 pre valve closed
9/21/2010	10:01:39 AM	SiCl4 post valve closed
9/21/2010	10:01:39 AM	Bubbler valve closed
9/21/2010	10:01:39 AM	Helium valve opened
9/21/2010	10:01:39 AM	Main Vac valve opened
9/21/2010	10:01:39 AM	Bypass valve opened
9/21/2010	10:01:39 AM	Helium MFC set to  100.000000
9/21/2010	10:01:39 AM	H2 MFC set to  0.000000
9/21/2010	10:01:39 AM	BCl3 MFC set to  0.000000
9/21/2010	10:01:39 AM	PHl3 MFC set to  0.000000
9/21/2010	10:01:39 AM	SiCl4 MFC set to  0.000000
9/21/2010	10:01:39 AM	Bypass solenoid MFC set to  0.000000
9/21/2010	10:01:39 AM	Tube furnace set to 0
9/21/2010	10:02:39 AM	Helium valve closed
9/21/2010	10:02:39 AM	H2 valve closed
9/21/2010	10:02:39 AM	BCl3 valve closed
9/21/2010	10:02:39 AM	PH3 valve closed
9/21/2010	10:02:39 AM	SiCl4 pre valve closed
9/21/2010	10:02:39 AM	SiCl4 post valve closed
9/21/2010	10:02:39 AM	Bubbler valve closed
9/21/2010	10:02:39 AM	Main Vac valve opened
9/21/2010	10:02:39 AM	Bypass valve opened
9/21/2010	10:02:39 AM	Helium MFC set to  0.000000
9/21/2010	10:02:39 AM	H2 MFC set to  0.000000
9/21/2010	10:02:39 AM	BCl3 MFC set to  0.000000
9/21/2010	10:02:39 AM	PHl3 MFC set to  0.000000
9/21/2010	10:02:39 AM	SiCl4 MFC set to  0.000000
9/21/2010	10:02:39 AM	Bypass solenoid MFC set to  0.000000
9/21/2010	10:02:39 AM	Tube furnace set to 0
9/21/2010	10:03:39 AM	H2 valve closed
9/21/2010	10:03:39 AM	BCl3 valve closed
9/21/2010	10:03:39 AM	PH3 valve closed
9/21/2010	10:03:39 AM	SiCl4 pre valve closed
9/21/2010	10:03:39 AM	SiCl4 post valve closed
9/21/2010	10:03:39 AM	Bubbler valve closed
9/21/2010	10:03:39 AM	Helium valve opened
9/21/2010	10:03:39 AM	Main Vac valve opened
9/21/2010	10:03:39 AM	Bypass valve opened
9/21/2010	10:03:39 AM	Helium MFC set to  100.000000
9/21/2010	10:03:39 AM	H2 MFC set to  0.000000
9/21/2010	10:03:39 AM	BCl3 MFC set to  0.000000
9/21/2010	10:03:39 AM	PHl3 MFC set to  0.000000
9/21/2010	10:03:39 AM	SiCl4 MFC set to  0.000000
9/21/2010	10:03:39 AM	Bypass solenoid MFC set to  0.000000
9/21/2010	10:03:40 AM	Tube furnace set to 0
9/21/2010	10:04:40 AM	Helium valve closed
9/21/2010	10:04:40 AM	H2 valve closed
9/21/2010	10:04:40 AM	BCl3 valve closed
9/21/2010	10:04:40 AM	PH3 valve closed
9/21/2010	10:04:40 AM	SiCl4 pre valve closed
9/21/2010	10:04:40 AM	SiCl4 post valve closed
9/21/2010	10:04:40 AM	Bubbler valve closed
9/21/2010	10:04:40 AM	Main Vac valve opened
9/21/2010	10:04:40 AM	Bypass valve opened
9/21/2010	10:04:40 AM	Helium MFC set to  0.000000
9/21/2010	10:04:40 AM	H2 MFC set to  0.000000
9/21/2010	10:04:40 AM	BCl3 MFC set to  0.000000
9/21/2010	10:04:40 AM	PHl3 MFC set to  0.000000
9/21/2010	10:04:40 AM	SiCl4 MFC set to  0.000000
9/21/2010	10:04:40 AM	Bypass solenoid MFC set to  0.000000
9/21/2010	10:04:40 AM	Tube furnace set to 0
9/21/2010	10:05:40 AM	H2 valve closed
9/21/2010	10:05:40 AM	BCl3 valve closed
9/21/2010	10:05:40 AM	PH3 valve closed
9/21/2010	10:05:40 AM	SiCl4 pre valve closed
9/21/2010	10:05:40 AM	SiCl4 post valve closed
9/21/2010	10:05:40 AM	Bubbler valve closed
9/21/2010	10:05:40 AM	Helium valve opened
9/21/2010	10:05:40 AM	Main Vac valve opened
9/21/2010	10:05:40 AM	Bypass valve opened
9/21/2010	10:05:40 AM	Helium MFC set to  100.000000
9/21/2010	10:05:40 AM	H2 MFC set to  0.000000
9/21/2010	10:05:40 AM	BCl3 MFC set to  0.000000
9/21/2010	10:05:40 AM	PHl3 MFC set to  0.000000
9/21/2010	10:05:40 AM	SiCl4 MFC set to  0.000000
9/21/2010	10:05:40 AM	Bypass solenoid MFC set to  0.000000
9/21/2010	10:05:40 AM	Tube furnace set to 0
9/21/2010	10:06:40 AM	Helium valve closed
9/21/2010	10:06:40 AM	H2 valve closed
9/21/2010	10:06:40 AM	BCl3 valve closed
9/21/2010	10:06:40 AM	PH3 valve closed
9/21/2010	10:06:40 AM	SiCl4 pre valve closed
9/21/2010	10:06:40 AM	SiCl4 post valve closed
9/21/2010	10:06:40 AM	Bubbler valve closed
9/21/2010	10:06:40 AM	Main Vac valve opened
9/21/2010	10:06:40 AM	Bypass valve opened
9/21/2010	10:06:40 AM	Helium MFC set to  0.000000
9/21/2010	10:06:40 AM	H2 MFC set to  0.000000
9/21/2010	10:06:40 AM	BCl3 MFC set to  0.000000
9/21/2010	10:06:40 AM	PHl3 MFC set to  0.000000
9/21/2010	10:06:40 AM	SiCl4 MFC set to  0.000000
9/21/2010	10:06:40 AM	Bypass solenoid MFC set to  0.000000
9/21/2010	10:06:40 AM	Tube furnace set to 0
9/21/2010	10:07:40 AM	H2 valve closed
9/21/2010	10:07:40 AM	BCl3 valve closed
9/21/2010	10:07:40 AM	PH3 valve closed
9/21/2010	10:07:40 AM	SiCl4 pre valve closed
9/21/2010	10:07:40 AM	SiCl4 post valve closed
9/21/2010	10:07:40 AM	Bubbler valve closed
9/21/2010	10:07:40 AM	Helium valve opened
9/21/2010	10:07:40 AM	Main Vac valve opened
9/21/2010	10:07:40 AM	Bypass valve opened
9/21/2010	10:07:40 AM	Helium MFC set to  100.000000
9/21/2010	10:07:40 AM	H2 MFC set to  0.000000
9/21/2010	10:07:40 AM	BCl3 MFC set to  0.000000
9/21/2010	10:07:40 AM	PHl3 MFC set to  0.000000
9/21/2010	10:07:40 AM	SiCl4 MFC set to  0.000000
9/21/2010	10:07:40 AM	Bypass solenoid MFC set to  0.000000
9/21/2010	10:07:40 AM	Tube furnace set to 0
9/21/2010	10:08:40 AM	Helium valve closed
9/21/2010	10:08:40 AM	H2 valve closed
9/21/2010	10:08:40 AM	BCl3 valve closed
9/21/2010	10:08:40 AM	PH3 valve closed
9/21/2010	10:08:40 AM	SiCl4 pre valve closed
9/21/2010	10:08:40 AM	SiCl4 post valve closed
9/21/2010	10:08:40 AM	Bubbler valve closed
9/21/2010	10:08:40 AM	Main Vac valve opened
9/21/2010	10:08:40 AM	Bypass valve opened
9/21/2010	10:08:40 AM	Helium MFC set to  0.000000
9/21/2010	10:08:40 AM	H2 MFC set to  0.000000
9/21/2010	10:08:40 AM	BCl3 MFC set to  0.000000
9/21/2010	10:08:40 AM	PHl3 MFC set to  0.000000
9/21/2010	10:08:40 AM	SiCl4 MFC set to  0.000000
9/21/2010	10:08:40 AM	Bypass solenoid MFC set to  0.000000
9/21/2010	10:08:41 AM	Tube furnace set to 0
9/21/2010	10:09:41 AM	H2 valve closed
9/21/2010	10:09:41 AM	BCl3 valve closed
9/21/2010	10:09:41 AM	PH3 valve closed
9/21/2010	10:09:41 AM	SiCl4 pre valve closed
9/21/2010	10:09:41 AM	SiCl4 post valve closed
9/21/2010	10:09:41 AM	Bubbler valve closed
9/21/2010	10:09:41 AM	Helium valve opened
9/21/2010	10:09:41 AM	Main Vac valve opened
9/21/2010	10:09:41 AM	Bypass valve opened
9/21/2010	10:09:41 AM	Helium MFC set to  100.000000
9/21/2010	10:09:41 AM	H2 MFC set to  0.000000
9/21/2010	10:09:41 AM	BCl3 MFC set to  0.000000
9/21/2010	10:09:41 AM	PHl3 MFC set to  0.000000
9/21/2010	10:09:41 AM	SiCl4 MFC set to  0.000000
9/21/2010	10:09:41 AM	Bypass solenoid MFC set to  0.000000
9/21/2010	10:09:41 AM	Tube furnace set to 0
9/21/2010	10:10:41 AM	Helium valve closed
9/21/2010	10:10:41 AM	H2 valve closed
9/21/2010	10:10:41 AM	BCl3 valve closed
9/21/2010	10:10:41 AM	PH3 valve closed
9/21/2010	10:10:41 AM	SiCl4 pre valve closed
9/21/2010	10:10:41 AM	SiCl4 post valve closed
9/21/2010	10:10:41 AM	Bubbler valve closed
9/21/2010	10:10:41 AM	Main Vac valve opened
9/21/2010	10:10:41 AM	Bypass valve opened
9/21/2010	10:10:41 AM	Helium MFC set to  0.000000
9/21/2010	10:10:41 AM	H2 MFC set to  0.000000
9/21/2010	10:10:41 AM	BCl3 MFC set to  0.000000
9/21/2010	10:10:41 AM	PHl3 MFC set to  0.000000
9/21/2010	10:10:41 AM	SiCl4 MFC set to  0.000000
9/21/2010	10:10:41 AM	Bypass solenoid MFC set to  0.000000
9/21/2010	10:10:41 AM	Tube furnace set to 0
9/21/2010	10:11:41 AM	H2 valve closed
9/21/2010	10:11:41 AM	BCl3 valve closed
9/21/2010	10:11:41 AM	PH3 valve closed
9/21/2010	10:11:41 AM	SiCl4 pre valve closed
9/21/2010	10:11:41 AM	SiCl4 post valve closed
9/21/2010	10:11:41 AM	Bubbler valve closed
9/21/2010	10:11:41 AM	Helium valve opened
9/21/2010	10:11:41 AM	Main Vac valve opened
9/21/2010	10:11:41 AM	Bypass valve opened
9/21/2010	10:11:41 AM	Helium MFC set to  100.000000
9/21/2010	10:11:41 AM	H2 MFC set to  0.000000
9/21/2010	10:11:41 AM	BCl3 MFC set to  0.000000
9/21/2010	10:11:41 AM	PHl3 MFC set to  0.000000
9/21/2010	10:11:41 AM	SiCl4 MFC set to  0.000000
9/21/2010	10:11:41 AM	Bypass solenoid MFC set to  0.000000
9/21/2010	10:11:41 AM	Tube furnace set to 0
9/21/2010	10:12:41 AM	Helium valve closed
9/21/2010	10:12:41 AM	H2 valve closed
9/21/2010	10:12:41 AM	BCl3 valve closed
9/21/2010	10:12:41 AM	PH3 valve closed
9/21/2010	10:12:41 AM	SiCl4 pre valve closed
9/21/2010	10:12:41 AM	SiCl4 post valve closed
9/21/2010	10:12:41 AM	Bubbler valve closed
9/21/2010	10:12:41 AM	Main Vac valve opened
9/21/2010	10:12:41 AM	Bypass valve opened
9/21/2010	10:12:41 AM	Helium MFC set to  0.000000
9/21/2010	10:12:41 AM	H2 MFC set to  0.000000
9/21/2010	10:12:41 AM	BCl3 MFC set to  0.000000
9/21/2010	10:12:41 AM	PHl3 MFC set to  0.000000
9/21/2010	10:12:41 AM	SiCl4 MFC set to  0.000000
9/21/2010	10:12:41 AM	Bypass solenoid MFC set to  0.000000
9/21/2010	10:12:41 AM	Tube furnace set to 0
9/21/2010	10:13:41 AM	H2 valve closed
9/21/2010	10:13:41 AM	BCl3 valve closed
9/21/2010	10:13:41 AM	PH3 valve closed
9/21/2010	10:13:41 AM	SiCl4 pre valve closed
9/21/2010	10:13:41 AM	SiCl4 post valve closed
9/21/2010	10:13:41 AM	Bubbler valve closed
9/21/2010	10:13:41 AM	Helium valve opened
9/21/2010	10:13:41 AM	Main Vac valve opened
9/21/2010	10:13:41 AM	Bypass valve opened
9/21/2010	10:13:41 AM	Helium MFC set to  100.000000
9/21/2010	10:13:41 AM	H2 MFC set to  0.000000
9/21/2010	10:13:41 AM	BCl3 MFC set to  0.000000
9/21/2010	10:13:41 AM	PHl3 MFC set to  0.000000
9/21/2010	10:13:41 AM	SiCl4 MFC set to  0.000000
9/21/2010	10:13:41 AM	Bypass solenoid MFC set to  0.000000
9/21/2010	10:13:42 AM	Tube furnace set to 0
9/21/2010	10:14:42 AM	Helium valve closed
9/21/2010	10:14:42 AM	H2 valve closed
9/21/2010	10:14:42 AM	BCl3 valve closed
9/21/2010	10:14:42 AM	PH3 valve closed
9/21/2010	10:14:42 AM	SiCl4 pre valve closed
9/21/2010	10:14:42 AM	SiCl4 post valve closed
9/21/2010	10:14:42 AM	Bubbler valve closed
9/21/2010	10:14:42 AM	Main Vac valve opened
9/21/2010	10:14:42 AM	Bypass valve opened
9/21/2010	10:14:42 AM	Helium MFC set to  0.000000
9/21/2010	10:14:42 AM	H2 MFC set to  0.000000
9/21/2010	10:14:42 AM	BCl3 MFC set to  0.000000
9/21/2010	10:14:42 AM	PHl3 MFC set to  0.000000
9/21/2010	10:14:42 AM	SiCl4 MFC set to  0.000000
9/21/2010	10:14:42 AM	Bypass solenoid MFC set to  0.000000
9/21/2010	10:14:42 AM	Tube furnace set to 0
9/21/2010	10:15:42 AM	H2 valve closed
9/21/2010	10:15:42 AM	BCl3 valve closed
9/21/2010	10:15:42 AM	PH3 valve closed
9/21/2010	10:15:42 AM	SiCl4 pre valve closed
9/21/2010	10:15:42 AM	SiCl4 post valve closed
9/21/2010	10:15:42 AM	Bubbler valve closed
9/21/2010	10:15:42 AM	Helium valve opened
9/21/2010	10:15:42 AM	Main Vac valve opened
9/21/2010	10:15:42 AM	Bypass valve opened
9/21/2010	10:15:42 AM	Helium MFC set to  100.000000
9/21/2010	10:15:42 AM	H2 MFC set to  0.000000
9/21/2010	10:15:42 AM	BCl3 MFC set to  0.000000
9/21/2010	10:15:42 AM	PHl3 MFC set to  0.000000
9/21/2010	10:15:42 AM	SiCl4 MFC set to  0.000000
9/21/2010	10:15:42 AM	Bypass solenoid MFC set to  0.000000
9/21/2010	10:15:42 AM	Tube furnace set to 0
9/21/2010	10:16:42 AM	Helium valve closed
9/21/2010	10:16:42 AM	H2 valve closed
9/21/2010	10:16:42 AM	BCl3 valve closed
9/21/2010	10:16:42 AM	PH3 valve closed
9/21/2010	10:16:42 AM	SiCl4 pre valve closed
9/21/2010	10:16:42 AM	SiCl4 post valve closed
9/21/2010	10:16:42 AM	Bubbler valve closed
9/21/2010	10:16:42 AM	Main Vac valve opened
9/21/2010	10:16:42 AM	Bypass valve opened
9/21/2010	10:16:42 AM	Helium MFC set to  0.000000
9/21/2010	10:16:42 AM	H2 MFC set to  0.000000
9/21/2010	10:16:42 AM	BCl3 MFC set to  0.000000
9/21/2010	10:16:42 AM	PHl3 MFC set to  0.000000
9/21/2010	10:16:42 AM	SiCl4 MFC set to  0.000000
9/21/2010	10:16:42 AM	Bypass solenoid MFC set to  0.000000
9/21/2010	10:16:42 AM	Tube furnace set to 0
9/21/2010	10:17:42 AM	H2 valve closed
9/21/2010	10:17:42 AM	BCl3 valve closed
9/21/2010	10:17:42 AM	PH3 valve closed
9/21/2010	10:17:42 AM	SiCl4 pre valve closed
9/21/2010	10:17:42 AM	SiCl4 post valve closed
9/21/2010	10:17:42 AM	Bubbler valve closed
9/21/2010	10:17:42 AM	Helium valve opened
9/21/2010	10:17:42 AM	Main Vac valve opened
9/21/2010	10:17:42 AM	Bypass valve opened
9/21/2010	10:17:42 AM	Helium MFC set to  100.000000
9/21/2010	10:17:42 AM	H2 MFC set to  0.000000
9/21/2010	10:17:42 AM	BCl3 MFC set to  0.000000
9/21/2010	10:17:42 AM	PHl3 MFC set to  0.000000
9/21/2010	10:17:42 AM	SiCl4 MFC set to  0.000000
9/21/2010	10:17:42 AM	Bypass solenoid MFC set to  0.000000
9/21/2010	10:17:42 AM	Tube furnace set to 0
9/21/2010	10:18:42 AM	Helium valve closed
9/21/2010	10:18:42 AM	H2 valve closed
9/21/2010	10:18:42 AM	BCl3 valve closed
9/21/2010	10:18:42 AM	PH3 valve closed
9/21/2010	10:18:42 AM	SiCl4 pre valve closed
9/21/2010	10:18:42 AM	SiCl4 post valve closed
9/21/2010	10:18:42 AM	Bubbler valve closed
9/21/2010	10:18:42 AM	Main Vac valve opened
9/21/2010	10:18:42 AM	Bypass valve opened
9/21/2010	10:18:42 AM	Helium MFC set to  0.000000
9/21/2010	10:18:42 AM	H2 MFC set to  0.000000
9/21/2010	10:18:42 AM	BCl3 MFC set to  0.000000
9/21/2010	10:18:42 AM	PHl3 MFC set to  0.000000
9/21/2010	10:18:42 AM	SiCl4 MFC set to  0.000000
9/21/2010	10:18:42 AM	Bypass solenoid MFC set to  0.000000
9/21/2010	10:18:42 AM	Tube furnace set to 0
9/21/2010	10:18:43 AM	Run finished at 10:18 AM
9/21/2010	10:18:43 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/21/2010	10:35:08 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/21/2010	10:35:20 AM	Recipe started at 10:35 AM
9/21/2010	10:35:20 AM	Helium valve closed
9/21/2010	10:35:20 AM	H2 valve closed
9/21/2010	10:35:20 AM	BCl3 valve closed
9/21/2010	10:35:20 AM	PH3 valve closed
9/21/2010	10:35:20 AM	SiCl4 pre valve closed
9/21/2010	10:35:20 AM	SiCl4 post valve closed
9/21/2010	10:35:20 AM	Main Vac valve closed
9/21/2010	10:35:20 AM	Bubbler valve closed
9/21/2010	10:35:20 AM	Bypass valve opened
9/21/2010	10:35:20 AM	Helium MFC set to  0.000000
9/21/2010	10:35:20 AM	H2 MFC set to  0.000000
9/21/2010	10:35:20 AM	BCl3 MFC set to  0.000000
9/21/2010	10:35:20 AM	PHl3 MFC set to  0.000000
9/21/2010	10:35:20 AM	SiCl4 MFC set to  0.000000
9/21/2010	10:35:20 AM	Bypass solenoid MFC set to  0.000000
9/21/2010	10:35:20 AM	Tube furnace set to 0
9/21/2010	10:35:20 AM	Helium valve closed
9/21/2010	10:35:20 AM	H2 valve closed
9/21/2010	10:35:20 AM	BCl3 valve closed
9/21/2010	10:35:20 AM	PH3 valve closed
9/21/2010	10:35:20 AM	SiCl4 pre valve closed
9/21/2010	10:35:20 AM	SiCl4 post valve closed
9/21/2010	10:35:20 AM	Bubbler valve closed
9/21/2010	10:35:20 AM	Main Vac valve opened
9/21/2010	10:35:20 AM	Bypass valve opened
9/21/2010	10:35:20 AM	Helium MFC set to  0.000000
9/21/2010	10:35:20 AM	H2 MFC set to  0.000000
9/21/2010	10:35:20 AM	BCl3 MFC set to  0.000000
9/21/2010	10:35:20 AM	PHl3 MFC set to  0.000000
9/21/2010	10:35:20 AM	SiCl4 MFC set to  0.000000
9/21/2010	10:35:20 AM	Bypass solenoid MFC set to  0.000000
9/21/2010	10:35:21 AM	Tube furnace set to 0
9/21/2010	10:36:21 AM	H2 valve closed
9/21/2010	10:36:21 AM	BCl3 valve closed
9/21/2010	10:36:21 AM	PH3 valve closed
9/21/2010	10:36:21 AM	SiCl4 pre valve closed
9/21/2010	10:36:21 AM	SiCl4 post valve closed
9/21/2010	10:36:21 AM	Bubbler valve closed
9/21/2010	10:36:21 AM	Helium valve opened
9/21/2010	10:36:21 AM	Main Vac valve opened
9/21/2010	10:36:21 AM	Bypass valve opened
9/21/2010	10:36:21 AM	Helium MFC set to  100.000000
9/21/2010	10:36:21 AM	H2 MFC set to  0.000000
9/21/2010	10:36:21 AM	BCl3 MFC set to  0.000000
9/21/2010	10:36:21 AM	PHl3 MFC set to  0.000000
9/21/2010	10:36:21 AM	SiCl4 MFC set to  0.000000
9/21/2010	10:36:21 AM	Bypass solenoid MFC set to  0.000000
9/21/2010	10:36:21 AM	Tube furnace set to 0
9/21/2010	10:37:21 AM	Helium valve closed
9/21/2010	10:37:21 AM	H2 valve closed
9/21/2010	10:37:21 AM	BCl3 valve closed
9/21/2010	10:37:21 AM	PH3 valve closed
9/21/2010	10:37:21 AM	SiCl4 pre valve closed
9/21/2010	10:37:21 AM	SiCl4 post valve closed
9/21/2010	10:37:21 AM	Bubbler valve closed
9/21/2010	10:37:21 AM	Main Vac valve opened
9/21/2010	10:37:21 AM	Bypass valve opened
9/21/2010	10:37:21 AM	Helium MFC set to  0.000000
9/21/2010	10:37:21 AM	H2 MFC set to  0.000000
9/21/2010	10:37:21 AM	BCl3 MFC set to  0.000000
9/21/2010	10:37:21 AM	PHl3 MFC set to  0.000000
9/21/2010	10:37:21 AM	SiCl4 MFC set to  0.000000
9/21/2010	10:37:21 AM	Bypass solenoid MFC set to  0.000000
9/21/2010	10:37:21 AM	Tube furnace set to 0
9/21/2010	10:38:21 AM	H2 valve closed
9/21/2010	10:38:21 AM	BCl3 valve closed
9/21/2010	10:38:21 AM	PH3 valve closed
9/21/2010	10:38:21 AM	SiCl4 pre valve closed
9/21/2010	10:38:21 AM	SiCl4 post valve closed
9/21/2010	10:38:21 AM	Bubbler valve closed
9/21/2010	10:38:21 AM	Helium valve opened
9/21/2010	10:38:21 AM	Main Vac valve opened
9/21/2010	10:38:21 AM	Bypass valve opened
9/21/2010	10:38:21 AM	Helium MFC set to  100.000000
9/21/2010	10:38:21 AM	H2 MFC set to  0.000000
9/21/2010	10:38:21 AM	BCl3 MFC set to  0.000000
9/21/2010	10:38:21 AM	PHl3 MFC set to  0.000000
9/21/2010	10:38:21 AM	SiCl4 MFC set to  0.000000
9/21/2010	10:38:21 AM	Bypass solenoid MFC set to  0.000000
9/21/2010	10:38:21 AM	Tube furnace set to 0
9/21/2010	10:39:21 AM	Helium valve closed
9/21/2010	10:39:21 AM	H2 valve closed
9/21/2010	10:39:21 AM	BCl3 valve closed
9/21/2010	10:39:21 AM	PH3 valve closed
9/21/2010	10:39:21 AM	SiCl4 pre valve closed
9/21/2010	10:39:21 AM	SiCl4 post valve closed
9/21/2010	10:39:21 AM	Bubbler valve closed
9/21/2010	10:39:21 AM	Main Vac valve opened
9/21/2010	10:39:21 AM	Bypass valve opened
9/21/2010	10:39:21 AM	Helium MFC set to  0.000000
9/21/2010	10:39:21 AM	H2 MFC set to  0.000000
9/21/2010	10:39:21 AM	BCl3 MFC set to  0.000000
9/21/2010	10:39:21 AM	PHl3 MFC set to  0.000000
9/21/2010	10:39:21 AM	SiCl4 MFC set to  0.000000
9/21/2010	10:39:21 AM	Bypass solenoid MFC set to  0.000000
9/21/2010	10:39:21 AM	Tube furnace set to 0
9/21/2010	10:40:21 AM	H2 valve closed
9/21/2010	10:40:21 AM	BCl3 valve closed
9/21/2010	10:40:21 AM	PH3 valve closed
9/21/2010	10:40:21 AM	SiCl4 pre valve closed
9/21/2010	10:40:21 AM	SiCl4 post valve closed
9/21/2010	10:40:21 AM	Bubbler valve closed
9/21/2010	10:40:21 AM	Helium valve opened
9/21/2010	10:40:21 AM	Main Vac valve opened
9/21/2010	10:40:21 AM	Bypass valve opened
9/21/2010	10:40:21 AM	Helium MFC set to  100.000000
9/21/2010	10:40:21 AM	H2 MFC set to  0.000000
9/21/2010	10:40:21 AM	BCl3 MFC set to  0.000000
9/21/2010	10:40:21 AM	PHl3 MFC set to  0.000000
9/21/2010	10:40:21 AM	SiCl4 MFC set to  0.000000
9/21/2010	10:40:21 AM	Bypass solenoid MFC set to  0.000000
9/21/2010	10:40:22 AM	Tube furnace set to 0
9/21/2010	10:41:22 AM	Helium valve closed
9/21/2010	10:41:22 AM	H2 valve closed
9/21/2010	10:41:22 AM	BCl3 valve closed
9/21/2010	10:41:22 AM	PH3 valve closed
9/21/2010	10:41:22 AM	SiCl4 pre valve closed
9/21/2010	10:41:22 AM	SiCl4 post valve closed
9/21/2010	10:41:22 AM	Bubbler valve closed
9/21/2010	10:41:22 AM	Main Vac valve opened
9/21/2010	10:41:22 AM	Bypass valve opened
9/21/2010	10:41:22 AM	Helium MFC set to  0.000000
9/21/2010	10:41:22 AM	H2 MFC set to  0.000000
9/21/2010	10:41:22 AM	BCl3 MFC set to  0.000000
9/21/2010	10:41:22 AM	PHl3 MFC set to  0.000000
9/21/2010	10:41:22 AM	SiCl4 MFC set to  0.000000
9/21/2010	10:41:22 AM	Bypass solenoid MFC set to  0.000000
9/21/2010	10:41:22 AM	Tube furnace set to 0
9/21/2010	10:42:22 AM	H2 valve closed
9/21/2010	10:42:22 AM	BCl3 valve closed
9/21/2010	10:42:22 AM	PH3 valve closed
9/21/2010	10:42:22 AM	SiCl4 pre valve closed
9/21/2010	10:42:22 AM	SiCl4 post valve closed
9/21/2010	10:42:22 AM	Bubbler valve closed
9/21/2010	10:42:22 AM	Helium valve opened
9/21/2010	10:42:22 AM	Main Vac valve opened
9/21/2010	10:42:22 AM	Bypass valve opened
9/21/2010	10:42:22 AM	Helium MFC set to  100.000000
9/21/2010	10:42:22 AM	H2 MFC set to  0.000000
9/21/2010	10:42:22 AM	BCl3 MFC set to  0.000000
9/21/2010	10:42:22 AM	PHl3 MFC set to  0.000000
9/21/2010	10:42:22 AM	SiCl4 MFC set to  0.000000
9/21/2010	10:42:22 AM	Bypass solenoid MFC set to  0.000000
9/21/2010	10:42:22 AM	Tube furnace set to 0
9/21/2010	10:43:22 AM	Helium valve closed
9/21/2010	10:43:22 AM	H2 valve closed
9/21/2010	10:43:22 AM	BCl3 valve closed
9/21/2010	10:43:22 AM	PH3 valve closed
9/21/2010	10:43:22 AM	SiCl4 pre valve closed
9/21/2010	10:43:22 AM	SiCl4 post valve closed
9/21/2010	10:43:22 AM	Bubbler valve closed
9/21/2010	10:43:22 AM	Main Vac valve opened
9/21/2010	10:43:22 AM	Bypass valve opened
9/21/2010	10:43:22 AM	Helium MFC set to  0.000000
9/21/2010	10:43:22 AM	H2 MFC set to  0.000000
9/21/2010	10:43:22 AM	BCl3 MFC set to  0.000000
9/21/2010	10:43:22 AM	PHl3 MFC set to  0.000000
9/21/2010	10:43:22 AM	SiCl4 MFC set to  0.000000
9/21/2010	10:43:22 AM	Bypass solenoid MFC set to  0.000000
9/21/2010	10:43:22 AM	Tube furnace set to 0
9/21/2010	10:44:22 AM	H2 valve closed
9/21/2010	10:44:22 AM	BCl3 valve closed
9/21/2010	10:44:22 AM	PH3 valve closed
9/21/2010	10:44:22 AM	SiCl4 pre valve closed
9/21/2010	10:44:22 AM	SiCl4 post valve closed
9/21/2010	10:44:22 AM	Bubbler valve closed
9/21/2010	10:44:22 AM	Helium valve opened
9/21/2010	10:44:22 AM	Main Vac valve opened
9/21/2010	10:44:22 AM	Bypass valve opened
9/21/2010	10:44:22 AM	Helium MFC set to  100.000000
9/21/2010	10:44:22 AM	H2 MFC set to  0.000000
9/21/2010	10:44:22 AM	BCl3 MFC set to  0.000000
9/21/2010	10:44:22 AM	PHl3 MFC set to  0.000000
9/21/2010	10:44:22 AM	SiCl4 MFC set to  0.000000
9/21/2010	10:44:22 AM	Bypass solenoid MFC set to  0.000000
9/21/2010	10:44:22 AM	Tube furnace set to 0
9/21/2010	10:45:22 AM	Helium valve closed
9/21/2010	10:45:22 AM	H2 valve closed
9/21/2010	10:45:22 AM	BCl3 valve closed
9/21/2010	10:45:22 AM	PH3 valve closed
9/21/2010	10:45:22 AM	SiCl4 pre valve closed
9/21/2010	10:45:22 AM	SiCl4 post valve closed
9/21/2010	10:45:22 AM	Bubbler valve closed
9/21/2010	10:45:22 AM	Main Vac valve opened
9/21/2010	10:45:22 AM	Bypass valve opened
9/21/2010	10:45:22 AM	Helium MFC set to  0.000000
9/21/2010	10:45:22 AM	H2 MFC set to  0.000000
9/21/2010	10:45:22 AM	BCl3 MFC set to  0.000000
9/21/2010	10:45:22 AM	PHl3 MFC set to  0.000000
9/21/2010	10:45:22 AM	SiCl4 MFC set to  0.000000
9/21/2010	10:45:22 AM	Bypass solenoid MFC set to  0.000000
9/21/2010	10:45:23 AM	Tube furnace set to 0
9/21/2010	10:46:23 AM	H2 valve closed
9/21/2010	10:46:23 AM	BCl3 valve closed
9/21/2010	10:46:23 AM	PH3 valve closed
9/21/2010	10:46:23 AM	SiCl4 pre valve closed
9/21/2010	10:46:23 AM	SiCl4 post valve closed
9/21/2010	10:46:23 AM	Bubbler valve closed
9/21/2010	10:46:23 AM	Helium valve opened
9/21/2010	10:46:23 AM	Main Vac valve opened
9/21/2010	10:46:23 AM	Bypass valve opened
9/21/2010	10:46:23 AM	Helium MFC set to  100.000000
9/21/2010	10:46:23 AM	H2 MFC set to  0.000000
9/21/2010	10:46:23 AM	BCl3 MFC set to  0.000000
9/21/2010	10:46:23 AM	PHl3 MFC set to  0.000000
9/21/2010	10:46:23 AM	SiCl4 MFC set to  0.000000
9/21/2010	10:46:23 AM	Bypass solenoid MFC set to  0.000000
9/21/2010	10:46:23 AM	Tube furnace set to 0
9/21/2010	10:47:23 AM	Helium valve closed
9/21/2010	10:47:23 AM	H2 valve closed
9/21/2010	10:47:23 AM	BCl3 valve closed
9/21/2010	10:47:23 AM	PH3 valve closed
9/21/2010	10:47:23 AM	SiCl4 pre valve closed
9/21/2010	10:47:23 AM	SiCl4 post valve closed
9/21/2010	10:47:23 AM	Bubbler valve closed
9/21/2010	10:47:23 AM	Main Vac valve opened
9/21/2010	10:47:23 AM	Bypass valve opened
9/21/2010	10:47:23 AM	Helium MFC set to  0.000000
9/21/2010	10:47:23 AM	H2 MFC set to  0.000000
9/21/2010	10:47:23 AM	BCl3 MFC set to  0.000000
9/21/2010	10:47:23 AM	PHl3 MFC set to  0.000000
9/21/2010	10:47:23 AM	SiCl4 MFC set to  0.000000
9/21/2010	10:47:23 AM	Bypass solenoid MFC set to  0.000000
9/21/2010	10:47:23 AM	Tube furnace set to 0
9/21/2010	10:48:23 AM	H2 valve closed
9/21/2010	10:48:23 AM	BCl3 valve closed
9/21/2010	10:48:23 AM	PH3 valve closed
9/21/2010	10:48:23 AM	SiCl4 pre valve closed
9/21/2010	10:48:23 AM	SiCl4 post valve closed
9/21/2010	10:48:23 AM	Bubbler valve closed
9/21/2010	10:48:23 AM	Helium valve opened
9/21/2010	10:48:23 AM	Main Vac valve opened
9/21/2010	10:48:23 AM	Bypass valve opened
9/21/2010	10:48:23 AM	Helium MFC set to  100.000000
9/21/2010	10:48:23 AM	H2 MFC set to  0.000000
9/21/2010	10:48:23 AM	BCl3 MFC set to  0.000000
9/21/2010	10:48:23 AM	PHl3 MFC set to  0.000000
9/21/2010	10:48:23 AM	SiCl4 MFC set to  0.000000
9/21/2010	10:48:23 AM	Bypass solenoid MFC set to  0.000000
9/21/2010	10:48:23 AM	Tube furnace set to 0
9/21/2010	10:49:23 AM	Helium valve closed
9/21/2010	10:49:23 AM	H2 valve closed
9/21/2010	10:49:23 AM	BCl3 valve closed
9/21/2010	10:49:23 AM	PH3 valve closed
9/21/2010	10:49:23 AM	SiCl4 pre valve closed
9/21/2010	10:49:23 AM	SiCl4 post valve closed
9/21/2010	10:49:23 AM	Bubbler valve closed
9/21/2010	10:49:23 AM	Main Vac valve opened
9/21/2010	10:49:23 AM	Bypass valve opened
9/21/2010	10:49:23 AM	Helium MFC set to  0.000000
9/21/2010	10:49:23 AM	H2 MFC set to  0.000000
9/21/2010	10:49:23 AM	BCl3 MFC set to  0.000000
9/21/2010	10:49:23 AM	PHl3 MFC set to  0.000000
9/21/2010	10:49:23 AM	SiCl4 MFC set to  0.000000
9/21/2010	10:49:23 AM	Bypass solenoid MFC set to  0.000000
9/21/2010	10:49:23 AM	Tube furnace set to 0
9/21/2010	10:49:29 AM	H2 valve closed
9/21/2010	10:49:29 AM	BCl3 valve closed
9/21/2010	10:49:29 AM	PH3 valve closed
9/21/2010	10:49:29 AM	SiCl4 pre valve closed
9/21/2010	10:49:29 AM	SiCl4 post valve closed
9/21/2010	10:49:29 AM	Bubbler valve closed
9/21/2010	10:49:29 AM	Helium valve opened
9/21/2010	10:49:29 AM	Main Vac valve opened
9/21/2010	10:49:29 AM	Bypass valve opened
9/21/2010	10:49:29 AM	Helium MFC set to  100.000000
9/21/2010	10:49:29 AM	H2 MFC set to  0.000000
9/21/2010	10:49:29 AM	BCl3 MFC set to  0.000000
9/21/2010	10:49:29 AM	PHl3 MFC set to  0.000000
9/21/2010	10:49:29 AM	SiCl4 MFC set to  0.000000
9/21/2010	10:49:29 AM	Bypass solenoid MFC set to  0.000000
9/21/2010	10:49:29 AM	Tube furnace set to 0
9/21/2010	10:49:30 AM	Helium valve closed
9/21/2010	10:49:30 AM	H2 valve closed
9/21/2010	10:49:30 AM	BCl3 valve closed
9/21/2010	10:49:30 AM	PH3 valve closed
9/21/2010	10:49:30 AM	SiCl4 pre valve closed
9/21/2010	10:49:30 AM	SiCl4 post valve closed
9/21/2010	10:49:30 AM	Bubbler valve closed
9/21/2010	10:49:30 AM	Main Vac valve opened
9/21/2010	10:49:30 AM	Bypass valve opened
9/21/2010	10:49:30 AM	Helium MFC set to  0.000000
9/21/2010	10:49:30 AM	H2 MFC set to  0.000000
9/21/2010	10:49:30 AM	BCl3 MFC set to  0.000000
9/21/2010	10:49:30 AM	PHl3 MFC set to  0.000000
9/21/2010	10:49:30 AM	SiCl4 MFC set to  0.000000
9/21/2010	10:49:30 AM	Bypass solenoid MFC set to  0.000000
9/21/2010	10:49:30 AM	Tube furnace set to 0
9/21/2010	10:49:31 AM	H2 valve closed
9/21/2010	10:49:31 AM	BCl3 valve closed
9/21/2010	10:49:31 AM	PH3 valve closed
9/21/2010	10:49:31 AM	SiCl4 pre valve closed
9/21/2010	10:49:31 AM	SiCl4 post valve closed
9/21/2010	10:49:31 AM	Bubbler valve closed
9/21/2010	10:49:31 AM	Helium valve opened
9/21/2010	10:49:31 AM	Main Vac valve opened
9/21/2010	10:49:31 AM	Bypass valve opened
9/21/2010	10:49:31 AM	Helium MFC set to  100.000000
9/21/2010	10:49:31 AM	H2 MFC set to  0.000000
9/21/2010	10:49:31 AM	BCl3 MFC set to  0.000000
9/21/2010	10:49:31 AM	PHl3 MFC set to  0.000000
9/21/2010	10:49:31 AM	SiCl4 MFC set to  0.000000
9/21/2010	10:49:31 AM	Bypass solenoid MFC set to  0.000000
9/21/2010	10:49:31 AM	Tube furnace set to 0
9/21/2010	10:49:31 AM	Helium valve closed
9/21/2010	10:49:31 AM	H2 valve closed
9/21/2010	10:49:31 AM	BCl3 valve closed
9/21/2010	10:49:31 AM	PH3 valve closed
9/21/2010	10:49:31 AM	SiCl4 pre valve closed
9/21/2010	10:49:31 AM	SiCl4 post valve closed
9/21/2010	10:49:31 AM	Bubbler valve closed
9/21/2010	10:49:31 AM	Main Vac valve opened
9/21/2010	10:49:31 AM	Bypass valve opened
9/21/2010	10:49:31 AM	Helium MFC set to  0.000000
9/21/2010	10:49:31 AM	H2 MFC set to  0.000000
9/21/2010	10:49:31 AM	BCl3 MFC set to  0.000000
9/21/2010	10:49:31 AM	PHl3 MFC set to  0.000000
9/21/2010	10:49:31 AM	SiCl4 MFC set to  0.000000
9/21/2010	10:49:31 AM	Bypass solenoid MFC set to  0.000000
9/21/2010	10:49:31 AM	Tube furnace set to 0
9/21/2010	10:49:32 AM	H2 valve closed
9/21/2010	10:49:32 AM	BCl3 valve closed
9/21/2010	10:49:32 AM	PH3 valve closed
9/21/2010	10:49:32 AM	SiCl4 pre valve closed
9/21/2010	10:49:32 AM	SiCl4 post valve closed
9/21/2010	10:49:32 AM	Bubbler valve closed
9/21/2010	10:49:32 AM	Helium valve opened
9/21/2010	10:49:32 AM	Main Vac valve opened
9/21/2010	10:49:32 AM	Bypass valve opened
9/21/2010	10:49:32 AM	Helium MFC set to  100.000000
9/21/2010	10:49:32 AM	H2 MFC set to  0.000000
9/21/2010	10:49:32 AM	BCl3 MFC set to  0.000000
9/21/2010	10:49:32 AM	PHl3 MFC set to  0.000000
9/21/2010	10:49:32 AM	SiCl4 MFC set to  0.000000
9/21/2010	10:49:32 AM	Bypass solenoid MFC set to  0.000000
9/21/2010	10:49:32 AM	Tube furnace set to 0
9/21/2010	10:49:36 AM	Helium valve closed
9/21/2010	10:49:36 AM	H2 valve closed
9/21/2010	10:49:36 AM	BCl3 valve closed
9/21/2010	10:49:36 AM	PH3 valve closed
9/21/2010	10:49:36 AM	SiCl4 pre valve closed
9/21/2010	10:49:36 AM	SiCl4 post valve closed
9/21/2010	10:49:36 AM	Bubbler valve closed
9/21/2010	10:49:36 AM	Main Vac valve opened
9/21/2010	10:49:36 AM	Bypass valve opened
9/21/2010	10:49:36 AM	Helium MFC set to  0.000000
9/21/2010	10:49:36 AM	H2 MFC set to  0.000000
9/21/2010	10:49:36 AM	BCl3 MFC set to  0.000000
9/21/2010	10:49:36 AM	PHl3 MFC set to  0.000000
9/21/2010	10:49:36 AM	SiCl4 MFC set to  0.000000
9/21/2010	10:49:36 AM	Bypass solenoid MFC set to  0.000000
9/21/2010	10:49:36 AM	Tube furnace set to 0
9/21/2010	10:49:37 AM	Run finished at 10:49 AM
9/21/2010	10:49:37 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/21/2010	10:55:53 AM	Recipe started at 10:55 AM
9/21/2010	10:55:53 AM	Helium valve closed
9/21/2010	10:55:53 AM	BCl3 valve closed
9/21/2010	10:55:53 AM	PH3 valve closed
9/21/2010	10:55:53 AM	SiCl4 pre valve closed
9/21/2010	10:55:53 AM	SiCl4 post valve closed
9/21/2010	10:55:53 AM	Main Vac valve closed
9/21/2010	10:55:53 AM	Bypass valve closed
9/21/2010	10:55:53 AM	Bubbler valve closed
9/21/2010	10:55:53 AM	H2 valve opened
9/21/2010	10:55:53 AM	Helium MFC set to  0.000000
9/21/2010	10:55:53 AM	H2 MFC set to  500.000000
9/21/2010	10:55:53 AM	BCl3 MFC set to  0.000000
9/21/2010	10:55:53 AM	PHl3 MFC set to  0.000000
9/21/2010	10:55:53 AM	SiCl4 MFC set to  0.000000
9/21/2010	10:55:53 AM	Bypass solenoid MFC set to  0.000000
9/21/2010	10:55:54 AM	Tube furnace set to 0
9/21/2010	10:57:15 AM	Helium valve closed
9/21/2010	10:57:15 AM	BCl3 valve closed
9/21/2010	10:57:15 AM	PH3 valve closed
9/21/2010	10:57:15 AM	SiCl4 pre valve closed
9/21/2010	10:57:15 AM	SiCl4 post valve closed
9/21/2010	10:57:15 AM	Main Vac valve closed
9/21/2010	10:57:15 AM	Bypass valve closed
9/21/2010	10:57:15 AM	H2 valve opened
9/21/2010	10:57:15 AM	Bubbler valve opened
9/21/2010	10:57:15 AM	Helium MFC set to  0.000000
9/21/2010	10:57:15 AM	H2 MFC set to  500.000000
9/21/2010	10:57:15 AM	BCl3 MFC set to  0.000000
9/21/2010	10:57:15 AM	PHl3 MFC set to  0.000000
9/21/2010	10:57:15 AM	SiCl4 MFC set to  0.000000
9/21/2010	10:57:15 AM	Bypass solenoid MFC set to  0.000000
9/21/2010	10:57:15 AM	Tube furnace set to 1000
9/21/2010	11:17:15 AM	Helium valve closed
9/21/2010	11:17:15 AM	PH3 valve closed
9/21/2010	11:17:15 AM	Main Vac valve closed
9/21/2010	11:17:15 AM	Bypass valve closed
9/21/2010	11:17:15 AM	H2 valve opened
9/21/2010	11:17:15 AM	BCl3 valve opened
9/21/2010	11:17:15 AM	SiCl4 pre valve opened
9/21/2010	11:17:15 AM	SiCl4 post valve opened
9/21/2010	11:17:15 AM	Bubbler valve opened
9/21/2010	11:17:15 AM	Helium MFC set to  0.000000
9/21/2010	11:17:15 AM	H2 MFC set to  500.000000
9/21/2010	11:17:15 AM	BCl3 MFC set to  25.000000
9/21/2010	11:17:15 AM	PHl3 MFC set to  0.000000
9/21/2010	11:17:15 AM	SiCl4 MFC set to  50.000000
9/21/2010	11:17:15 AM	Bypass solenoid MFC set to  0.000000
9/21/2010	11:17:16 AM	Tube furnace set to 1000
9/21/2010	11:29:16 AM	H2 valve closed
9/21/2010	11:29:16 AM	BCl3 valve closed
9/21/2010	11:29:16 AM	PH3 valve closed
9/21/2010	11:29:16 AM	SiCl4 pre valve closed
9/21/2010	11:29:16 AM	SiCl4 post valve closed
9/21/2010	11:29:16 AM	Main Vac valve closed
9/21/2010	11:29:16 AM	Bypass valve closed
9/21/2010	11:29:16 AM	Helium valve opened
9/21/2010	11:29:16 AM	Bubbler valve opened
9/21/2010	11:29:16 AM	Helium MFC set to  500.000000
9/21/2010	11:29:16 AM	H2 MFC set to  0.000000
9/21/2010	11:29:16 AM	BCl3 MFC set to  0.000000
9/21/2010	11:29:16 AM	PHl3 MFC set to  0.000000
9/21/2010	11:29:16 AM	SiCl4 MFC set to  0.000000
9/21/2010	11:29:16 AM	Bypass solenoid MFC set to  0.000000
9/21/2010	11:29:16 AM	Tube furnace set to 0
9/21/2010	11:49:16 AM	Helium valve closed
9/21/2010	11:49:16 AM	H2 valve closed
9/21/2010	11:49:16 AM	BCl3 valve closed
9/21/2010	11:49:16 AM	PH3 valve closed
9/21/2010	11:49:16 AM	SiCl4 pre valve closed
9/21/2010	11:49:16 AM	SiCl4 post valve closed
9/21/2010	11:49:16 AM	Main Vac valve closed
9/21/2010	11:49:16 AM	Bypass valve closed
9/21/2010	11:49:16 AM	Bubbler valve closed
9/21/2010	11:49:16 AM	Helium MFC set to  0.000000
9/21/2010	11:49:16 AM	H2 MFC set to  0.000000
9/21/2010	11:49:16 AM	BCl3 MFC set to  0.000000
9/21/2010	11:49:16 AM	PHl3 MFC set to  0.000000
9/21/2010	11:49:16 AM	SiCl4 MFC set to  0.000000
9/21/2010	11:49:16 AM	Bypass solenoid MFC set to  0.000000
9/21/2010	11:49:16 AM	Tube furnace set to 0
9/21/2010	11:49:16 AM	Run finished at 11:49 AM
9/21/2010	11:58:28 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/21/2010	11:58:28 AM	Recipe started at 11:58 AM
9/21/2010	11:58:28 AM	Helium valve closed
9/21/2010	11:58:28 AM	H2 valve closed
9/21/2010	11:58:28 AM	BCl3 valve closed
9/21/2010	11:58:28 AM	PH3 valve closed
9/21/2010	11:58:28 AM	SiCl4 pre valve closed
9/21/2010	11:58:28 AM	SiCl4 post valve closed
9/21/2010	11:58:28 AM	Main Vac valve closed
9/21/2010	11:58:28 AM	Bubbler valve closed
9/21/2010	11:58:28 AM	Bypass valve opened
9/21/2010	11:58:28 AM	Helium MFC set to  0.000000
9/21/2010	11:58:28 AM	H2 MFC set to  0.000000
9/21/2010	11:58:28 AM	BCl3 MFC set to  0.000000
9/21/2010	11:58:28 AM	PHl3 MFC set to  0.000000
9/21/2010	11:58:28 AM	SiCl4 MFC set to  0.000000
9/21/2010	11:58:28 AM	Bypass solenoid MFC set to  0.000000
9/21/2010	11:58:29 AM	Tube furnace set to 0
9/21/2010	11:59:07 AM	Helium valve closed
9/21/2010	11:59:07 AM	H2 valve closed
9/21/2010	11:59:07 AM	BCl3 valve closed
9/21/2010	11:59:07 AM	PH3 valve closed
9/21/2010	11:59:07 AM	SiCl4 pre valve closed
9/21/2010	11:59:07 AM	SiCl4 post valve closed
9/21/2010	11:59:07 AM	Bubbler valve closed
9/21/2010	11:59:07 AM	Main Vac valve opened
9/21/2010	11:59:07 AM	Bypass valve opened
9/21/2010	11:59:07 AM	Helium MFC set to  0.000000
9/21/2010	11:59:07 AM	H2 MFC set to  0.000000
9/21/2010	11:59:07 AM	BCl3 MFC set to  0.000000
9/21/2010	11:59:07 AM	PHl3 MFC set to  0.000000
9/21/2010	11:59:07 AM	SiCl4 MFC set to  0.000000
9/21/2010	11:59:07 AM	Bypass solenoid MFC set to  0.000000
9/21/2010	11:59:07 AM	Tube furnace set to 0
9/21/2010	11:59:08 AM	Run finished at 11:59 AM
9/21/2010	11:59:08 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/21/2010	11:59:15 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/21/2010	11:59:27 AM	Recipe started at 11:59 AM
9/21/2010	11:59:27 AM	Helium valve closed
9/21/2010	11:59:27 AM	H2 valve closed
9/21/2010	11:59:27 AM	BCl3 valve closed
9/21/2010	11:59:27 AM	PH3 valve closed
9/21/2010	11:59:27 AM	SiCl4 pre valve closed
9/21/2010	11:59:27 AM	SiCl4 post valve closed
9/21/2010	11:59:27 AM	Main Vac valve closed
9/21/2010	11:59:27 AM	Bubbler valve closed
9/21/2010	11:59:27 AM	Bypass valve opened
9/21/2010	11:59:27 AM	Helium MFC set to  0.000000
9/21/2010	11:59:27 AM	H2 MFC set to  0.000000
9/21/2010	11:59:27 AM	BCl3 MFC set to  0.000000
9/21/2010	11:59:27 AM	PHl3 MFC set to  0.000000
9/21/2010	11:59:27 AM	SiCl4 MFC set to  0.000000
9/21/2010	11:59:27 AM	Bypass solenoid MFC set to  0.000000
9/21/2010	11:59:28 AM	Tube furnace set to 0
9/21/2010	11:59:28 AM	Helium valve closed
9/21/2010	11:59:28 AM	H2 valve closed
9/21/2010	11:59:28 AM	BCl3 valve closed
9/21/2010	11:59:28 AM	PH3 valve closed
9/21/2010	11:59:28 AM	SiCl4 pre valve closed
9/21/2010	11:59:28 AM	SiCl4 post valve closed
9/21/2010	11:59:28 AM	Bubbler valve closed
9/21/2010	11:59:28 AM	Main Vac valve opened
9/21/2010	11:59:28 AM	Bypass valve opened
9/21/2010	11:59:28 AM	Helium MFC set to  0.000000
9/21/2010	11:59:28 AM	H2 MFC set to  0.000000
9/21/2010	11:59:28 AM	BCl3 MFC set to  0.000000
9/21/2010	11:59:28 AM	PHl3 MFC set to  0.000000
9/21/2010	11:59:28 AM	SiCl4 MFC set to  0.000000
9/21/2010	11:59:28 AM	Bypass solenoid MFC set to  0.000000
9/21/2010	11:59:28 AM	Tube furnace set to 0
9/21/2010	12:00:28 PM	H2 valve closed
9/21/2010	12:00:28 PM	BCl3 valve closed
9/21/2010	12:00:28 PM	PH3 valve closed
9/21/2010	12:00:28 PM	SiCl4 pre valve closed
9/21/2010	12:00:28 PM	SiCl4 post valve closed
9/21/2010	12:00:28 PM	Bubbler valve closed
9/21/2010	12:00:28 PM	Helium valve opened
9/21/2010	12:00:28 PM	Main Vac valve opened
9/21/2010	12:00:28 PM	Bypass valve opened
9/21/2010	12:00:28 PM	Helium MFC set to  100.000000
9/21/2010	12:00:28 PM	H2 MFC set to  0.000000
9/21/2010	12:00:28 PM	BCl3 MFC set to  0.000000
9/21/2010	12:00:28 PM	PHl3 MFC set to  0.000000
9/21/2010	12:00:28 PM	SiCl4 MFC set to  0.000000
9/21/2010	12:00:28 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	12:00:28 PM	Tube furnace set to 0
9/21/2010	12:01:28 PM	Helium valve closed
9/21/2010	12:01:28 PM	H2 valve closed
9/21/2010	12:01:28 PM	BCl3 valve closed
9/21/2010	12:01:28 PM	PH3 valve closed
9/21/2010	12:01:28 PM	SiCl4 pre valve closed
9/21/2010	12:01:28 PM	SiCl4 post valve closed
9/21/2010	12:01:28 PM	Bubbler valve closed
9/21/2010	12:01:28 PM	Main Vac valve opened
9/21/2010	12:01:28 PM	Bypass valve opened
9/21/2010	12:01:28 PM	Helium MFC set to  0.000000
9/21/2010	12:01:28 PM	H2 MFC set to  0.000000
9/21/2010	12:01:28 PM	BCl3 MFC set to  0.000000
9/21/2010	12:01:28 PM	PHl3 MFC set to  0.000000
9/21/2010	12:01:28 PM	SiCl4 MFC set to  0.000000
9/21/2010	12:01:28 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	12:01:28 PM	Tube furnace set to 0
9/21/2010	12:02:28 PM	H2 valve closed
9/21/2010	12:02:28 PM	BCl3 valve closed
9/21/2010	12:02:28 PM	PH3 valve closed
9/21/2010	12:02:28 PM	SiCl4 pre valve closed
9/21/2010	12:02:28 PM	SiCl4 post valve closed
9/21/2010	12:02:28 PM	Bubbler valve closed
9/21/2010	12:02:28 PM	Helium valve opened
9/21/2010	12:02:28 PM	Main Vac valve opened
9/21/2010	12:02:28 PM	Bypass valve opened
9/21/2010	12:02:28 PM	Helium MFC set to  100.000000
9/21/2010	12:02:28 PM	H2 MFC set to  0.000000
9/21/2010	12:02:28 PM	BCl3 MFC set to  0.000000
9/21/2010	12:02:28 PM	PHl3 MFC set to  0.000000
9/21/2010	12:02:28 PM	SiCl4 MFC set to  0.000000
9/21/2010	12:02:28 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	12:02:29 PM	Tube furnace set to 0
9/21/2010	12:03:29 PM	Helium valve closed
9/21/2010	12:03:29 PM	H2 valve closed
9/21/2010	12:03:29 PM	BCl3 valve closed
9/21/2010	12:03:29 PM	PH3 valve closed
9/21/2010	12:03:29 PM	SiCl4 pre valve closed
9/21/2010	12:03:29 PM	SiCl4 post valve closed
9/21/2010	12:03:29 PM	Bubbler valve closed
9/21/2010	12:03:29 PM	Main Vac valve opened
9/21/2010	12:03:29 PM	Bypass valve opened
9/21/2010	12:03:29 PM	Helium MFC set to  0.000000
9/21/2010	12:03:29 PM	H2 MFC set to  0.000000
9/21/2010	12:03:29 PM	BCl3 MFC set to  0.000000
9/21/2010	12:03:29 PM	PHl3 MFC set to  0.000000
9/21/2010	12:03:29 PM	SiCl4 MFC set to  0.000000
9/21/2010	12:03:29 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	12:03:29 PM	Tube furnace set to 0
9/21/2010	12:04:29 PM	H2 valve closed
9/21/2010	12:04:29 PM	BCl3 valve closed
9/21/2010	12:04:29 PM	PH3 valve closed
9/21/2010	12:04:29 PM	SiCl4 pre valve closed
9/21/2010	12:04:29 PM	SiCl4 post valve closed
9/21/2010	12:04:29 PM	Bubbler valve closed
9/21/2010	12:04:29 PM	Helium valve opened
9/21/2010	12:04:29 PM	Main Vac valve opened
9/21/2010	12:04:29 PM	Bypass valve opened
9/21/2010	12:04:29 PM	Helium MFC set to  100.000000
9/21/2010	12:04:29 PM	H2 MFC set to  0.000000
9/21/2010	12:04:29 PM	BCl3 MFC set to  0.000000
9/21/2010	12:04:29 PM	PHl3 MFC set to  0.000000
9/21/2010	12:04:29 PM	SiCl4 MFC set to  0.000000
9/21/2010	12:04:29 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	12:04:29 PM	Tube furnace set to 0
9/21/2010	12:05:29 PM	Helium valve closed
9/21/2010	12:05:29 PM	H2 valve closed
9/21/2010	12:05:29 PM	BCl3 valve closed
9/21/2010	12:05:29 PM	PH3 valve closed
9/21/2010	12:05:29 PM	SiCl4 pre valve closed
9/21/2010	12:05:29 PM	SiCl4 post valve closed
9/21/2010	12:05:29 PM	Bubbler valve closed
9/21/2010	12:05:29 PM	Main Vac valve opened
9/21/2010	12:05:29 PM	Bypass valve opened
9/21/2010	12:05:29 PM	Helium MFC set to  0.000000
9/21/2010	12:05:29 PM	H2 MFC set to  0.000000
9/21/2010	12:05:29 PM	BCl3 MFC set to  0.000000
9/21/2010	12:05:29 PM	PHl3 MFC set to  0.000000
9/21/2010	12:05:29 PM	SiCl4 MFC set to  0.000000
9/21/2010	12:05:29 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	12:05:29 PM	Tube furnace set to 0
9/21/2010	12:06:29 PM	H2 valve closed
9/21/2010	12:06:29 PM	BCl3 valve closed
9/21/2010	12:06:29 PM	PH3 valve closed
9/21/2010	12:06:29 PM	SiCl4 pre valve closed
9/21/2010	12:06:29 PM	SiCl4 post valve closed
9/21/2010	12:06:29 PM	Bubbler valve closed
9/21/2010	12:06:29 PM	Helium valve opened
9/21/2010	12:06:29 PM	Main Vac valve opened
9/21/2010	12:06:29 PM	Bypass valve opened
9/21/2010	12:06:29 PM	Helium MFC set to  100.000000
9/21/2010	12:06:29 PM	H2 MFC set to  0.000000
9/21/2010	12:06:29 PM	BCl3 MFC set to  0.000000
9/21/2010	12:06:29 PM	PHl3 MFC set to  0.000000
9/21/2010	12:06:29 PM	SiCl4 MFC set to  0.000000
9/21/2010	12:06:29 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	12:06:29 PM	Tube furnace set to 0
9/21/2010	12:07:29 PM	Helium valve closed
9/21/2010	12:07:29 PM	H2 valve closed
9/21/2010	12:07:29 PM	BCl3 valve closed
9/21/2010	12:07:29 PM	PH3 valve closed
9/21/2010	12:07:29 PM	SiCl4 pre valve closed
9/21/2010	12:07:29 PM	SiCl4 post valve closed
9/21/2010	12:07:29 PM	Bubbler valve closed
9/21/2010	12:07:29 PM	Main Vac valve opened
9/21/2010	12:07:29 PM	Bypass valve opened
9/21/2010	12:07:29 PM	Helium MFC set to  0.000000
9/21/2010	12:07:29 PM	H2 MFC set to  0.000000
9/21/2010	12:07:29 PM	BCl3 MFC set to  0.000000
9/21/2010	12:07:29 PM	PHl3 MFC set to  0.000000
9/21/2010	12:07:29 PM	SiCl4 MFC set to  0.000000
9/21/2010	12:07:29 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	12:07:30 PM	Tube furnace set to 0
9/21/2010	12:08:30 PM	H2 valve closed
9/21/2010	12:08:30 PM	BCl3 valve closed
9/21/2010	12:08:30 PM	PH3 valve closed
9/21/2010	12:08:30 PM	SiCl4 pre valve closed
9/21/2010	12:08:30 PM	SiCl4 post valve closed
9/21/2010	12:08:30 PM	Bubbler valve closed
9/21/2010	12:08:30 PM	Helium valve opened
9/21/2010	12:08:30 PM	Main Vac valve opened
9/21/2010	12:08:30 PM	Bypass valve opened
9/21/2010	12:08:30 PM	Helium MFC set to  100.000000
9/21/2010	12:08:30 PM	H2 MFC set to  0.000000
9/21/2010	12:08:30 PM	BCl3 MFC set to  0.000000
9/21/2010	12:08:30 PM	PHl3 MFC set to  0.000000
9/21/2010	12:08:30 PM	SiCl4 MFC set to  0.000000
9/21/2010	12:08:30 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	12:08:30 PM	Tube furnace set to 0
9/21/2010	12:09:30 PM	Helium valve closed
9/21/2010	12:09:30 PM	H2 valve closed
9/21/2010	12:09:30 PM	BCl3 valve closed
9/21/2010	12:09:30 PM	PH3 valve closed
9/21/2010	12:09:30 PM	SiCl4 pre valve closed
9/21/2010	12:09:30 PM	SiCl4 post valve closed
9/21/2010	12:09:30 PM	Bubbler valve closed
9/21/2010	12:09:30 PM	Main Vac valve opened
9/21/2010	12:09:30 PM	Bypass valve opened
9/21/2010	12:09:30 PM	Helium MFC set to  0.000000
9/21/2010	12:09:30 PM	H2 MFC set to  0.000000
9/21/2010	12:09:30 PM	BCl3 MFC set to  0.000000
9/21/2010	12:09:30 PM	PHl3 MFC set to  0.000000
9/21/2010	12:09:30 PM	SiCl4 MFC set to  0.000000
9/21/2010	12:09:30 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	12:09:30 PM	Tube furnace set to 0
9/21/2010	12:10:30 PM	H2 valve closed
9/21/2010	12:10:30 PM	BCl3 valve closed
9/21/2010	12:10:30 PM	PH3 valve closed
9/21/2010	12:10:30 PM	SiCl4 pre valve closed
9/21/2010	12:10:30 PM	SiCl4 post valve closed
9/21/2010	12:10:30 PM	Bubbler valve closed
9/21/2010	12:10:30 PM	Helium valve opened
9/21/2010	12:10:30 PM	Main Vac valve opened
9/21/2010	12:10:30 PM	Bypass valve opened
9/21/2010	12:10:30 PM	Helium MFC set to  100.000000
9/21/2010	12:10:30 PM	H2 MFC set to  0.000000
9/21/2010	12:10:30 PM	BCl3 MFC set to  0.000000
9/21/2010	12:10:30 PM	PHl3 MFC set to  0.000000
9/21/2010	12:10:30 PM	SiCl4 MFC set to  0.000000
9/21/2010	12:10:30 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	12:10:30 PM	Tube furnace set to 0
9/21/2010	12:11:30 PM	Helium valve closed
9/21/2010	12:11:30 PM	H2 valve closed
9/21/2010	12:11:30 PM	BCl3 valve closed
9/21/2010	12:11:30 PM	PH3 valve closed
9/21/2010	12:11:30 PM	SiCl4 pre valve closed
9/21/2010	12:11:30 PM	SiCl4 post valve closed
9/21/2010	12:11:30 PM	Bubbler valve closed
9/21/2010	12:11:30 PM	Main Vac valve opened
9/21/2010	12:11:30 PM	Bypass valve opened
9/21/2010	12:11:30 PM	Helium MFC set to  0.000000
9/21/2010	12:11:30 PM	H2 MFC set to  0.000000
9/21/2010	12:11:30 PM	BCl3 MFC set to  0.000000
9/21/2010	12:11:30 PM	PHl3 MFC set to  0.000000
9/21/2010	12:11:30 PM	SiCl4 MFC set to  0.000000
9/21/2010	12:11:30 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	12:11:30 PM	Tube furnace set to 0
9/21/2010	12:12:30 PM	H2 valve closed
9/21/2010	12:12:30 PM	BCl3 valve closed
9/21/2010	12:12:30 PM	PH3 valve closed
9/21/2010	12:12:30 PM	SiCl4 pre valve closed
9/21/2010	12:12:30 PM	SiCl4 post valve closed
9/21/2010	12:12:30 PM	Bubbler valve closed
9/21/2010	12:12:30 PM	Helium valve opened
9/21/2010	12:12:30 PM	Main Vac valve opened
9/21/2010	12:12:30 PM	Bypass valve opened
9/21/2010	12:12:30 PM	Helium MFC set to  100.000000
9/21/2010	12:12:30 PM	H2 MFC set to  0.000000
9/21/2010	12:12:30 PM	BCl3 MFC set to  0.000000
9/21/2010	12:12:30 PM	PHl3 MFC set to  0.000000
9/21/2010	12:12:30 PM	SiCl4 MFC set to  0.000000
9/21/2010	12:12:30 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	12:12:31 PM	Tube furnace set to 0
9/21/2010	12:13:31 PM	Helium valve closed
9/21/2010	12:13:31 PM	H2 valve closed
9/21/2010	12:13:31 PM	BCl3 valve closed
9/21/2010	12:13:31 PM	PH3 valve closed
9/21/2010	12:13:31 PM	SiCl4 pre valve closed
9/21/2010	12:13:31 PM	SiCl4 post valve closed
9/21/2010	12:13:31 PM	Bubbler valve closed
9/21/2010	12:13:31 PM	Main Vac valve opened
9/21/2010	12:13:31 PM	Bypass valve opened
9/21/2010	12:13:31 PM	Helium MFC set to  0.000000
9/21/2010	12:13:31 PM	H2 MFC set to  0.000000
9/21/2010	12:13:31 PM	BCl3 MFC set to  0.000000
9/21/2010	12:13:31 PM	PHl3 MFC set to  0.000000
9/21/2010	12:13:31 PM	SiCl4 MFC set to  0.000000
9/21/2010	12:13:31 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	12:13:31 PM	Tube furnace set to 0
9/21/2010	12:14:31 PM	H2 valve closed
9/21/2010	12:14:31 PM	BCl3 valve closed
9/21/2010	12:14:31 PM	PH3 valve closed
9/21/2010	12:14:31 PM	SiCl4 pre valve closed
9/21/2010	12:14:31 PM	SiCl4 post valve closed
9/21/2010	12:14:31 PM	Bubbler valve closed
9/21/2010	12:14:31 PM	Helium valve opened
9/21/2010	12:14:31 PM	Main Vac valve opened
9/21/2010	12:14:31 PM	Bypass valve opened
9/21/2010	12:14:31 PM	Helium MFC set to  100.000000
9/21/2010	12:14:31 PM	H2 MFC set to  0.000000
9/21/2010	12:14:31 PM	BCl3 MFC set to  0.000000
9/21/2010	12:14:31 PM	PHl3 MFC set to  0.000000
9/21/2010	12:14:31 PM	SiCl4 MFC set to  0.000000
9/21/2010	12:14:31 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	12:14:31 PM	Tube furnace set to 0
9/21/2010	12:15:31 PM	Helium valve closed
9/21/2010	12:15:31 PM	H2 valve closed
9/21/2010	12:15:31 PM	BCl3 valve closed
9/21/2010	12:15:31 PM	PH3 valve closed
9/21/2010	12:15:31 PM	SiCl4 pre valve closed
9/21/2010	12:15:31 PM	SiCl4 post valve closed
9/21/2010	12:15:31 PM	Bubbler valve closed
9/21/2010	12:15:31 PM	Main Vac valve opened
9/21/2010	12:15:31 PM	Bypass valve opened
9/21/2010	12:15:31 PM	Helium MFC set to  0.000000
9/21/2010	12:15:31 PM	H2 MFC set to  0.000000
9/21/2010	12:15:31 PM	BCl3 MFC set to  0.000000
9/21/2010	12:15:31 PM	PHl3 MFC set to  0.000000
9/21/2010	12:15:31 PM	SiCl4 MFC set to  0.000000
9/21/2010	12:15:31 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	12:15:31 PM	Tube furnace set to 0
9/21/2010	12:16:31 PM	H2 valve closed
9/21/2010	12:16:31 PM	BCl3 valve closed
9/21/2010	12:16:31 PM	PH3 valve closed
9/21/2010	12:16:31 PM	SiCl4 pre valve closed
9/21/2010	12:16:31 PM	SiCl4 post valve closed
9/21/2010	12:16:31 PM	Bubbler valve closed
9/21/2010	12:16:31 PM	Helium valve opened
9/21/2010	12:16:31 PM	Main Vac valve opened
9/21/2010	12:16:31 PM	Bypass valve opened
9/21/2010	12:16:31 PM	Helium MFC set to  100.000000
9/21/2010	12:16:31 PM	H2 MFC set to  0.000000
9/21/2010	12:16:31 PM	BCl3 MFC set to  0.000000
9/21/2010	12:16:31 PM	PHl3 MFC set to  0.000000
9/21/2010	12:16:31 PM	SiCl4 MFC set to  0.000000
9/21/2010	12:16:31 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	12:16:31 PM	Tube furnace set to 0
9/21/2010	12:17:31 PM	Helium valve closed
9/21/2010	12:17:31 PM	H2 valve closed
9/21/2010	12:17:31 PM	BCl3 valve closed
9/21/2010	12:17:31 PM	PH3 valve closed
9/21/2010	12:17:31 PM	SiCl4 pre valve closed
9/21/2010	12:17:31 PM	SiCl4 post valve closed
9/21/2010	12:17:31 PM	Bubbler valve closed
9/21/2010	12:17:31 PM	Main Vac valve opened
9/21/2010	12:17:31 PM	Bypass valve opened
9/21/2010	12:17:31 PM	Helium MFC set to  0.000000
9/21/2010	12:17:31 PM	H2 MFC set to  0.000000
9/21/2010	12:17:31 PM	BCl3 MFC set to  0.000000
9/21/2010	12:17:31 PM	PHl3 MFC set to  0.000000
9/21/2010	12:17:31 PM	SiCl4 MFC set to  0.000000
9/21/2010	12:17:31 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	12:17:32 PM	Tube furnace set to 0
9/21/2010	12:18:32 PM	H2 valve closed
9/21/2010	12:18:32 PM	BCl3 valve closed
9/21/2010	12:18:32 PM	PH3 valve closed
9/21/2010	12:18:32 PM	SiCl4 pre valve closed
9/21/2010	12:18:32 PM	SiCl4 post valve closed
9/21/2010	12:18:32 PM	Bubbler valve closed
9/21/2010	12:18:32 PM	Helium valve opened
9/21/2010	12:18:32 PM	Main Vac valve opened
9/21/2010	12:18:32 PM	Bypass valve opened
9/21/2010	12:18:32 PM	Helium MFC set to  100.000000
9/21/2010	12:18:32 PM	H2 MFC set to  0.000000
9/21/2010	12:18:32 PM	BCl3 MFC set to  0.000000
9/21/2010	12:18:32 PM	PHl3 MFC set to  0.000000
9/21/2010	12:18:32 PM	SiCl4 MFC set to  0.000000
9/21/2010	12:18:32 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	12:18:32 PM	Tube furnace set to 0
9/21/2010	12:19:32 PM	Helium valve closed
9/21/2010	12:19:32 PM	H2 valve closed
9/21/2010	12:19:32 PM	BCl3 valve closed
9/21/2010	12:19:32 PM	PH3 valve closed
9/21/2010	12:19:32 PM	SiCl4 pre valve closed
9/21/2010	12:19:32 PM	SiCl4 post valve closed
9/21/2010	12:19:32 PM	Bubbler valve closed
9/21/2010	12:19:32 PM	Main Vac valve opened
9/21/2010	12:19:32 PM	Bypass valve opened
9/21/2010	12:19:32 PM	Helium MFC set to  0.000000
9/21/2010	12:19:32 PM	H2 MFC set to  0.000000
9/21/2010	12:19:32 PM	BCl3 MFC set to  0.000000
9/21/2010	12:19:32 PM	PHl3 MFC set to  0.000000
9/21/2010	12:19:32 PM	SiCl4 MFC set to  0.000000
9/21/2010	12:19:32 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	12:19:32 PM	Tube furnace set to 0
9/21/2010	12:19:33 PM	Run finished at 12:19 PM
9/21/2010	12:19:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/21/2010	1:32:06 PM	Recipe started at 1:32 PM
9/21/2010	1:32:06 PM	Helium valve closed
9/21/2010	1:32:06 PM	BCl3 valve closed
9/21/2010	1:32:06 PM	PH3 valve closed
9/21/2010	1:32:06 PM	SiCl4 pre valve closed
9/21/2010	1:32:06 PM	SiCl4 post valve closed
9/21/2010	1:32:06 PM	Main Vac valve closed
9/21/2010	1:32:06 PM	Bypass valve closed
9/21/2010	1:32:06 PM	Bubbler valve closed
9/21/2010	1:32:06 PM	H2 valve opened
9/21/2010	1:32:06 PM	Helium MFC set to  0.000000
9/21/2010	1:32:06 PM	H2 MFC set to  500.000000
9/21/2010	1:32:06 PM	BCl3 MFC set to  0.000000
9/21/2010	1:32:06 PM	PHl3 MFC set to  0.000000
9/21/2010	1:32:06 PM	SiCl4 MFC set to  0.000000
9/21/2010	1:32:06 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	1:32:06 PM	Tube furnace set to 0
9/21/2010	1:33:27 PM	Helium valve closed
9/21/2010	1:33:27 PM	BCl3 valve closed
9/21/2010	1:33:28 PM	PH3 valve closed
9/21/2010	1:33:28 PM	SiCl4 pre valve closed
9/21/2010	1:33:28 PM	SiCl4 post valve closed
9/21/2010	1:33:28 PM	Main Vac valve closed
9/21/2010	1:33:28 PM	Bypass valve closed
9/21/2010	1:33:28 PM	H2 valve opened
9/21/2010	1:33:28 PM	Bubbler valve opened
9/21/2010	1:33:28 PM	Helium MFC set to  0.000000
9/21/2010	1:33:28 PM	H2 MFC set to  500.000000
9/21/2010	1:33:28 PM	BCl3 MFC set to  0.000000
9/21/2010	1:33:28 PM	PHl3 MFC set to  0.000000
9/21/2010	1:33:28 PM	SiCl4 MFC set to  0.000000
9/21/2010	1:33:28 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	1:33:28 PM	Tube furnace set to 1000
9/21/2010	1:53:28 PM	Helium valve closed
9/21/2010	1:53:28 PM	PH3 valve closed
9/21/2010	1:53:28 PM	Main Vac valve closed
9/21/2010	1:53:28 PM	Bypass valve closed
9/21/2010	1:53:28 PM	H2 valve opened
9/21/2010	1:53:28 PM	BCl3 valve opened
9/21/2010	1:53:28 PM	SiCl4 pre valve opened
9/21/2010	1:53:28 PM	SiCl4 post valve opened
9/21/2010	1:53:28 PM	Bubbler valve opened
9/21/2010	1:53:28 PM	Helium MFC set to  0.000000
9/21/2010	1:53:28 PM	H2 MFC set to  500.000000
9/21/2010	1:53:28 PM	BCl3 MFC set to  25.000000
9/21/2010	1:53:28 PM	PHl3 MFC set to  0.000000
9/21/2010	1:53:28 PM	SiCl4 MFC set to  50.000000
9/21/2010	1:53:28 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	1:53:28 PM	Tube furnace set to 1000
9/21/2010	2:05:28 PM	H2 valve closed
9/21/2010	2:05:28 PM	BCl3 valve closed
9/21/2010	2:05:28 PM	PH3 valve closed
9/21/2010	2:05:28 PM	SiCl4 pre valve closed
9/21/2010	2:05:28 PM	SiCl4 post valve closed
9/21/2010	2:05:28 PM	Main Vac valve closed
9/21/2010	2:05:28 PM	Bypass valve closed
9/21/2010	2:05:28 PM	Helium valve opened
9/21/2010	2:05:28 PM	Bubbler valve opened
9/21/2010	2:05:28 PM	Helium MFC set to  500.000000
9/21/2010	2:05:28 PM	H2 MFC set to  0.000000
9/21/2010	2:05:28 PM	BCl3 MFC set to  0.000000
9/21/2010	2:05:28 PM	PHl3 MFC set to  0.000000
9/21/2010	2:05:28 PM	SiCl4 MFC set to  0.000000
9/21/2010	2:05:28 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	2:05:28 PM	Tube furnace set to 0
9/21/2010	2:25:28 PM	Helium valve closed
9/21/2010	2:25:28 PM	H2 valve closed
9/21/2010	2:25:28 PM	BCl3 valve closed
9/21/2010	2:25:28 PM	PH3 valve closed
9/21/2010	2:25:28 PM	SiCl4 pre valve closed
9/21/2010	2:25:28 PM	SiCl4 post valve closed
9/21/2010	2:25:28 PM	Main Vac valve closed
9/21/2010	2:25:28 PM	Bypass valve closed
9/21/2010	2:25:28 PM	Bubbler valve closed
9/21/2010	2:25:28 PM	Helium MFC set to  0.000000
9/21/2010	2:25:28 PM	H2 MFC set to  0.000000
9/21/2010	2:25:28 PM	BCl3 MFC set to  0.000000
9/21/2010	2:25:28 PM	PHl3 MFC set to  0.000000
9/21/2010	2:25:28 PM	SiCl4 MFC set to  0.000000
9/21/2010	2:25:28 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	2:25:28 PM	Tube furnace set to 0
9/21/2010	2:25:28 PM	Run finished at 2:25 PM
9/21/2010	2:36:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/21/2010	2:36:49 PM	Recipe started at 2:36 PM
9/21/2010	2:36:49 PM	Helium valve closed
9/21/2010	2:36:49 PM	H2 valve closed
9/21/2010	2:36:49 PM	BCl3 valve closed
9/21/2010	2:36:49 PM	PH3 valve closed
9/21/2010	2:36:49 PM	SiCl4 pre valve closed
9/21/2010	2:36:49 PM	SiCl4 post valve closed
9/21/2010	2:36:49 PM	Main Vac valve closed
9/21/2010	2:36:49 PM	Bubbler valve closed
9/21/2010	2:36:49 PM	Bypass valve opened
9/21/2010	2:36:49 PM	Helium MFC set to  0.000000
9/21/2010	2:36:49 PM	H2 MFC set to  0.000000
9/21/2010	2:36:49 PM	BCl3 MFC set to  0.000000
9/21/2010	2:36:49 PM	PHl3 MFC set to  0.000000
9/21/2010	2:36:49 PM	SiCl4 MFC set to  0.000000
9/21/2010	2:36:49 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	2:36:49 PM	Tube furnace set to 0
9/21/2010	2:37:28 PM	Helium valve closed
9/21/2010	2:37:28 PM	H2 valve closed
9/21/2010	2:37:28 PM	BCl3 valve closed
9/21/2010	2:37:28 PM	PH3 valve closed
9/21/2010	2:37:28 PM	SiCl4 pre valve closed
9/21/2010	2:37:28 PM	SiCl4 post valve closed
9/21/2010	2:37:28 PM	Bubbler valve closed
9/21/2010	2:37:28 PM	Main Vac valve opened
9/21/2010	2:37:28 PM	Bypass valve opened
9/21/2010	2:37:28 PM	Helium MFC set to  0.000000
9/21/2010	2:37:28 PM	H2 MFC set to  0.000000
9/21/2010	2:37:28 PM	BCl3 MFC set to  0.000000
9/21/2010	2:37:28 PM	PHl3 MFC set to  0.000000
9/21/2010	2:37:28 PM	SiCl4 MFC set to  0.000000
9/21/2010	2:37:28 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	2:37:29 PM	Tube furnace set to 0
9/21/2010	2:37:29 PM	Run finished at 2:37 PM
9/21/2010	2:37:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/21/2010	2:37:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/21/2010	2:38:09 PM	Recipe started at 2:38 PM
9/21/2010	2:38:09 PM	Helium valve closed
9/21/2010	2:38:09 PM	H2 valve closed
9/21/2010	2:38:09 PM	BCl3 valve closed
9/21/2010	2:38:09 PM	PH3 valve closed
9/21/2010	2:38:09 PM	SiCl4 pre valve closed
9/21/2010	2:38:09 PM	SiCl4 post valve closed
9/21/2010	2:38:09 PM	Main Vac valve closed
9/21/2010	2:38:09 PM	Bubbler valve closed
9/21/2010	2:38:09 PM	Bypass valve opened
9/21/2010	2:38:09 PM	Helium MFC set to  0.000000
9/21/2010	2:38:09 PM	H2 MFC set to  0.000000
9/21/2010	2:38:09 PM	BCl3 MFC set to  0.000000
9/21/2010	2:38:09 PM	PHl3 MFC set to  0.000000
9/21/2010	2:38:09 PM	SiCl4 MFC set to  0.000000
9/21/2010	2:38:09 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	2:38:09 PM	Tube furnace set to 0
9/21/2010	2:38:10 PM	Helium valve closed
9/21/2010	2:38:10 PM	H2 valve closed
9/21/2010	2:38:10 PM	BCl3 valve closed
9/21/2010	2:38:10 PM	PH3 valve closed
9/21/2010	2:38:10 PM	SiCl4 pre valve closed
9/21/2010	2:38:10 PM	SiCl4 post valve closed
9/21/2010	2:38:10 PM	Bubbler valve closed
9/21/2010	2:38:10 PM	Main Vac valve opened
9/21/2010	2:38:10 PM	Bypass valve opened
9/21/2010	2:38:10 PM	Helium MFC set to  0.000000
9/21/2010	2:38:10 PM	H2 MFC set to  0.000000
9/21/2010	2:38:10 PM	BCl3 MFC set to  0.000000
9/21/2010	2:38:10 PM	PHl3 MFC set to  0.000000
9/21/2010	2:38:10 PM	SiCl4 MFC set to  0.000000
9/21/2010	2:38:10 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	2:38:10 PM	Tube furnace set to 0
9/21/2010	2:39:10 PM	H2 valve closed
9/21/2010	2:39:10 PM	BCl3 valve closed
9/21/2010	2:39:10 PM	PH3 valve closed
9/21/2010	2:39:10 PM	SiCl4 pre valve closed
9/21/2010	2:39:10 PM	SiCl4 post valve closed
9/21/2010	2:39:10 PM	Bubbler valve closed
9/21/2010	2:39:10 PM	Helium valve opened
9/21/2010	2:39:10 PM	Main Vac valve opened
9/21/2010	2:39:10 PM	Bypass valve opened
9/21/2010	2:39:10 PM	Helium MFC set to  100.000000
9/21/2010	2:39:10 PM	H2 MFC set to  0.000000
9/21/2010	2:39:10 PM	BCl3 MFC set to  0.000000
9/21/2010	2:39:10 PM	PHl3 MFC set to  0.000000
9/21/2010	2:39:10 PM	SiCl4 MFC set to  0.000000
9/21/2010	2:39:10 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	2:39:10 PM	Tube furnace set to 0
9/21/2010	2:40:10 PM	Helium valve closed
9/21/2010	2:40:10 PM	H2 valve closed
9/21/2010	2:40:10 PM	BCl3 valve closed
9/21/2010	2:40:10 PM	PH3 valve closed
9/21/2010	2:40:10 PM	SiCl4 pre valve closed
9/21/2010	2:40:10 PM	SiCl4 post valve closed
9/21/2010	2:40:10 PM	Bubbler valve closed
9/21/2010	2:40:10 PM	Main Vac valve opened
9/21/2010	2:40:10 PM	Bypass valve opened
9/21/2010	2:40:10 PM	Helium MFC set to  0.000000
9/21/2010	2:40:10 PM	H2 MFC set to  0.000000
9/21/2010	2:40:10 PM	BCl3 MFC set to  0.000000
9/21/2010	2:40:10 PM	PHl3 MFC set to  0.000000
9/21/2010	2:40:10 PM	SiCl4 MFC set to  0.000000
9/21/2010	2:40:10 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	2:40:10 PM	Tube furnace set to 0
9/21/2010	2:41:10 PM	H2 valve closed
9/21/2010	2:41:10 PM	BCl3 valve closed
9/21/2010	2:41:10 PM	PH3 valve closed
9/21/2010	2:41:10 PM	SiCl4 pre valve closed
9/21/2010	2:41:10 PM	SiCl4 post valve closed
9/21/2010	2:41:10 PM	Bubbler valve closed
9/21/2010	2:41:10 PM	Helium valve opened
9/21/2010	2:41:10 PM	Main Vac valve opened
9/21/2010	2:41:10 PM	Bypass valve opened
9/21/2010	2:41:10 PM	Helium MFC set to  100.000000
9/21/2010	2:41:10 PM	H2 MFC set to  0.000000
9/21/2010	2:41:10 PM	BCl3 MFC set to  0.000000
9/21/2010	2:41:10 PM	PHl3 MFC set to  0.000000
9/21/2010	2:41:10 PM	SiCl4 MFC set to  0.000000
9/21/2010	2:41:10 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	2:41:10 PM	Tube furnace set to 0
9/21/2010	2:42:10 PM	Helium valve closed
9/21/2010	2:42:10 PM	H2 valve closed
9/21/2010	2:42:10 PM	BCl3 valve closed
9/21/2010	2:42:10 PM	PH3 valve closed
9/21/2010	2:42:10 PM	SiCl4 pre valve closed
9/21/2010	2:42:10 PM	SiCl4 post valve closed
9/21/2010	2:42:10 PM	Bubbler valve closed
9/21/2010	2:42:10 PM	Main Vac valve opened
9/21/2010	2:42:10 PM	Bypass valve opened
9/21/2010	2:42:11 PM	Helium MFC set to  0.000000
9/21/2010	2:42:11 PM	H2 MFC set to  0.000000
9/21/2010	2:42:11 PM	BCl3 MFC set to  0.000000
9/21/2010	2:42:11 PM	PHl3 MFC set to  0.000000
9/21/2010	2:42:11 PM	SiCl4 MFC set to  0.000000
9/21/2010	2:42:11 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	2:42:11 PM	Tube furnace set to 0
9/21/2010	2:43:11 PM	H2 valve closed
9/21/2010	2:43:11 PM	BCl3 valve closed
9/21/2010	2:43:11 PM	PH3 valve closed
9/21/2010	2:43:11 PM	SiCl4 pre valve closed
9/21/2010	2:43:11 PM	SiCl4 post valve closed
9/21/2010	2:43:11 PM	Bubbler valve closed
9/21/2010	2:43:11 PM	Helium valve opened
9/21/2010	2:43:11 PM	Main Vac valve opened
9/21/2010	2:43:11 PM	Bypass valve opened
9/21/2010	2:43:11 PM	Helium MFC set to  100.000000
9/21/2010	2:43:11 PM	H2 MFC set to  0.000000
9/21/2010	2:43:11 PM	BCl3 MFC set to  0.000000
9/21/2010	2:43:11 PM	PHl3 MFC set to  0.000000
9/21/2010	2:43:11 PM	SiCl4 MFC set to  0.000000
9/21/2010	2:43:11 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	2:43:11 PM	Tube furnace set to 0
9/21/2010	2:44:11 PM	Helium valve closed
9/21/2010	2:44:11 PM	H2 valve closed
9/21/2010	2:44:11 PM	BCl3 valve closed
9/21/2010	2:44:11 PM	PH3 valve closed
9/21/2010	2:44:11 PM	SiCl4 pre valve closed
9/21/2010	2:44:11 PM	SiCl4 post valve closed
9/21/2010	2:44:11 PM	Bubbler valve closed
9/21/2010	2:44:11 PM	Main Vac valve opened
9/21/2010	2:44:11 PM	Bypass valve opened
9/21/2010	2:44:11 PM	Helium MFC set to  0.000000
9/21/2010	2:44:11 PM	H2 MFC set to  0.000000
9/21/2010	2:44:11 PM	BCl3 MFC set to  0.000000
9/21/2010	2:44:11 PM	PHl3 MFC set to  0.000000
9/21/2010	2:44:11 PM	SiCl4 MFC set to  0.000000
9/21/2010	2:44:11 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	2:44:11 PM	Tube furnace set to 0
9/21/2010	2:45:11 PM	H2 valve closed
9/21/2010	2:45:11 PM	BCl3 valve closed
9/21/2010	2:45:11 PM	PH3 valve closed
9/21/2010	2:45:11 PM	SiCl4 pre valve closed
9/21/2010	2:45:11 PM	SiCl4 post valve closed
9/21/2010	2:45:11 PM	Bubbler valve closed
9/21/2010	2:45:11 PM	Helium valve opened
9/21/2010	2:45:11 PM	Main Vac valve opened
9/21/2010	2:45:11 PM	Bypass valve opened
9/21/2010	2:45:11 PM	Helium MFC set to  100.000000
9/21/2010	2:45:11 PM	H2 MFC set to  0.000000
9/21/2010	2:45:11 PM	BCl3 MFC set to  0.000000
9/21/2010	2:45:11 PM	PHl3 MFC set to  0.000000
9/21/2010	2:45:11 PM	SiCl4 MFC set to  0.000000
9/21/2010	2:45:11 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	2:45:11 PM	Tube furnace set to 0
9/21/2010	2:46:11 PM	Helium valve closed
9/21/2010	2:46:11 PM	H2 valve closed
9/21/2010	2:46:11 PM	BCl3 valve closed
9/21/2010	2:46:11 PM	PH3 valve closed
9/21/2010	2:46:11 PM	SiCl4 pre valve closed
9/21/2010	2:46:11 PM	SiCl4 post valve closed
9/21/2010	2:46:11 PM	Bubbler valve closed
9/21/2010	2:46:11 PM	Main Vac valve opened
9/21/2010	2:46:11 PM	Bypass valve opened
9/21/2010	2:46:11 PM	Helium MFC set to  0.000000
9/21/2010	2:46:11 PM	H2 MFC set to  0.000000
9/21/2010	2:46:11 PM	BCl3 MFC set to  0.000000
9/21/2010	2:46:11 PM	PHl3 MFC set to  0.000000
9/21/2010	2:46:11 PM	SiCl4 MFC set to  0.000000
9/21/2010	2:46:11 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	2:46:11 PM	Tube furnace set to 0
9/21/2010	2:47:11 PM	H2 valve closed
9/21/2010	2:47:11 PM	BCl3 valve closed
9/21/2010	2:47:11 PM	PH3 valve closed
9/21/2010	2:47:11 PM	SiCl4 pre valve closed
9/21/2010	2:47:11 PM	SiCl4 post valve closed
9/21/2010	2:47:11 PM	Bubbler valve closed
9/21/2010	2:47:11 PM	Helium valve opened
9/21/2010	2:47:11 PM	Main Vac valve opened
9/21/2010	2:47:11 PM	Bypass valve opened
9/21/2010	2:47:11 PM	Helium MFC set to  100.000000
9/21/2010	2:47:11 PM	H2 MFC set to  0.000000
9/21/2010	2:47:11 PM	BCl3 MFC set to  0.000000
9/21/2010	2:47:11 PM	PHl3 MFC set to  0.000000
9/21/2010	2:47:11 PM	SiCl4 MFC set to  0.000000
9/21/2010	2:47:11 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	2:47:12 PM	Tube furnace set to 0
9/21/2010	2:48:12 PM	Helium valve closed
9/21/2010	2:48:12 PM	H2 valve closed
9/21/2010	2:48:12 PM	BCl3 valve closed
9/21/2010	2:48:12 PM	PH3 valve closed
9/21/2010	2:48:12 PM	SiCl4 pre valve closed
9/21/2010	2:48:12 PM	SiCl4 post valve closed
9/21/2010	2:48:12 PM	Bubbler valve closed
9/21/2010	2:48:12 PM	Main Vac valve opened
9/21/2010	2:48:12 PM	Bypass valve opened
9/21/2010	2:48:12 PM	Helium MFC set to  0.000000
9/21/2010	2:48:12 PM	H2 MFC set to  0.000000
9/21/2010	2:48:12 PM	BCl3 MFC set to  0.000000
9/21/2010	2:48:12 PM	PHl3 MFC set to  0.000000
9/21/2010	2:48:12 PM	SiCl4 MFC set to  0.000000
9/21/2010	2:48:12 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	2:48:12 PM	Tube furnace set to 0
9/21/2010	2:49:12 PM	H2 valve closed
9/21/2010	2:49:12 PM	BCl3 valve closed
9/21/2010	2:49:12 PM	PH3 valve closed
9/21/2010	2:49:12 PM	SiCl4 pre valve closed
9/21/2010	2:49:12 PM	SiCl4 post valve closed
9/21/2010	2:49:12 PM	Bubbler valve closed
9/21/2010	2:49:12 PM	Helium valve opened
9/21/2010	2:49:12 PM	Main Vac valve opened
9/21/2010	2:49:12 PM	Bypass valve opened
9/21/2010	2:49:12 PM	Helium MFC set to  100.000000
9/21/2010	2:49:12 PM	H2 MFC set to  0.000000
9/21/2010	2:49:12 PM	BCl3 MFC set to  0.000000
9/21/2010	2:49:12 PM	PHl3 MFC set to  0.000000
9/21/2010	2:49:12 PM	SiCl4 MFC set to  0.000000
9/21/2010	2:49:12 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	2:49:12 PM	Tube furnace set to 0
9/21/2010	2:50:12 PM	Helium valve closed
9/21/2010	2:50:12 PM	H2 valve closed
9/21/2010	2:50:12 PM	BCl3 valve closed
9/21/2010	2:50:12 PM	PH3 valve closed
9/21/2010	2:50:12 PM	SiCl4 pre valve closed
9/21/2010	2:50:12 PM	SiCl4 post valve closed
9/21/2010	2:50:12 PM	Bubbler valve closed
9/21/2010	2:50:12 PM	Main Vac valve opened
9/21/2010	2:50:12 PM	Bypass valve opened
9/21/2010	2:50:12 PM	Helium MFC set to  0.000000
9/21/2010	2:50:12 PM	H2 MFC set to  0.000000
9/21/2010	2:50:12 PM	BCl3 MFC set to  0.000000
9/21/2010	2:50:12 PM	PHl3 MFC set to  0.000000
9/21/2010	2:50:12 PM	SiCl4 MFC set to  0.000000
9/21/2010	2:50:12 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	2:50:12 PM	Tube furnace set to 0
9/21/2010	2:51:12 PM	H2 valve closed
9/21/2010	2:51:12 PM	BCl3 valve closed
9/21/2010	2:51:12 PM	PH3 valve closed
9/21/2010	2:51:12 PM	SiCl4 pre valve closed
9/21/2010	2:51:12 PM	SiCl4 post valve closed
9/21/2010	2:51:12 PM	Bubbler valve closed
9/21/2010	2:51:12 PM	Helium valve opened
9/21/2010	2:51:12 PM	Main Vac valve opened
9/21/2010	2:51:12 PM	Bypass valve opened
9/21/2010	2:51:12 PM	Helium MFC set to  100.000000
9/21/2010	2:51:12 PM	H2 MFC set to  0.000000
9/21/2010	2:51:12 PM	BCl3 MFC set to  0.000000
9/21/2010	2:51:12 PM	PHl3 MFC set to  0.000000
9/21/2010	2:51:12 PM	SiCl4 MFC set to  0.000000
9/21/2010	2:51:12 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	2:51:12 PM	Tube furnace set to 0
9/21/2010	2:52:12 PM	Helium valve closed
9/21/2010	2:52:12 PM	H2 valve closed
9/21/2010	2:52:12 PM	BCl3 valve closed
9/21/2010	2:52:12 PM	PH3 valve closed
9/21/2010	2:52:12 PM	SiCl4 pre valve closed
9/21/2010	2:52:12 PM	SiCl4 post valve closed
9/21/2010	2:52:12 PM	Bubbler valve closed
9/21/2010	2:52:12 PM	Main Vac valve opened
9/21/2010	2:52:12 PM	Bypass valve opened
9/21/2010	2:52:12 PM	Helium MFC set to  0.000000
9/21/2010	2:52:12 PM	H2 MFC set to  0.000000
9/21/2010	2:52:12 PM	BCl3 MFC set to  0.000000
9/21/2010	2:52:12 PM	PHl3 MFC set to  0.000000
9/21/2010	2:52:12 PM	SiCl4 MFC set to  0.000000
9/21/2010	2:52:12 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	2:52:13 PM	Tube furnace set to 0
9/21/2010	2:53:13 PM	H2 valve closed
9/21/2010	2:53:13 PM	BCl3 valve closed
9/21/2010	2:53:13 PM	PH3 valve closed
9/21/2010	2:53:13 PM	SiCl4 pre valve closed
9/21/2010	2:53:13 PM	SiCl4 post valve closed
9/21/2010	2:53:13 PM	Bubbler valve closed
9/21/2010	2:53:13 PM	Helium valve opened
9/21/2010	2:53:13 PM	Main Vac valve opened
9/21/2010	2:53:13 PM	Bypass valve opened
9/21/2010	2:53:13 PM	Helium MFC set to  100.000000
9/21/2010	2:53:13 PM	H2 MFC set to  0.000000
9/21/2010	2:53:13 PM	BCl3 MFC set to  0.000000
9/21/2010	2:53:13 PM	PHl3 MFC set to  0.000000
9/21/2010	2:53:13 PM	SiCl4 MFC set to  0.000000
9/21/2010	2:53:13 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	2:53:13 PM	Tube furnace set to 0
9/21/2010	2:54:13 PM	Helium valve closed
9/21/2010	2:54:13 PM	H2 valve closed
9/21/2010	2:54:13 PM	BCl3 valve closed
9/21/2010	2:54:13 PM	PH3 valve closed
9/21/2010	2:54:13 PM	SiCl4 pre valve closed
9/21/2010	2:54:13 PM	SiCl4 post valve closed
9/21/2010	2:54:13 PM	Bubbler valve closed
9/21/2010	2:54:13 PM	Main Vac valve opened
9/21/2010	2:54:13 PM	Bypass valve opened
9/21/2010	2:54:13 PM	Helium MFC set to  0.000000
9/21/2010	2:54:13 PM	H2 MFC set to  0.000000
9/21/2010	2:54:13 PM	BCl3 MFC set to  0.000000
9/21/2010	2:54:13 PM	PHl3 MFC set to  0.000000
9/21/2010	2:54:13 PM	SiCl4 MFC set to  0.000000
9/21/2010	2:54:13 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	2:54:13 PM	Tube furnace set to 0
9/21/2010	2:55:13 PM	H2 valve closed
9/21/2010	2:55:13 PM	BCl3 valve closed
9/21/2010	2:55:13 PM	PH3 valve closed
9/21/2010	2:55:13 PM	SiCl4 pre valve closed
9/21/2010	2:55:13 PM	SiCl4 post valve closed
9/21/2010	2:55:13 PM	Bubbler valve closed
9/21/2010	2:55:13 PM	Helium valve opened
9/21/2010	2:55:13 PM	Main Vac valve opened
9/21/2010	2:55:13 PM	Bypass valve opened
9/21/2010	2:55:13 PM	Helium MFC set to  100.000000
9/21/2010	2:55:13 PM	H2 MFC set to  0.000000
9/21/2010	2:55:13 PM	BCl3 MFC set to  0.000000
9/21/2010	2:55:13 PM	PHl3 MFC set to  0.000000
9/21/2010	2:55:13 PM	SiCl4 MFC set to  0.000000
9/21/2010	2:55:13 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	2:55:13 PM	Tube furnace set to 0
9/21/2010	2:56:13 PM	Helium valve closed
9/21/2010	2:56:13 PM	H2 valve closed
9/21/2010	2:56:13 PM	BCl3 valve closed
9/21/2010	2:56:13 PM	PH3 valve closed
9/21/2010	2:56:13 PM	SiCl4 pre valve closed
9/21/2010	2:56:13 PM	SiCl4 post valve closed
9/21/2010	2:56:13 PM	Bubbler valve closed
9/21/2010	2:56:13 PM	Main Vac valve opened
9/21/2010	2:56:13 PM	Bypass valve opened
9/21/2010	2:56:13 PM	Helium MFC set to  0.000000
9/21/2010	2:56:13 PM	H2 MFC set to  0.000000
9/21/2010	2:56:13 PM	BCl3 MFC set to  0.000000
9/21/2010	2:56:13 PM	PHl3 MFC set to  0.000000
9/21/2010	2:56:13 PM	SiCl4 MFC set to  0.000000
9/21/2010	2:56:13 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	2:56:13 PM	Tube furnace set to 0
9/21/2010	2:57:13 PM	H2 valve closed
9/21/2010	2:57:13 PM	BCl3 valve closed
9/21/2010	2:57:13 PM	PH3 valve closed
9/21/2010	2:57:13 PM	SiCl4 pre valve closed
9/21/2010	2:57:13 PM	SiCl4 post valve closed
9/21/2010	2:57:13 PM	Bubbler valve closed
9/21/2010	2:57:13 PM	Helium valve opened
9/21/2010	2:57:13 PM	Main Vac valve opened
9/21/2010	2:57:13 PM	Bypass valve opened
9/21/2010	2:57:13 PM	Helium MFC set to  100.000000
9/21/2010	2:57:13 PM	H2 MFC set to  0.000000
9/21/2010	2:57:13 PM	BCl3 MFC set to  0.000000
9/21/2010	2:57:13 PM	PHl3 MFC set to  0.000000
9/21/2010	2:57:13 PM	SiCl4 MFC set to  0.000000
9/21/2010	2:57:13 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	2:57:14 PM	Tube furnace set to 0
9/21/2010	2:58:14 PM	Helium valve closed
9/21/2010	2:58:14 PM	H2 valve closed
9/21/2010	2:58:14 PM	BCl3 valve closed
9/21/2010	2:58:14 PM	PH3 valve closed
9/21/2010	2:58:14 PM	SiCl4 pre valve closed
9/21/2010	2:58:14 PM	SiCl4 post valve closed
9/21/2010	2:58:14 PM	Bubbler valve closed
9/21/2010	2:58:14 PM	Main Vac valve opened
9/21/2010	2:58:14 PM	Bypass valve opened
9/21/2010	2:58:14 PM	Helium MFC set to  0.000000
9/21/2010	2:58:14 PM	H2 MFC set to  0.000000
9/21/2010	2:58:14 PM	BCl3 MFC set to  0.000000
9/21/2010	2:58:14 PM	PHl3 MFC set to  0.000000
9/21/2010	2:58:14 PM	SiCl4 MFC set to  0.000000
9/21/2010	2:58:14 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	2:58:14 PM	Tube furnace set to 0
9/21/2010	2:58:15 PM	Run finished at 2:58 PM
9/21/2010	2:58:15 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/21/2010	3:02:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/21/2010	3:02:38 PM	Recipe started at 3:02 PM
9/21/2010	3:02:38 PM	Helium valve closed
9/21/2010	3:02:38 PM	H2 valve closed
9/21/2010	3:02:38 PM	BCl3 valve closed
9/21/2010	3:02:38 PM	PH3 valve closed
9/21/2010	3:02:38 PM	SiCl4 pre valve closed
9/21/2010	3:02:38 PM	SiCl4 post valve closed
9/21/2010	3:02:38 PM	Main Vac valve closed
9/21/2010	3:02:38 PM	Bubbler valve closed
9/21/2010	3:02:38 PM	Bypass valve opened
9/21/2010	3:02:38 PM	Helium MFC set to  0.000000
9/21/2010	3:02:38 PM	H2 MFC set to  0.000000
9/21/2010	3:02:38 PM	BCl3 MFC set to  0.000000
9/21/2010	3:02:38 PM	PHl3 MFC set to  0.000000
9/21/2010	3:02:38 PM	SiCl4 MFC set to  0.000000
9/21/2010	3:02:38 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	3:02:39 PM	Tube furnace set to 0
9/21/2010	3:02:39 PM	Helium valve closed
9/21/2010	3:02:39 PM	H2 valve closed
9/21/2010	3:02:39 PM	BCl3 valve closed
9/21/2010	3:02:39 PM	PH3 valve closed
9/21/2010	3:02:39 PM	SiCl4 pre valve closed
9/21/2010	3:02:39 PM	SiCl4 post valve closed
9/21/2010	3:02:39 PM	Bubbler valve closed
9/21/2010	3:02:39 PM	Main Vac valve opened
9/21/2010	3:02:39 PM	Bypass valve opened
9/21/2010	3:02:39 PM	Helium MFC set to  0.000000
9/21/2010	3:02:39 PM	H2 MFC set to  0.000000
9/21/2010	3:02:39 PM	BCl3 MFC set to  0.000000
9/21/2010	3:02:39 PM	PHl3 MFC set to  0.000000
9/21/2010	3:02:39 PM	SiCl4 MFC set to  0.000000
9/21/2010	3:02:39 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	3:02:39 PM	Tube furnace set to 0
9/21/2010	3:03:39 PM	H2 valve closed
9/21/2010	3:03:39 PM	BCl3 valve closed
9/21/2010	3:03:39 PM	PH3 valve closed
9/21/2010	3:03:39 PM	SiCl4 pre valve closed
9/21/2010	3:03:39 PM	SiCl4 post valve closed
9/21/2010	3:03:39 PM	Bubbler valve closed
9/21/2010	3:03:39 PM	Helium valve opened
9/21/2010	3:03:39 PM	Main Vac valve opened
9/21/2010	3:03:39 PM	Bypass valve opened
9/21/2010	3:03:39 PM	Helium MFC set to  100.000000
9/21/2010	3:03:39 PM	H2 MFC set to  0.000000
9/21/2010	3:03:39 PM	BCl3 MFC set to  0.000000
9/21/2010	3:03:39 PM	PHl3 MFC set to  0.000000
9/21/2010	3:03:39 PM	SiCl4 MFC set to  0.000000
9/21/2010	3:03:39 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	3:03:39 PM	Tube furnace set to 0
9/21/2010	3:04:39 PM	Helium valve closed
9/21/2010	3:04:39 PM	H2 valve closed
9/21/2010	3:04:39 PM	BCl3 valve closed
9/21/2010	3:04:39 PM	PH3 valve closed
9/21/2010	3:04:39 PM	SiCl4 pre valve closed
9/21/2010	3:04:39 PM	SiCl4 post valve closed
9/21/2010	3:04:39 PM	Bubbler valve closed
9/21/2010	3:04:39 PM	Main Vac valve opened
9/21/2010	3:04:39 PM	Bypass valve opened
9/21/2010	3:04:39 PM	Helium MFC set to  0.000000
9/21/2010	3:04:39 PM	H2 MFC set to  0.000000
9/21/2010	3:04:39 PM	BCl3 MFC set to  0.000000
9/21/2010	3:04:39 PM	PHl3 MFC set to  0.000000
9/21/2010	3:04:39 PM	SiCl4 MFC set to  0.000000
9/21/2010	3:04:39 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	3:04:39 PM	Tube furnace set to 0
9/21/2010	3:05:33 PM	H2 valve closed
9/21/2010	3:05:33 PM	BCl3 valve closed
9/21/2010	3:05:33 PM	PH3 valve closed
9/21/2010	3:05:33 PM	SiCl4 pre valve closed
9/21/2010	3:05:33 PM	SiCl4 post valve closed
9/21/2010	3:05:33 PM	Bubbler valve closed
9/21/2010	3:05:33 PM	Helium valve opened
9/21/2010	3:05:33 PM	Main Vac valve opened
9/21/2010	3:05:33 PM	Bypass valve opened
9/21/2010	3:05:33 PM	Helium MFC set to  100.000000
9/21/2010	3:05:33 PM	H2 MFC set to  0.000000
9/21/2010	3:05:33 PM	BCl3 MFC set to  0.000000
9/21/2010	3:05:33 PM	PHl3 MFC set to  0.000000
9/21/2010	3:05:33 PM	SiCl4 MFC set to  0.000000
9/21/2010	3:05:33 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	3:05:33 PM	Tube furnace set to 0
9/21/2010	3:05:34 PM	Helium valve closed
9/21/2010	3:05:34 PM	H2 valve closed
9/21/2010	3:05:34 PM	BCl3 valve closed
9/21/2010	3:05:34 PM	PH3 valve closed
9/21/2010	3:05:34 PM	SiCl4 pre valve closed
9/21/2010	3:05:34 PM	SiCl4 post valve closed
9/21/2010	3:05:34 PM	Bubbler valve closed
9/21/2010	3:05:34 PM	Main Vac valve opened
9/21/2010	3:05:34 PM	Bypass valve opened
9/21/2010	3:05:34 PM	Helium MFC set to  0.000000
9/21/2010	3:05:34 PM	H2 MFC set to  0.000000
9/21/2010	3:05:34 PM	BCl3 MFC set to  0.000000
9/21/2010	3:05:34 PM	PHl3 MFC set to  0.000000
9/21/2010	3:05:34 PM	SiCl4 MFC set to  0.000000
9/21/2010	3:05:34 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	3:05:34 PM	Tube furnace set to 0
9/21/2010	3:05:35 PM	H2 valve closed
9/21/2010	3:05:35 PM	BCl3 valve closed
9/21/2010	3:05:35 PM	PH3 valve closed
9/21/2010	3:05:35 PM	SiCl4 pre valve closed
9/21/2010	3:05:35 PM	SiCl4 post valve closed
9/21/2010	3:05:35 PM	Bubbler valve closed
9/21/2010	3:05:35 PM	Helium valve opened
9/21/2010	3:05:35 PM	Main Vac valve opened
9/21/2010	3:05:35 PM	Bypass valve opened
9/21/2010	3:05:35 PM	Helium MFC set to  100.000000
9/21/2010	3:05:35 PM	H2 MFC set to  0.000000
9/21/2010	3:05:35 PM	BCl3 MFC set to  0.000000
9/21/2010	3:05:35 PM	PHl3 MFC set to  0.000000
9/21/2010	3:05:35 PM	SiCl4 MFC set to  0.000000
9/21/2010	3:05:35 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	3:05:35 PM	Tube furnace set to 0
9/21/2010	3:05:35 PM	Helium valve closed
9/21/2010	3:05:35 PM	H2 valve closed
9/21/2010	3:05:35 PM	BCl3 valve closed
9/21/2010	3:05:35 PM	PH3 valve closed
9/21/2010	3:05:35 PM	SiCl4 pre valve closed
9/21/2010	3:05:35 PM	SiCl4 post valve closed
9/21/2010	3:05:35 PM	Bubbler valve closed
9/21/2010	3:05:36 PM	Main Vac valve opened
9/21/2010	3:05:36 PM	Bypass valve opened
9/21/2010	3:05:36 PM	Helium MFC set to  0.000000
9/21/2010	3:05:36 PM	H2 MFC set to  0.000000
9/21/2010	3:05:36 PM	BCl3 MFC set to  0.000000
9/21/2010	3:05:36 PM	PHl3 MFC set to  0.000000
9/21/2010	3:05:36 PM	SiCl4 MFC set to  0.000000
9/21/2010	3:05:36 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	3:05:36 PM	Tube furnace set to 0
9/21/2010	3:05:36 PM	H2 valve closed
9/21/2010	3:05:36 PM	BCl3 valve closed
9/21/2010	3:05:36 PM	PH3 valve closed
9/21/2010	3:05:36 PM	SiCl4 pre valve closed
9/21/2010	3:05:36 PM	SiCl4 post valve closed
9/21/2010	3:05:36 PM	Bubbler valve closed
9/21/2010	3:05:36 PM	Helium valve opened
9/21/2010	3:05:36 PM	Main Vac valve opened
9/21/2010	3:05:36 PM	Bypass valve opened
9/21/2010	3:05:36 PM	Helium MFC set to  100.000000
9/21/2010	3:05:36 PM	H2 MFC set to  0.000000
9/21/2010	3:05:36 PM	BCl3 MFC set to  0.000000
9/21/2010	3:05:36 PM	PHl3 MFC set to  0.000000
9/21/2010	3:05:36 PM	SiCl4 MFC set to  0.000000
9/21/2010	3:05:36 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	3:05:37 PM	Tube furnace set to 0
9/21/2010	3:05:37 PM	Helium valve closed
9/21/2010	3:05:37 PM	H2 valve closed
9/21/2010	3:05:37 PM	BCl3 valve closed
9/21/2010	3:05:37 PM	PH3 valve closed
9/21/2010	3:05:37 PM	SiCl4 pre valve closed
9/21/2010	3:05:37 PM	SiCl4 post valve closed
9/21/2010	3:05:37 PM	Bubbler valve closed
9/21/2010	3:05:37 PM	Main Vac valve opened
9/21/2010	3:05:37 PM	Bypass valve opened
9/21/2010	3:05:37 PM	Helium MFC set to  0.000000
9/21/2010	3:05:37 PM	H2 MFC set to  0.000000
9/21/2010	3:05:37 PM	BCl3 MFC set to  0.000000
9/21/2010	3:05:37 PM	PHl3 MFC set to  0.000000
9/21/2010	3:05:37 PM	SiCl4 MFC set to  0.000000
9/21/2010	3:05:37 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	3:05:37 PM	Tube furnace set to 0
9/21/2010	3:05:38 PM	H2 valve closed
9/21/2010	3:05:38 PM	BCl3 valve closed
9/21/2010	3:05:38 PM	PH3 valve closed
9/21/2010	3:05:38 PM	SiCl4 pre valve closed
9/21/2010	3:05:38 PM	SiCl4 post valve closed
9/21/2010	3:05:38 PM	Bubbler valve closed
9/21/2010	3:05:38 PM	Helium valve opened
9/21/2010	3:05:38 PM	Main Vac valve opened
9/21/2010	3:05:38 PM	Bypass valve opened
9/21/2010	3:05:38 PM	Helium MFC set to  100.000000
9/21/2010	3:05:38 PM	H2 MFC set to  0.000000
9/21/2010	3:05:38 PM	BCl3 MFC set to  0.000000
9/21/2010	3:05:38 PM	PHl3 MFC set to  0.000000
9/21/2010	3:05:38 PM	SiCl4 MFC set to  0.000000
9/21/2010	3:05:38 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	3:05:39 PM	Tube furnace set to 0
9/21/2010	3:05:39 PM	Helium valve closed
9/21/2010	3:05:39 PM	H2 valve closed
9/21/2010	3:05:39 PM	BCl3 valve closed
9/21/2010	3:05:39 PM	PH3 valve closed
9/21/2010	3:05:39 PM	SiCl4 pre valve closed
9/21/2010	3:05:39 PM	SiCl4 post valve closed
9/21/2010	3:05:39 PM	Bubbler valve closed
9/21/2010	3:05:39 PM	Main Vac valve opened
9/21/2010	3:05:39 PM	Bypass valve opened
9/21/2010	3:05:39 PM	Helium MFC set to  0.000000
9/21/2010	3:05:39 PM	H2 MFC set to  0.000000
9/21/2010	3:05:39 PM	BCl3 MFC set to  0.000000
9/21/2010	3:05:39 PM	PHl3 MFC set to  0.000000
9/21/2010	3:05:39 PM	SiCl4 MFC set to  0.000000
9/21/2010	3:05:39 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	3:05:39 PM	Tube furnace set to 0
9/21/2010	3:05:42 PM	H2 valve closed
9/21/2010	3:05:42 PM	BCl3 valve closed
9/21/2010	3:05:42 PM	PH3 valve closed
9/21/2010	3:05:42 PM	SiCl4 pre valve closed
9/21/2010	3:05:42 PM	SiCl4 post valve closed
9/21/2010	3:05:42 PM	Bubbler valve closed
9/21/2010	3:05:42 PM	Helium valve opened
9/21/2010	3:05:42 PM	Main Vac valve opened
9/21/2010	3:05:42 PM	Bypass valve opened
9/21/2010	3:05:42 PM	Helium MFC set to  100.000000
9/21/2010	3:05:42 PM	H2 MFC set to  0.000000
9/21/2010	3:05:42 PM	BCl3 MFC set to  0.000000
9/21/2010	3:05:42 PM	PHl3 MFC set to  0.000000
9/21/2010	3:05:42 PM	SiCl4 MFC set to  0.000000
9/21/2010	3:05:42 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	3:05:42 PM	Tube furnace set to 0
9/21/2010	3:05:42 PM	Helium valve closed
9/21/2010	3:05:42 PM	H2 valve closed
9/21/2010	3:05:42 PM	BCl3 valve closed
9/21/2010	3:05:42 PM	PH3 valve closed
9/21/2010	3:05:42 PM	SiCl4 pre valve closed
9/21/2010	3:05:42 PM	SiCl4 post valve closed
9/21/2010	3:05:42 PM	Bubbler valve closed
9/21/2010	3:05:42 PM	Main Vac valve opened
9/21/2010	3:05:42 PM	Bypass valve opened
9/21/2010	3:05:42 PM	Helium MFC set to  0.000000
9/21/2010	3:05:42 PM	H2 MFC set to  0.000000
9/21/2010	3:05:42 PM	BCl3 MFC set to  0.000000
9/21/2010	3:05:42 PM	PHl3 MFC set to  0.000000
9/21/2010	3:05:42 PM	SiCl4 MFC set to  0.000000
9/21/2010	3:05:42 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	3:05:42 PM	Tube furnace set to 0
9/21/2010	3:05:43 PM	H2 valve closed
9/21/2010	3:05:43 PM	BCl3 valve closed
9/21/2010	3:05:43 PM	PH3 valve closed
9/21/2010	3:05:43 PM	SiCl4 pre valve closed
9/21/2010	3:05:43 PM	SiCl4 post valve closed
9/21/2010	3:05:43 PM	Bubbler valve closed
9/21/2010	3:05:43 PM	Helium valve opened
9/21/2010	3:05:43 PM	Main Vac valve opened
9/21/2010	3:05:43 PM	Bypass valve opened
9/21/2010	3:05:43 PM	Helium MFC set to  100.000000
9/21/2010	3:05:43 PM	H2 MFC set to  0.000000
9/21/2010	3:05:43 PM	BCl3 MFC set to  0.000000
9/21/2010	3:05:43 PM	PHl3 MFC set to  0.000000
9/21/2010	3:05:43 PM	SiCl4 MFC set to  0.000000
9/21/2010	3:05:43 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	3:05:43 PM	Tube furnace set to 0
9/21/2010	3:05:43 PM	Helium valve closed
9/21/2010	3:05:43 PM	H2 valve closed
9/21/2010	3:05:43 PM	BCl3 valve closed
9/21/2010	3:05:43 PM	PH3 valve closed
9/21/2010	3:05:43 PM	SiCl4 pre valve closed
9/21/2010	3:05:43 PM	SiCl4 post valve closed
9/21/2010	3:05:43 PM	Bubbler valve closed
9/21/2010	3:05:43 PM	Main Vac valve opened
9/21/2010	3:05:43 PM	Bypass valve opened
9/21/2010	3:05:43 PM	Helium MFC set to  0.000000
9/21/2010	3:05:43 PM	H2 MFC set to  0.000000
9/21/2010	3:05:43 PM	BCl3 MFC set to  0.000000
9/21/2010	3:05:43 PM	PHl3 MFC set to  0.000000
9/21/2010	3:05:43 PM	SiCl4 MFC set to  0.000000
9/21/2010	3:05:43 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	3:05:44 PM	Tube furnace set to 0
9/21/2010	3:05:44 PM	H2 valve closed
9/21/2010	3:05:44 PM	BCl3 valve closed
9/21/2010	3:05:44 PM	PH3 valve closed
9/21/2010	3:05:44 PM	SiCl4 pre valve closed
9/21/2010	3:05:44 PM	SiCl4 post valve closed
9/21/2010	3:05:44 PM	Bubbler valve closed
9/21/2010	3:05:44 PM	Helium valve opened
9/21/2010	3:05:44 PM	Main Vac valve opened
9/21/2010	3:05:44 PM	Bypass valve opened
9/21/2010	3:05:44 PM	Helium MFC set to  100.000000
9/21/2010	3:05:44 PM	H2 MFC set to  0.000000
9/21/2010	3:05:44 PM	BCl3 MFC set to  0.000000
9/21/2010	3:05:44 PM	PHl3 MFC set to  0.000000
9/21/2010	3:05:44 PM	SiCl4 MFC set to  0.000000
9/21/2010	3:05:44 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	3:05:45 PM	Tube furnace set to 0
9/21/2010	3:05:45 PM	Helium valve closed
9/21/2010	3:05:45 PM	H2 valve closed
9/21/2010	3:05:45 PM	BCl3 valve closed
9/21/2010	3:05:45 PM	PH3 valve closed
9/21/2010	3:05:45 PM	SiCl4 pre valve closed
9/21/2010	3:05:45 PM	SiCl4 post valve closed
9/21/2010	3:05:45 PM	Bubbler valve closed
9/21/2010	3:05:45 PM	Main Vac valve opened
9/21/2010	3:05:45 PM	Bypass valve opened
9/21/2010	3:05:45 PM	Helium MFC set to  0.000000
9/21/2010	3:05:45 PM	H2 MFC set to  0.000000
9/21/2010	3:05:45 PM	BCl3 MFC set to  0.000000
9/21/2010	3:05:45 PM	PHl3 MFC set to  0.000000
9/21/2010	3:05:45 PM	SiCl4 MFC set to  0.000000
9/21/2010	3:05:45 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	3:05:45 PM	Tube furnace set to 0
9/21/2010	3:05:47 PM	H2 valve closed
9/21/2010	3:05:47 PM	BCl3 valve closed
9/21/2010	3:05:47 PM	PH3 valve closed
9/21/2010	3:05:47 PM	SiCl4 pre valve closed
9/21/2010	3:05:47 PM	SiCl4 post valve closed
9/21/2010	3:05:47 PM	Bubbler valve closed
9/21/2010	3:05:47 PM	Helium valve opened
9/21/2010	3:05:47 PM	Main Vac valve opened
9/21/2010	3:05:47 PM	Bypass valve opened
9/21/2010	3:05:47 PM	Helium MFC set to  100.000000
9/21/2010	3:05:47 PM	H2 MFC set to  0.000000
9/21/2010	3:05:47 PM	BCl3 MFC set to  0.000000
9/21/2010	3:05:47 PM	PHl3 MFC set to  0.000000
9/21/2010	3:05:47 PM	SiCl4 MFC set to  0.000000
9/21/2010	3:05:47 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	3:05:47 PM	Tube furnace set to 0
9/21/2010	3:05:48 PM	Helium valve closed
9/21/2010	3:05:48 PM	H2 valve closed
9/21/2010	3:05:48 PM	BCl3 valve closed
9/21/2010	3:05:48 PM	PH3 valve closed
9/21/2010	3:05:48 PM	SiCl4 pre valve closed
9/21/2010	3:05:48 PM	SiCl4 post valve closed
9/21/2010	3:05:48 PM	Bubbler valve closed
9/21/2010	3:05:48 PM	Main Vac valve opened
9/21/2010	3:05:48 PM	Bypass valve opened
9/21/2010	3:05:48 PM	Helium MFC set to  0.000000
9/21/2010	3:05:48 PM	H2 MFC set to  0.000000
9/21/2010	3:05:48 PM	BCl3 MFC set to  0.000000
9/21/2010	3:05:48 PM	PHl3 MFC set to  0.000000
9/21/2010	3:05:48 PM	SiCl4 MFC set to  0.000000
9/21/2010	3:05:48 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	3:05:48 PM	Tube furnace set to 0
9/21/2010	3:05:53 PM	H2 valve closed
9/21/2010	3:05:53 PM	BCl3 valve closed
9/21/2010	3:05:53 PM	PH3 valve closed
9/21/2010	3:05:53 PM	SiCl4 pre valve closed
9/21/2010	3:05:53 PM	SiCl4 post valve closed
9/21/2010	3:05:53 PM	Bubbler valve closed
9/21/2010	3:05:53 PM	Helium valve opened
9/21/2010	3:05:53 PM	Main Vac valve opened
9/21/2010	3:05:53 PM	Bypass valve opened
9/21/2010	3:05:53 PM	Helium MFC set to  100.000000
9/21/2010	3:05:53 PM	H2 MFC set to  0.000000
9/21/2010	3:05:53 PM	BCl3 MFC set to  0.000000
9/21/2010	3:05:53 PM	PHl3 MFC set to  0.000000
9/21/2010	3:05:53 PM	SiCl4 MFC set to  0.000000
9/21/2010	3:05:53 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	3:05:53 PM	Tube furnace set to 0
9/21/2010	3:06:53 PM	Helium valve closed
9/21/2010	3:06:53 PM	H2 valve closed
9/21/2010	3:06:53 PM	BCl3 valve closed
9/21/2010	3:06:53 PM	PH3 valve closed
9/21/2010	3:06:53 PM	SiCl4 pre valve closed
9/21/2010	3:06:53 PM	SiCl4 post valve closed
9/21/2010	3:06:53 PM	Bubbler valve closed
9/21/2010	3:06:53 PM	Main Vac valve opened
9/21/2010	3:06:53 PM	Bypass valve opened
9/21/2010	3:06:53 PM	Helium MFC set to  0.000000
9/21/2010	3:06:53 PM	H2 MFC set to  0.000000
9/21/2010	3:06:53 PM	BCl3 MFC set to  0.000000
9/21/2010	3:06:53 PM	PHl3 MFC set to  0.000000
9/21/2010	3:06:53 PM	SiCl4 MFC set to  0.000000
9/21/2010	3:06:53 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	3:06:53 PM	Tube furnace set to 0
9/21/2010	3:06:54 PM	Run finished at 3:06 PM
9/21/2010	3:06:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/21/2010	3:09:44 PM	Recipe started at 3:09 PM
9/21/2010	3:09:44 PM	Helium valve closed
9/21/2010	3:09:44 PM	BCl3 valve closed
9/21/2010	3:09:44 PM	PH3 valve closed
9/21/2010	3:09:44 PM	SiCl4 pre valve closed
9/21/2010	3:09:44 PM	SiCl4 post valve closed
9/21/2010	3:09:44 PM	Main Vac valve closed
9/21/2010	3:09:44 PM	Bypass valve closed
9/21/2010	3:09:44 PM	Bubbler valve closed
9/21/2010	3:09:44 PM	H2 valve opened
9/21/2010	3:09:44 PM	Helium MFC set to  0.000000
9/21/2010	3:09:44 PM	H2 MFC set to  500.000000
9/21/2010	3:09:44 PM	BCl3 MFC set to  0.000000
9/21/2010	3:09:44 PM	PHl3 MFC set to  0.000000
9/21/2010	3:09:44 PM	SiCl4 MFC set to  0.000000
9/21/2010	3:09:44 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	3:09:44 PM	Tube furnace set to 0
9/21/2010	3:10:59 PM	Helium valve closed
9/21/2010	3:10:59 PM	BCl3 valve closed
9/21/2010	3:11:00 PM	PH3 valve closed
9/21/2010	3:11:00 PM	SiCl4 pre valve closed
9/21/2010	3:11:00 PM	SiCl4 post valve closed
9/21/2010	3:11:00 PM	Main Vac valve closed
9/21/2010	3:11:00 PM	Bypass valve closed
9/21/2010	3:11:00 PM	H2 valve opened
9/21/2010	3:11:00 PM	Bubbler valve opened
9/21/2010	3:11:00 PM	Helium MFC set to  0.000000
9/21/2010	3:11:00 PM	H2 MFC set to  500.000000
9/21/2010	3:11:00 PM	BCl3 MFC set to  0.000000
9/21/2010	3:11:00 PM	PHl3 MFC set to  0.000000
9/21/2010	3:11:00 PM	SiCl4 MFC set to  0.000000
9/21/2010	3:11:00 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	3:11:00 PM	Tube furnace set to 1000
9/21/2010	3:31:00 PM	Helium valve closed
9/21/2010	3:31:00 PM	PH3 valve closed
9/21/2010	3:31:00 PM	Main Vac valve closed
9/21/2010	3:31:00 PM	Bypass valve closed
9/21/2010	3:31:00 PM	H2 valve opened
9/21/2010	3:31:00 PM	BCl3 valve opened
9/21/2010	3:31:00 PM	SiCl4 pre valve opened
9/21/2010	3:31:00 PM	SiCl4 post valve opened
9/21/2010	3:31:00 PM	Bubbler valve opened
9/21/2010	3:31:00 PM	Helium MFC set to  0.000000
9/21/2010	3:31:00 PM	H2 MFC set to  500.000000
9/21/2010	3:31:00 PM	BCl3 MFC set to  35.000000
9/21/2010	3:31:00 PM	PHl3 MFC set to  0.000000
9/21/2010	3:31:00 PM	SiCl4 MFC set to  50.000000
9/21/2010	3:31:00 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	3:31:00 PM	Tube furnace set to 1000
9/21/2010	3:43:00 PM	H2 valve closed
9/21/2010	3:43:00 PM	BCl3 valve closed
9/21/2010	3:43:00 PM	PH3 valve closed
9/21/2010	3:43:00 PM	SiCl4 pre valve closed
9/21/2010	3:43:00 PM	SiCl4 post valve closed
9/21/2010	3:43:00 PM	Main Vac valve closed
9/21/2010	3:43:00 PM	Bypass valve closed
9/21/2010	3:43:00 PM	Helium valve opened
9/21/2010	3:43:00 PM	Bubbler valve opened
9/21/2010	3:43:00 PM	Helium MFC set to  500.000000
9/21/2010	3:43:00 PM	H2 MFC set to  0.000000
9/21/2010	3:43:00 PM	BCl3 MFC set to  0.000000
9/21/2010	3:43:00 PM	PHl3 MFC set to  0.000000
9/21/2010	3:43:00 PM	SiCl4 MFC set to  0.000000
9/21/2010	3:43:00 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	3:43:00 PM	Tube furnace set to 0
9/21/2010	4:03:00 PM	Helium valve closed
9/21/2010	4:03:00 PM	H2 valve closed
9/21/2010	4:03:00 PM	BCl3 valve closed
9/21/2010	4:03:00 PM	PH3 valve closed
9/21/2010	4:03:00 PM	SiCl4 pre valve closed
9/21/2010	4:03:00 PM	SiCl4 post valve closed
9/21/2010	4:03:00 PM	Main Vac valve closed
9/21/2010	4:03:00 PM	Bypass valve closed
9/21/2010	4:03:00 PM	Bubbler valve closed
9/21/2010	4:03:00 PM	Helium MFC set to  0.000000
9/21/2010	4:03:00 PM	H2 MFC set to  0.000000
9/21/2010	4:03:00 PM	BCl3 MFC set to  0.000000
9/21/2010	4:03:00 PM	PHl3 MFC set to  0.000000
9/21/2010	4:03:00 PM	SiCl4 MFC set to  0.000000
9/21/2010	4:03:00 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	4:03:00 PM	Tube furnace set to 0
9/21/2010	4:03:00 PM	Run finished at 4:03 PM
9/21/2010	4:17:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/21/2010	4:17:03 PM	Recipe started at 4:17 PM
9/21/2010	4:17:03 PM	Helium valve closed
9/21/2010	4:17:03 PM	H2 valve closed
9/21/2010	4:17:03 PM	BCl3 valve closed
9/21/2010	4:17:03 PM	PH3 valve closed
9/21/2010	4:17:03 PM	SiCl4 pre valve closed
9/21/2010	4:17:03 PM	SiCl4 post valve closed
9/21/2010	4:17:03 PM	Main Vac valve closed
9/21/2010	4:17:03 PM	Bubbler valve closed
9/21/2010	4:17:03 PM	Bypass valve opened
9/21/2010	4:17:03 PM	Helium MFC set to  0.000000
9/21/2010	4:17:03 PM	H2 MFC set to  0.000000
9/21/2010	4:17:03 PM	BCl3 MFC set to  0.000000
9/21/2010	4:17:03 PM	PHl3 MFC set to  0.000000
9/21/2010	4:17:03 PM	SiCl4 MFC set to  0.000000
9/21/2010	4:17:03 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	4:17:03 PM	Tube furnace set to 0
9/21/2010	4:17:43 PM	Helium valve closed
9/21/2010	4:17:43 PM	H2 valve closed
9/21/2010	4:17:43 PM	BCl3 valve closed
9/21/2010	4:17:43 PM	PH3 valve closed
9/21/2010	4:17:43 PM	SiCl4 pre valve closed
9/21/2010	4:17:43 PM	SiCl4 post valve closed
9/21/2010	4:17:43 PM	Bubbler valve closed
9/21/2010	4:17:43 PM	Main Vac valve opened
9/21/2010	4:17:43 PM	Bypass valve opened
9/21/2010	4:17:43 PM	Helium MFC set to  0.000000
9/21/2010	4:17:43 PM	H2 MFC set to  0.000000
9/21/2010	4:17:43 PM	BCl3 MFC set to  0.000000
9/21/2010	4:17:43 PM	PHl3 MFC set to  0.000000
9/21/2010	4:17:43 PM	SiCl4 MFC set to  0.000000
9/21/2010	4:17:43 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	4:17:43 PM	Tube furnace set to 0
9/21/2010	4:17:43 PM	Run finished at 4:17 PM
9/21/2010	4:17:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/21/2010	4:18:04 PM	Bypass valve closed
9/21/2010	4:18:04 PM	Main Vac valve closed
9/21/2010	4:18:14 PM	Bypass valve opened
9/21/2010	4:18:15 PM	Main Vac valve opened
9/21/2010	4:18:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/21/2010	4:19:06 PM	Recipe started at 4:19 PM
9/21/2010	4:19:06 PM	Helium valve closed
9/21/2010	4:19:06 PM	H2 valve closed
9/21/2010	4:19:06 PM	BCl3 valve closed
9/21/2010	4:19:06 PM	PH3 valve closed
9/21/2010	4:19:06 PM	SiCl4 pre valve closed
9/21/2010	4:19:06 PM	SiCl4 post valve closed
9/21/2010	4:19:06 PM	Main Vac valve closed
9/21/2010	4:19:06 PM	Bubbler valve closed
9/21/2010	4:19:06 PM	Bypass valve opened
9/21/2010	4:19:06 PM	Helium MFC set to  0.000000
9/21/2010	4:19:06 PM	H2 MFC set to  0.000000
9/21/2010	4:19:06 PM	BCl3 MFC set to  0.000000
9/21/2010	4:19:06 PM	PHl3 MFC set to  0.000000
9/21/2010	4:19:06 PM	SiCl4 MFC set to  0.000000
9/21/2010	4:19:06 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	4:19:06 PM	Tube furnace set to 0
9/21/2010	4:19:06 PM	Helium valve closed
9/21/2010	4:19:06 PM	H2 valve closed
9/21/2010	4:19:06 PM	BCl3 valve closed
9/21/2010	4:19:06 PM	PH3 valve closed
9/21/2010	4:19:06 PM	SiCl4 pre valve closed
9/21/2010	4:19:06 PM	SiCl4 post valve closed
9/21/2010	4:19:06 PM	Bubbler valve closed
9/21/2010	4:19:06 PM	Main Vac valve opened
9/21/2010	4:19:06 PM	Bypass valve opened
9/21/2010	4:19:06 PM	Helium MFC set to  0.000000
9/21/2010	4:19:06 PM	H2 MFC set to  0.000000
9/21/2010	4:19:06 PM	BCl3 MFC set to  0.000000
9/21/2010	4:19:06 PM	PHl3 MFC set to  0.000000
9/21/2010	4:19:07 PM	SiCl4 MFC set to  0.000000
9/21/2010	4:19:07 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	4:19:07 PM	Tube furnace set to 0
9/21/2010	4:20:07 PM	H2 valve closed
9/21/2010	4:20:07 PM	BCl3 valve closed
9/21/2010	4:20:07 PM	PH3 valve closed
9/21/2010	4:20:07 PM	SiCl4 pre valve closed
9/21/2010	4:20:07 PM	SiCl4 post valve closed
9/21/2010	4:20:07 PM	Bubbler valve closed
9/21/2010	4:20:07 PM	Helium valve opened
9/21/2010	4:20:07 PM	Main Vac valve opened
9/21/2010	4:20:07 PM	Bypass valve opened
9/21/2010	4:20:07 PM	Helium MFC set to  100.000000
9/21/2010	4:20:07 PM	H2 MFC set to  0.000000
9/21/2010	4:20:07 PM	BCl3 MFC set to  0.000000
9/21/2010	4:20:07 PM	PHl3 MFC set to  0.000000
9/21/2010	4:20:07 PM	SiCl4 MFC set to  0.000000
9/21/2010	4:20:07 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	4:20:07 PM	Tube furnace set to 0
9/21/2010	4:21:07 PM	Helium valve closed
9/21/2010	4:21:07 PM	H2 valve closed
9/21/2010	4:21:07 PM	BCl3 valve closed
9/21/2010	4:21:07 PM	PH3 valve closed
9/21/2010	4:21:07 PM	SiCl4 pre valve closed
9/21/2010	4:21:07 PM	SiCl4 post valve closed
9/21/2010	4:21:07 PM	Bubbler valve closed
9/21/2010	4:21:07 PM	Main Vac valve opened
9/21/2010	4:21:07 PM	Bypass valve opened
9/21/2010	4:21:07 PM	Helium MFC set to  0.000000
9/21/2010	4:21:07 PM	H2 MFC set to  0.000000
9/21/2010	4:21:07 PM	BCl3 MFC set to  0.000000
9/21/2010	4:21:07 PM	PHl3 MFC set to  0.000000
9/21/2010	4:21:07 PM	SiCl4 MFC set to  0.000000
9/21/2010	4:21:07 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	4:21:07 PM	Tube furnace set to 0
9/21/2010	4:22:07 PM	H2 valve closed
9/21/2010	4:22:07 PM	BCl3 valve closed
9/21/2010	4:22:07 PM	PH3 valve closed
9/21/2010	4:22:07 PM	SiCl4 pre valve closed
9/21/2010	4:22:07 PM	SiCl4 post valve closed
9/21/2010	4:22:07 PM	Bubbler valve closed
9/21/2010	4:22:07 PM	Helium valve opened
9/21/2010	4:22:07 PM	Main Vac valve opened
9/21/2010	4:22:07 PM	Bypass valve opened
9/21/2010	4:22:07 PM	Helium MFC set to  100.000000
9/21/2010	4:22:07 PM	H2 MFC set to  0.000000
9/21/2010	4:22:07 PM	BCl3 MFC set to  0.000000
9/21/2010	4:22:07 PM	PHl3 MFC set to  0.000000
9/21/2010	4:22:07 PM	SiCl4 MFC set to  0.000000
9/21/2010	4:22:07 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	4:22:07 PM	Tube furnace set to 0
9/21/2010	4:23:07 PM	Helium valve closed
9/21/2010	4:23:07 PM	H2 valve closed
9/21/2010	4:23:07 PM	BCl3 valve closed
9/21/2010	4:23:07 PM	PH3 valve closed
9/21/2010	4:23:07 PM	SiCl4 pre valve closed
9/21/2010	4:23:07 PM	SiCl4 post valve closed
9/21/2010	4:23:07 PM	Bubbler valve closed
9/21/2010	4:23:07 PM	Main Vac valve opened
9/21/2010	4:23:07 PM	Bypass valve opened
9/21/2010	4:23:07 PM	Helium MFC set to  0.000000
9/21/2010	4:23:07 PM	H2 MFC set to  0.000000
9/21/2010	4:23:07 PM	BCl3 MFC set to  0.000000
9/21/2010	4:23:07 PM	PHl3 MFC set to  0.000000
9/21/2010	4:23:07 PM	SiCl4 MFC set to  0.000000
9/21/2010	4:23:07 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	4:23:07 PM	Tube furnace set to 0
9/21/2010	4:24:07 PM	H2 valve closed
9/21/2010	4:24:07 PM	BCl3 valve closed
9/21/2010	4:24:07 PM	PH3 valve closed
9/21/2010	4:24:07 PM	SiCl4 pre valve closed
9/21/2010	4:24:07 PM	SiCl4 post valve closed
9/21/2010	4:24:07 PM	Bubbler valve closed
9/21/2010	4:24:07 PM	Helium valve opened
9/21/2010	4:24:07 PM	Main Vac valve opened
9/21/2010	4:24:07 PM	Bypass valve opened
9/21/2010	4:24:07 PM	Helium MFC set to  100.000000
9/21/2010	4:24:07 PM	H2 MFC set to  0.000000
9/21/2010	4:24:07 PM	BCl3 MFC set to  0.000000
9/21/2010	4:24:07 PM	PHl3 MFC set to  0.000000
9/21/2010	4:24:07 PM	SiCl4 MFC set to  0.000000
9/21/2010	4:24:07 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	4:24:08 PM	Tube furnace set to 0
9/21/2010	4:25:08 PM	Helium valve closed
9/21/2010	4:25:08 PM	H2 valve closed
9/21/2010	4:25:08 PM	BCl3 valve closed
9/21/2010	4:25:08 PM	PH3 valve closed
9/21/2010	4:25:08 PM	SiCl4 pre valve closed
9/21/2010	4:25:08 PM	SiCl4 post valve closed
9/21/2010	4:25:08 PM	Bubbler valve closed
9/21/2010	4:25:08 PM	Main Vac valve opened
9/21/2010	4:25:08 PM	Bypass valve opened
9/21/2010	4:25:08 PM	Helium MFC set to  0.000000
9/21/2010	4:25:08 PM	H2 MFC set to  0.000000
9/21/2010	4:25:08 PM	BCl3 MFC set to  0.000000
9/21/2010	4:25:08 PM	PHl3 MFC set to  0.000000
9/21/2010	4:25:08 PM	SiCl4 MFC set to  0.000000
9/21/2010	4:25:08 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	4:25:08 PM	Tube furnace set to 0
9/21/2010	4:26:08 PM	H2 valve closed
9/21/2010	4:26:08 PM	BCl3 valve closed
9/21/2010	4:26:08 PM	PH3 valve closed
9/21/2010	4:26:08 PM	SiCl4 pre valve closed
9/21/2010	4:26:08 PM	SiCl4 post valve closed
9/21/2010	4:26:08 PM	Bubbler valve closed
9/21/2010	4:26:08 PM	Helium valve opened
9/21/2010	4:26:08 PM	Main Vac valve opened
9/21/2010	4:26:08 PM	Bypass valve opened
9/21/2010	4:26:08 PM	Helium MFC set to  100.000000
9/21/2010	4:26:08 PM	H2 MFC set to  0.000000
9/21/2010	4:26:08 PM	BCl3 MFC set to  0.000000
9/21/2010	4:26:08 PM	PHl3 MFC set to  0.000000
9/21/2010	4:26:08 PM	SiCl4 MFC set to  0.000000
9/21/2010	4:26:08 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	4:26:08 PM	Tube furnace set to 0
9/21/2010	4:27:08 PM	Helium valve closed
9/21/2010	4:27:08 PM	H2 valve closed
9/21/2010	4:27:08 PM	BCl3 valve closed
9/21/2010	4:27:08 PM	PH3 valve closed
9/21/2010	4:27:08 PM	SiCl4 pre valve closed
9/21/2010	4:27:08 PM	SiCl4 post valve closed
9/21/2010	4:27:08 PM	Bubbler valve closed
9/21/2010	4:27:08 PM	Main Vac valve opened
9/21/2010	4:27:08 PM	Bypass valve opened
9/21/2010	4:27:08 PM	Helium MFC set to  0.000000
9/21/2010	4:27:08 PM	H2 MFC set to  0.000000
9/21/2010	4:27:08 PM	BCl3 MFC set to  0.000000
9/21/2010	4:27:08 PM	PHl3 MFC set to  0.000000
9/21/2010	4:27:08 PM	SiCl4 MFC set to  0.000000
9/21/2010	4:27:08 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	4:27:08 PM	Tube furnace set to 0
9/21/2010	4:28:08 PM	H2 valve closed
9/21/2010	4:28:08 PM	BCl3 valve closed
9/21/2010	4:28:08 PM	PH3 valve closed
9/21/2010	4:28:08 PM	SiCl4 pre valve closed
9/21/2010	4:28:08 PM	SiCl4 post valve closed
9/21/2010	4:28:08 PM	Bubbler valve closed
9/21/2010	4:28:08 PM	Helium valve opened
9/21/2010	4:28:08 PM	Main Vac valve opened
9/21/2010	4:28:08 PM	Bypass valve opened
9/21/2010	4:28:08 PM	Helium MFC set to  100.000000
9/21/2010	4:28:08 PM	H2 MFC set to  0.000000
9/21/2010	4:28:08 PM	BCl3 MFC set to  0.000000
9/21/2010	4:28:08 PM	PHl3 MFC set to  0.000000
9/21/2010	4:28:08 PM	SiCl4 MFC set to  0.000000
9/21/2010	4:28:08 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	4:28:08 PM	Tube furnace set to 0
9/21/2010	4:29:08 PM	Helium valve closed
9/21/2010	4:29:08 PM	H2 valve closed
9/21/2010	4:29:08 PM	BCl3 valve closed
9/21/2010	4:29:08 PM	PH3 valve closed
9/21/2010	4:29:08 PM	SiCl4 pre valve closed
9/21/2010	4:29:08 PM	SiCl4 post valve closed
9/21/2010	4:29:08 PM	Bubbler valve closed
9/21/2010	4:29:08 PM	Main Vac valve opened
9/21/2010	4:29:08 PM	Bypass valve opened
9/21/2010	4:29:08 PM	Helium MFC set to  0.000000
9/21/2010	4:29:08 PM	H2 MFC set to  0.000000
9/21/2010	4:29:08 PM	BCl3 MFC set to  0.000000
9/21/2010	4:29:08 PM	PHl3 MFC set to  0.000000
9/21/2010	4:29:08 PM	SiCl4 MFC set to  0.000000
9/21/2010	4:29:08 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	4:29:09 PM	Tube furnace set to 0
9/21/2010	4:30:09 PM	H2 valve closed
9/21/2010	4:30:09 PM	BCl3 valve closed
9/21/2010	4:30:09 PM	PH3 valve closed
9/21/2010	4:30:09 PM	SiCl4 pre valve closed
9/21/2010	4:30:09 PM	SiCl4 post valve closed
9/21/2010	4:30:09 PM	Bubbler valve closed
9/21/2010	4:30:09 PM	Helium valve opened
9/21/2010	4:30:09 PM	Main Vac valve opened
9/21/2010	4:30:09 PM	Bypass valve opened
9/21/2010	4:30:09 PM	Helium MFC set to  100.000000
9/21/2010	4:30:09 PM	H2 MFC set to  0.000000
9/21/2010	4:30:09 PM	BCl3 MFC set to  0.000000
9/21/2010	4:30:09 PM	PHl3 MFC set to  0.000000
9/21/2010	4:30:09 PM	SiCl4 MFC set to  0.000000
9/21/2010	4:30:09 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	4:30:09 PM	Tube furnace set to 0
9/21/2010	4:31:09 PM	Helium valve closed
9/21/2010	4:31:09 PM	H2 valve closed
9/21/2010	4:31:09 PM	BCl3 valve closed
9/21/2010	4:31:09 PM	PH3 valve closed
9/21/2010	4:31:09 PM	SiCl4 pre valve closed
9/21/2010	4:31:09 PM	SiCl4 post valve closed
9/21/2010	4:31:09 PM	Bubbler valve closed
9/21/2010	4:31:09 PM	Main Vac valve opened
9/21/2010	4:31:09 PM	Bypass valve opened
9/21/2010	4:31:09 PM	Helium MFC set to  0.000000
9/21/2010	4:31:09 PM	H2 MFC set to  0.000000
9/21/2010	4:31:09 PM	BCl3 MFC set to  0.000000
9/21/2010	4:31:09 PM	PHl3 MFC set to  0.000000
9/21/2010	4:31:09 PM	SiCl4 MFC set to  0.000000
9/21/2010	4:31:09 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	4:31:09 PM	Tube furnace set to 0
9/21/2010	4:32:09 PM	H2 valve closed
9/21/2010	4:32:09 PM	BCl3 valve closed
9/21/2010	4:32:09 PM	PH3 valve closed
9/21/2010	4:32:09 PM	SiCl4 pre valve closed
9/21/2010	4:32:09 PM	SiCl4 post valve closed
9/21/2010	4:32:09 PM	Bubbler valve closed
9/21/2010	4:32:09 PM	Helium valve opened
9/21/2010	4:32:09 PM	Main Vac valve opened
9/21/2010	4:32:09 PM	Bypass valve opened
9/21/2010	4:32:09 PM	Helium MFC set to  100.000000
9/21/2010	4:32:09 PM	H2 MFC set to  0.000000
9/21/2010	4:32:09 PM	BCl3 MFC set to  0.000000
9/21/2010	4:32:09 PM	PHl3 MFC set to  0.000000
9/21/2010	4:32:09 PM	SiCl4 MFC set to  0.000000
9/21/2010	4:32:09 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	4:32:09 PM	Tube furnace set to 0
9/21/2010	4:33:09 PM	Helium valve closed
9/21/2010	4:33:09 PM	H2 valve closed
9/21/2010	4:33:09 PM	BCl3 valve closed
9/21/2010	4:33:09 PM	PH3 valve closed
9/21/2010	4:33:09 PM	SiCl4 pre valve closed
9/21/2010	4:33:09 PM	SiCl4 post valve closed
9/21/2010	4:33:09 PM	Bubbler valve closed
9/21/2010	4:33:09 PM	Main Vac valve opened
9/21/2010	4:33:09 PM	Bypass valve opened
9/21/2010	4:33:09 PM	Helium MFC set to  0.000000
9/21/2010	4:33:09 PM	H2 MFC set to  0.000000
9/21/2010	4:33:09 PM	BCl3 MFC set to  0.000000
9/21/2010	4:33:09 PM	PHl3 MFC set to  0.000000
9/21/2010	4:33:09 PM	SiCl4 MFC set to  0.000000
9/21/2010	4:33:09 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	4:33:09 PM	Tube furnace set to 0
9/21/2010	4:34:09 PM	H2 valve closed
9/21/2010	4:34:09 PM	BCl3 valve closed
9/21/2010	4:34:09 PM	PH3 valve closed
9/21/2010	4:34:09 PM	SiCl4 pre valve closed
9/21/2010	4:34:09 PM	SiCl4 post valve closed
9/21/2010	4:34:09 PM	Bubbler valve closed
9/21/2010	4:34:09 PM	Helium valve opened
9/21/2010	4:34:09 PM	Main Vac valve opened
9/21/2010	4:34:09 PM	Bypass valve opened
9/21/2010	4:34:09 PM	Helium MFC set to  100.000000
9/21/2010	4:34:09 PM	H2 MFC set to  0.000000
9/21/2010	4:34:09 PM	BCl3 MFC set to  0.000000
9/21/2010	4:34:09 PM	PHl3 MFC set to  0.000000
9/21/2010	4:34:09 PM	SiCl4 MFC set to  0.000000
9/21/2010	4:34:09 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	4:34:10 PM	Tube furnace set to 0
9/21/2010	4:35:10 PM	Helium valve closed
9/21/2010	4:35:10 PM	H2 valve closed
9/21/2010	4:35:10 PM	BCl3 valve closed
9/21/2010	4:35:10 PM	PH3 valve closed
9/21/2010	4:35:10 PM	SiCl4 pre valve closed
9/21/2010	4:35:10 PM	SiCl4 post valve closed
9/21/2010	4:35:10 PM	Bubbler valve closed
9/21/2010	4:35:10 PM	Main Vac valve opened
9/21/2010	4:35:10 PM	Bypass valve opened
9/21/2010	4:35:10 PM	Helium MFC set to  0.000000
9/21/2010	4:35:10 PM	H2 MFC set to  0.000000
9/21/2010	4:35:10 PM	BCl3 MFC set to  0.000000
9/21/2010	4:35:10 PM	PHl3 MFC set to  0.000000
9/21/2010	4:35:10 PM	SiCl4 MFC set to  0.000000
9/21/2010	4:35:10 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	4:35:10 PM	Tube furnace set to 0
9/21/2010	4:36:10 PM	H2 valve closed
9/21/2010	4:36:10 PM	BCl3 valve closed
9/21/2010	4:36:10 PM	PH3 valve closed
9/21/2010	4:36:10 PM	SiCl4 pre valve closed
9/21/2010	4:36:10 PM	SiCl4 post valve closed
9/21/2010	4:36:10 PM	Bubbler valve closed
9/21/2010	4:36:10 PM	Helium valve opened
9/21/2010	4:36:10 PM	Main Vac valve opened
9/21/2010	4:36:10 PM	Bypass valve opened
9/21/2010	4:36:10 PM	Helium MFC set to  100.000000
9/21/2010	4:36:10 PM	H2 MFC set to  0.000000
9/21/2010	4:36:10 PM	BCl3 MFC set to  0.000000
9/21/2010	4:36:10 PM	PHl3 MFC set to  0.000000
9/21/2010	4:36:10 PM	SiCl4 MFC set to  0.000000
9/21/2010	4:36:10 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	4:36:10 PM	Tube furnace set to 0
9/21/2010	4:37:10 PM	Helium valve closed
9/21/2010	4:37:10 PM	H2 valve closed
9/21/2010	4:37:10 PM	BCl3 valve closed
9/21/2010	4:37:10 PM	PH3 valve closed
9/21/2010	4:37:10 PM	SiCl4 pre valve closed
9/21/2010	4:37:10 PM	SiCl4 post valve closed
9/21/2010	4:37:10 PM	Bubbler valve closed
9/21/2010	4:37:10 PM	Main Vac valve opened
9/21/2010	4:37:10 PM	Bypass valve opened
9/21/2010	4:37:10 PM	Helium MFC set to  0.000000
9/21/2010	4:37:10 PM	H2 MFC set to  0.000000
9/21/2010	4:37:10 PM	BCl3 MFC set to  0.000000
9/21/2010	4:37:10 PM	PHl3 MFC set to  0.000000
9/21/2010	4:37:10 PM	SiCl4 MFC set to  0.000000
9/21/2010	4:37:10 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	4:37:10 PM	Tube furnace set to 0
9/21/2010	4:38:10 PM	H2 valve closed
9/21/2010	4:38:10 PM	BCl3 valve closed
9/21/2010	4:38:10 PM	PH3 valve closed
9/21/2010	4:38:10 PM	SiCl4 pre valve closed
9/21/2010	4:38:10 PM	SiCl4 post valve closed
9/21/2010	4:38:10 PM	Bubbler valve closed
9/21/2010	4:38:10 PM	Helium valve opened
9/21/2010	4:38:10 PM	Main Vac valve opened
9/21/2010	4:38:10 PM	Bypass valve opened
9/21/2010	4:38:10 PM	Helium MFC set to  100.000000
9/21/2010	4:38:10 PM	H2 MFC set to  0.000000
9/21/2010	4:38:10 PM	BCl3 MFC set to  0.000000
9/21/2010	4:38:10 PM	PHl3 MFC set to  0.000000
9/21/2010	4:38:10 PM	SiCl4 MFC set to  0.000000
9/21/2010	4:38:10 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	4:38:10 PM	Tube furnace set to 0
9/21/2010	4:39:10 PM	Helium valve closed
9/21/2010	4:39:10 PM	H2 valve closed
9/21/2010	4:39:10 PM	BCl3 valve closed
9/21/2010	4:39:10 PM	PH3 valve closed
9/21/2010	4:39:10 PM	SiCl4 pre valve closed
9/21/2010	4:39:10 PM	SiCl4 post valve closed
9/21/2010	4:39:10 PM	Bubbler valve closed
9/21/2010	4:39:10 PM	Main Vac valve opened
9/21/2010	4:39:10 PM	Bypass valve opened
9/21/2010	4:39:10 PM	Helium MFC set to  0.000000
9/21/2010	4:39:10 PM	H2 MFC set to  0.000000
9/21/2010	4:39:10 PM	BCl3 MFC set to  0.000000
9/21/2010	4:39:10 PM	PHl3 MFC set to  0.000000
9/21/2010	4:39:10 PM	SiCl4 MFC set to  0.000000
9/21/2010	4:39:10 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	4:39:11 PM	Tube furnace set to 0
9/21/2010	4:39:12 PM	Run finished at 4:39 PM
9/21/2010	4:39:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/21/2010	4:39:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/21/2010	4:39:56 PM	Recipe started at 4:39 PM
9/21/2010	4:39:56 PM	Helium valve closed
9/21/2010	4:39:56 PM	H2 valve closed
9/21/2010	4:39:56 PM	BCl3 valve closed
9/21/2010	4:39:56 PM	PH3 valve closed
9/21/2010	4:39:56 PM	SiCl4 pre valve closed
9/21/2010	4:39:56 PM	SiCl4 post valve closed
9/21/2010	4:39:56 PM	Main Vac valve closed
9/21/2010	4:39:57 PM	Bubbler valve closed
9/21/2010	4:39:57 PM	Bypass valve opened
9/21/2010	4:39:57 PM	Helium MFC set to  0.000000
9/21/2010	4:39:57 PM	H2 MFC set to  0.000000
9/21/2010	4:39:57 PM	BCl3 MFC set to  0.000000
9/21/2010	4:39:57 PM	PHl3 MFC set to  0.000000
9/21/2010	4:39:57 PM	SiCl4 MFC set to  0.000000
9/21/2010	4:39:57 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	4:39:57 PM	Tube furnace set to 0
9/21/2010	4:39:57 PM	Helium valve closed
9/21/2010	4:39:57 PM	H2 valve closed
9/21/2010	4:39:57 PM	BCl3 valve closed
9/21/2010	4:39:57 PM	PH3 valve closed
9/21/2010	4:39:57 PM	SiCl4 pre valve closed
9/21/2010	4:39:57 PM	SiCl4 post valve closed
9/21/2010	4:39:57 PM	Bubbler valve closed
9/21/2010	4:39:57 PM	Main Vac valve opened
9/21/2010	4:39:57 PM	Bypass valve opened
9/21/2010	4:39:57 PM	Helium MFC set to  0.000000
9/21/2010	4:39:57 PM	H2 MFC set to  0.000000
9/21/2010	4:39:57 PM	BCl3 MFC set to  0.000000
9/21/2010	4:39:57 PM	PHl3 MFC set to  0.000000
9/21/2010	4:39:57 PM	SiCl4 MFC set to  0.000000
9/21/2010	4:39:57 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	4:39:57 PM	Tube furnace set to 0
9/21/2010	4:40:57 PM	H2 valve closed
9/21/2010	4:40:57 PM	BCl3 valve closed
9/21/2010	4:40:57 PM	PH3 valve closed
9/21/2010	4:40:57 PM	SiCl4 pre valve closed
9/21/2010	4:40:57 PM	SiCl4 post valve closed
9/21/2010	4:40:57 PM	Bubbler valve closed
9/21/2010	4:40:57 PM	Helium valve opened
9/21/2010	4:40:57 PM	Main Vac valve opened
9/21/2010	4:40:57 PM	Bypass valve opened
9/21/2010	4:40:57 PM	Helium MFC set to  100.000000
9/21/2010	4:40:57 PM	H2 MFC set to  0.000000
9/21/2010	4:40:57 PM	BCl3 MFC set to  0.000000
9/21/2010	4:40:57 PM	PHl3 MFC set to  0.000000
9/21/2010	4:40:57 PM	SiCl4 MFC set to  0.000000
9/21/2010	4:40:57 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	4:40:57 PM	Tube furnace set to 0
9/21/2010	4:41:57 PM	Helium valve closed
9/21/2010	4:41:57 PM	H2 valve closed
9/21/2010	4:41:57 PM	BCl3 valve closed
9/21/2010	4:41:57 PM	PH3 valve closed
9/21/2010	4:41:57 PM	SiCl4 pre valve closed
9/21/2010	4:41:57 PM	SiCl4 post valve closed
9/21/2010	4:41:57 PM	Bubbler valve closed
9/21/2010	4:41:57 PM	Main Vac valve opened
9/21/2010	4:41:57 PM	Bypass valve opened
9/21/2010	4:41:57 PM	Helium MFC set to  0.000000
9/21/2010	4:41:57 PM	H2 MFC set to  0.000000
9/21/2010	4:41:57 PM	BCl3 MFC set to  0.000000
9/21/2010	4:41:57 PM	PHl3 MFC set to  0.000000
9/21/2010	4:41:57 PM	SiCl4 MFC set to  0.000000
9/21/2010	4:41:57 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	4:41:58 PM	Tube furnace set to 0
9/21/2010	4:42:58 PM	H2 valve closed
9/21/2010	4:42:58 PM	BCl3 valve closed
9/21/2010	4:42:58 PM	PH3 valve closed
9/21/2010	4:42:58 PM	SiCl4 pre valve closed
9/21/2010	4:42:58 PM	SiCl4 post valve closed
9/21/2010	4:42:58 PM	Bubbler valve closed
9/21/2010	4:42:58 PM	Helium valve opened
9/21/2010	4:42:58 PM	Main Vac valve opened
9/21/2010	4:42:58 PM	Bypass valve opened
9/21/2010	4:42:58 PM	Helium MFC set to  100.000000
9/21/2010	4:42:58 PM	H2 MFC set to  0.000000
9/21/2010	4:42:58 PM	BCl3 MFC set to  0.000000
9/21/2010	4:42:58 PM	PHl3 MFC set to  0.000000
9/21/2010	4:42:58 PM	SiCl4 MFC set to  0.000000
9/21/2010	4:42:58 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	4:42:58 PM	Tube furnace set to 0
9/21/2010	4:43:58 PM	Helium valve closed
9/21/2010	4:43:58 PM	H2 valve closed
9/21/2010	4:43:58 PM	BCl3 valve closed
9/21/2010	4:43:58 PM	PH3 valve closed
9/21/2010	4:43:58 PM	SiCl4 pre valve closed
9/21/2010	4:43:58 PM	SiCl4 post valve closed
9/21/2010	4:43:58 PM	Bubbler valve closed
9/21/2010	4:43:58 PM	Main Vac valve opened
9/21/2010	4:43:58 PM	Bypass valve opened
9/21/2010	4:43:58 PM	Helium MFC set to  0.000000
9/21/2010	4:43:58 PM	H2 MFC set to  0.000000
9/21/2010	4:43:58 PM	BCl3 MFC set to  0.000000
9/21/2010	4:43:58 PM	PHl3 MFC set to  0.000000
9/21/2010	4:43:58 PM	SiCl4 MFC set to  0.000000
9/21/2010	4:43:58 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	4:43:58 PM	Tube furnace set to 0
9/21/2010	4:44:58 PM	H2 valve closed
9/21/2010	4:44:58 PM	BCl3 valve closed
9/21/2010	4:44:58 PM	PH3 valve closed
9/21/2010	4:44:58 PM	SiCl4 pre valve closed
9/21/2010	4:44:58 PM	SiCl4 post valve closed
9/21/2010	4:44:58 PM	Bubbler valve closed
9/21/2010	4:44:58 PM	Helium valve opened
9/21/2010	4:44:58 PM	Main Vac valve opened
9/21/2010	4:44:58 PM	Bypass valve opened
9/21/2010	4:44:58 PM	Helium MFC set to  100.000000
9/21/2010	4:44:58 PM	H2 MFC set to  0.000000
9/21/2010	4:44:58 PM	BCl3 MFC set to  0.000000
9/21/2010	4:44:58 PM	PHl3 MFC set to  0.000000
9/21/2010	4:44:58 PM	SiCl4 MFC set to  0.000000
9/21/2010	4:44:58 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	4:44:58 PM	Tube furnace set to 0
9/21/2010	4:45:58 PM	Helium valve closed
9/21/2010	4:45:58 PM	H2 valve closed
9/21/2010	4:45:58 PM	BCl3 valve closed
9/21/2010	4:45:58 PM	PH3 valve closed
9/21/2010	4:45:58 PM	SiCl4 pre valve closed
9/21/2010	4:45:58 PM	SiCl4 post valve closed
9/21/2010	4:45:58 PM	Bubbler valve closed
9/21/2010	4:45:58 PM	Main Vac valve opened
9/21/2010	4:45:58 PM	Bypass valve opened
9/21/2010	4:45:58 PM	Helium MFC set to  0.000000
9/21/2010	4:45:58 PM	H2 MFC set to  0.000000
9/21/2010	4:45:58 PM	BCl3 MFC set to  0.000000
9/21/2010	4:45:58 PM	PHl3 MFC set to  0.000000
9/21/2010	4:45:58 PM	SiCl4 MFC set to  0.000000
9/21/2010	4:45:58 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	4:45:58 PM	Tube furnace set to 0
9/21/2010	4:46:05 PM	H2 valve closed
9/21/2010	4:46:05 PM	BCl3 valve closed
9/21/2010	4:46:05 PM	PH3 valve closed
9/21/2010	4:46:05 PM	SiCl4 pre valve closed
9/21/2010	4:46:05 PM	SiCl4 post valve closed
9/21/2010	4:46:05 PM	Bubbler valve closed
9/21/2010	4:46:05 PM	Helium valve opened
9/21/2010	4:46:05 PM	Main Vac valve opened
9/21/2010	4:46:05 PM	Bypass valve opened
9/21/2010	4:46:05 PM	Helium MFC set to  100.000000
9/21/2010	4:46:05 PM	H2 MFC set to  0.000000
9/21/2010	4:46:05 PM	BCl3 MFC set to  0.000000
9/21/2010	4:46:05 PM	PHl3 MFC set to  0.000000
9/21/2010	4:46:05 PM	SiCl4 MFC set to  0.000000
9/21/2010	4:46:05 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	4:46:05 PM	Tube furnace set to 0
9/21/2010	4:46:06 PM	Helium valve closed
9/21/2010	4:46:06 PM	H2 valve closed
9/21/2010	4:46:06 PM	BCl3 valve closed
9/21/2010	4:46:06 PM	PH3 valve closed
9/21/2010	4:46:06 PM	SiCl4 pre valve closed
9/21/2010	4:46:06 PM	SiCl4 post valve closed
9/21/2010	4:46:06 PM	Bubbler valve closed
9/21/2010	4:46:06 PM	Main Vac valve opened
9/21/2010	4:46:06 PM	Bypass valve opened
9/21/2010	4:46:06 PM	Helium MFC set to  0.000000
9/21/2010	4:46:06 PM	H2 MFC set to  0.000000
9/21/2010	4:46:06 PM	BCl3 MFC set to  0.000000
9/21/2010	4:46:06 PM	PHl3 MFC set to  0.000000
9/21/2010	4:46:06 PM	SiCl4 MFC set to  0.000000
9/21/2010	4:46:06 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	4:46:06 PM	Tube furnace set to 0
9/21/2010	4:46:10 PM	Run aborted at 4:46 PM
9/21/2010	4:46:10 PM	Helium valve closed
9/21/2010	4:46:10 PM	H2 valve closed
9/21/2010	4:46:10 PM	BCl3 valve closed
9/21/2010	4:46:10 PM	PH3 valve closed
9/21/2010	4:46:10 PM	SiCl4 pre valve closed
9/21/2010	4:46:10 PM	SiCl4 post valve closed
9/21/2010	4:46:10 PM	Bypass valve closed
9/21/2010	4:46:10 PM	Main Vac valve closed
9/21/2010	4:46:10 PM	Bubbler valve closed
9/21/2010	4:46:10 PM	Helium MFC set to  0.000000
9/21/2010	4:46:10 PM	H2 MFC set to  0.000000
9/21/2010	4:46:10 PM	BCl3 MFC set to  0.000000
9/21/2010	4:46:10 PM	PHl3 MFC set to  0.000000
9/21/2010	4:46:10 PM	SiCl4 MFC set to  0.000000
9/21/2010	4:46:11 PM	Tube furnace set to 0
9/21/2010	4:46:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/21/2010	4:46:12 PM	Bypass valve opened
9/21/2010	4:46:13 PM	Main Vac valve opened
9/21/2010	4:46:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/21/2010	4:46:16 PM	Recipe started at 4:46 PM
9/21/2010	4:46:16 PM	Helium valve closed
9/21/2010	4:46:16 PM	H2 valve closed
9/21/2010	4:46:16 PM	BCl3 valve closed
9/21/2010	4:46:16 PM	PH3 valve closed
9/21/2010	4:46:16 PM	SiCl4 pre valve closed
9/21/2010	4:46:16 PM	SiCl4 post valve closed
9/21/2010	4:46:16 PM	Main Vac valve closed
9/21/2010	4:46:16 PM	Bubbler valve closed
9/21/2010	4:46:16 PM	Bypass valve opened
9/21/2010	4:46:16 PM	Helium MFC set to  0.000000
9/21/2010	4:46:16 PM	H2 MFC set to  0.000000
9/21/2010	4:46:16 PM	BCl3 MFC set to  0.000000
9/21/2010	4:46:16 PM	PHl3 MFC set to  0.000000
9/21/2010	4:46:16 PM	SiCl4 MFC set to  0.000000
9/21/2010	4:46:16 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	4:46:16 PM	Tube furnace set to 0
9/21/2010	4:46:16 PM	Helium valve closed
9/21/2010	4:46:16 PM	H2 valve closed
9/21/2010	4:46:16 PM	BCl3 valve closed
9/21/2010	4:46:16 PM	PH3 valve closed
9/21/2010	4:46:16 PM	SiCl4 pre valve closed
9/21/2010	4:46:16 PM	SiCl4 post valve closed
9/21/2010	4:46:16 PM	Bubbler valve closed
9/21/2010	4:46:16 PM	Main Vac valve opened
9/21/2010	4:46:16 PM	Bypass valve opened
9/21/2010	4:46:16 PM	Helium MFC set to  0.000000
9/21/2010	4:46:16 PM	H2 MFC set to  0.000000
9/21/2010	4:46:16 PM	BCl3 MFC set to  0.000000
9/21/2010	4:46:16 PM	PHl3 MFC set to  0.000000
9/21/2010	4:46:16 PM	SiCl4 MFC set to  0.000000
9/21/2010	4:46:16 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	4:46:16 PM	Tube furnace set to 0
9/21/2010	4:46:16 PM	Run finished at 4:46 PM
9/21/2010	4:46:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/21/2010	4:52:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/21/2010	4:52:48 PM	Recipe started at 4:52 PM
9/21/2010	4:52:48 PM	Helium valve closed
9/21/2010	4:52:48 PM	H2 valve closed
9/21/2010	4:52:48 PM	BCl3 valve closed
9/21/2010	4:52:48 PM	PH3 valve closed
9/21/2010	4:52:48 PM	SiCl4 pre valve closed
9/21/2010	4:52:48 PM	SiCl4 post valve closed
9/21/2010	4:52:48 PM	Main Vac valve closed
9/21/2010	4:52:48 PM	Bubbler valve closed
9/21/2010	4:52:48 PM	Bypass valve opened
9/21/2010	4:52:48 PM	Helium MFC set to  0.000000
9/21/2010	4:52:48 PM	H2 MFC set to  0.000000
9/21/2010	4:52:48 PM	BCl3 MFC set to  0.000000
9/21/2010	4:52:48 PM	PHl3 MFC set to  0.000000
9/21/2010	4:52:48 PM	SiCl4 MFC set to  0.000000
9/21/2010	4:52:48 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	4:52:48 PM	Tube furnace set to 0
9/21/2010	4:52:48 PM	Helium valve closed
9/21/2010	4:52:48 PM	H2 valve closed
9/21/2010	4:52:48 PM	BCl3 valve closed
9/21/2010	4:52:48 PM	PH3 valve closed
9/21/2010	4:52:48 PM	SiCl4 pre valve closed
9/21/2010	4:52:48 PM	SiCl4 post valve closed
9/21/2010	4:52:48 PM	Bubbler valve closed
9/21/2010	4:52:48 PM	Main Vac valve opened
9/21/2010	4:52:48 PM	Bypass valve opened
9/21/2010	4:52:48 PM	Helium MFC set to  0.000000
9/21/2010	4:52:48 PM	H2 MFC set to  0.000000
9/21/2010	4:52:48 PM	BCl3 MFC set to  0.000000
9/21/2010	4:52:48 PM	PHl3 MFC set to  0.000000
9/21/2010	4:52:48 PM	SiCl4 MFC set to  0.000000
9/21/2010	4:52:48 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	4:52:48 PM	Tube furnace set to 0
9/21/2010	4:53:48 PM	H2 valve closed
9/21/2010	4:53:48 PM	BCl3 valve closed
9/21/2010	4:53:48 PM	PH3 valve closed
9/21/2010	4:53:48 PM	SiCl4 pre valve closed
9/21/2010	4:53:48 PM	SiCl4 post valve closed
9/21/2010	4:53:48 PM	Bubbler valve closed
9/21/2010	4:53:48 PM	Helium valve opened
9/21/2010	4:53:48 PM	Main Vac valve opened
9/21/2010	4:53:48 PM	Bypass valve opened
9/21/2010	4:53:48 PM	Helium MFC set to  100.000000
9/21/2010	4:53:48 PM	H2 MFC set to  0.000000
9/21/2010	4:53:48 PM	BCl3 MFC set to  0.000000
9/21/2010	4:53:48 PM	PHl3 MFC set to  0.000000
9/21/2010	4:53:48 PM	SiCl4 MFC set to  0.000000
9/21/2010	4:53:48 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	4:53:49 PM	Tube furnace set to 0
9/21/2010	4:54:49 PM	Helium valve closed
9/21/2010	4:54:49 PM	H2 valve closed
9/21/2010	4:54:49 PM	BCl3 valve closed
9/21/2010	4:54:49 PM	PH3 valve closed
9/21/2010	4:54:49 PM	SiCl4 pre valve closed
9/21/2010	4:54:49 PM	SiCl4 post valve closed
9/21/2010	4:54:49 PM	Bubbler valve closed
9/21/2010	4:54:49 PM	Main Vac valve opened
9/21/2010	4:54:49 PM	Bypass valve opened
9/21/2010	4:54:49 PM	Helium MFC set to  0.000000
9/21/2010	4:54:49 PM	H2 MFC set to  0.000000
9/21/2010	4:54:49 PM	BCl3 MFC set to  0.000000
9/21/2010	4:54:49 PM	PHl3 MFC set to  0.000000
9/21/2010	4:54:49 PM	SiCl4 MFC set to  0.000000
9/21/2010	4:54:49 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	4:54:49 PM	Tube furnace set to 0
9/21/2010	4:55:49 PM	H2 valve closed
9/21/2010	4:55:49 PM	BCl3 valve closed
9/21/2010	4:55:49 PM	PH3 valve closed
9/21/2010	4:55:49 PM	SiCl4 pre valve closed
9/21/2010	4:55:49 PM	SiCl4 post valve closed
9/21/2010	4:55:49 PM	Bubbler valve closed
9/21/2010	4:55:49 PM	Helium valve opened
9/21/2010	4:55:49 PM	Main Vac valve opened
9/21/2010	4:55:49 PM	Bypass valve opened
9/21/2010	4:55:49 PM	Helium MFC set to  100.000000
9/21/2010	4:55:49 PM	H2 MFC set to  0.000000
9/21/2010	4:55:49 PM	BCl3 MFC set to  0.000000
9/21/2010	4:55:49 PM	PHl3 MFC set to  0.000000
9/21/2010	4:55:49 PM	SiCl4 MFC set to  0.000000
9/21/2010	4:55:49 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	4:55:49 PM	Tube furnace set to 0
9/21/2010	4:56:49 PM	Helium valve closed
9/21/2010	4:56:49 PM	H2 valve closed
9/21/2010	4:56:49 PM	BCl3 valve closed
9/21/2010	4:56:49 PM	PH3 valve closed
9/21/2010	4:56:49 PM	SiCl4 pre valve closed
9/21/2010	4:56:49 PM	SiCl4 post valve closed
9/21/2010	4:56:49 PM	Bubbler valve closed
9/21/2010	4:56:49 PM	Main Vac valve opened
9/21/2010	4:56:49 PM	Bypass valve opened
9/21/2010	4:56:49 PM	Helium MFC set to  0.000000
9/21/2010	4:56:49 PM	H2 MFC set to  0.000000
9/21/2010	4:56:49 PM	BCl3 MFC set to  0.000000
9/21/2010	4:56:49 PM	PHl3 MFC set to  0.000000
9/21/2010	4:56:49 PM	SiCl4 MFC set to  0.000000
9/21/2010	4:56:49 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	4:56:49 PM	Tube furnace set to 0
9/21/2010	4:57:49 PM	H2 valve closed
9/21/2010	4:57:49 PM	BCl3 valve closed
9/21/2010	4:57:49 PM	PH3 valve closed
9/21/2010	4:57:49 PM	SiCl4 pre valve closed
9/21/2010	4:57:49 PM	SiCl4 post valve closed
9/21/2010	4:57:49 PM	Bubbler valve closed
9/21/2010	4:57:49 PM	Helium valve opened
9/21/2010	4:57:49 PM	Main Vac valve opened
9/21/2010	4:57:49 PM	Bypass valve opened
9/21/2010	4:57:49 PM	Helium MFC set to  100.000000
9/21/2010	4:57:49 PM	H2 MFC set to  0.000000
9/21/2010	4:57:49 PM	BCl3 MFC set to  0.000000
9/21/2010	4:57:49 PM	PHl3 MFC set to  0.000000
9/21/2010	4:57:49 PM	SiCl4 MFC set to  0.000000
9/21/2010	4:57:49 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	4:57:49 PM	Tube furnace set to 0
9/21/2010	4:58:49 PM	Helium valve closed
9/21/2010	4:58:49 PM	H2 valve closed
9/21/2010	4:58:49 PM	BCl3 valve closed
9/21/2010	4:58:49 PM	PH3 valve closed
9/21/2010	4:58:49 PM	SiCl4 pre valve closed
9/21/2010	4:58:49 PM	SiCl4 post valve closed
9/21/2010	4:58:49 PM	Bubbler valve closed
9/21/2010	4:58:49 PM	Main Vac valve opened
9/21/2010	4:58:49 PM	Bypass valve opened
9/21/2010	4:58:49 PM	Helium MFC set to  0.000000
9/21/2010	4:58:49 PM	H2 MFC set to  0.000000
9/21/2010	4:58:49 PM	BCl3 MFC set to  0.000000
9/21/2010	4:58:49 PM	PHl3 MFC set to  0.000000
9/21/2010	4:58:49 PM	SiCl4 MFC set to  0.000000
9/21/2010	4:58:49 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	4:58:50 PM	Tube furnace set to 0
9/21/2010	4:59:50 PM	H2 valve closed
9/21/2010	4:59:50 PM	BCl3 valve closed
9/21/2010	4:59:50 PM	PH3 valve closed
9/21/2010	4:59:50 PM	SiCl4 pre valve closed
9/21/2010	4:59:50 PM	SiCl4 post valve closed
9/21/2010	4:59:50 PM	Bubbler valve closed
9/21/2010	4:59:50 PM	Helium valve opened
9/21/2010	4:59:50 PM	Main Vac valve opened
9/21/2010	4:59:50 PM	Bypass valve opened
9/21/2010	4:59:50 PM	Helium MFC set to  100.000000
9/21/2010	4:59:50 PM	H2 MFC set to  0.000000
9/21/2010	4:59:50 PM	BCl3 MFC set to  0.000000
9/21/2010	4:59:50 PM	PHl3 MFC set to  0.000000
9/21/2010	4:59:50 PM	SiCl4 MFC set to  0.000000
9/21/2010	4:59:50 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	4:59:50 PM	Tube furnace set to 0
9/21/2010	5:00:50 PM	Helium valve closed
9/21/2010	5:00:50 PM	H2 valve closed
9/21/2010	5:00:50 PM	BCl3 valve closed
9/21/2010	5:00:50 PM	PH3 valve closed
9/21/2010	5:00:50 PM	SiCl4 pre valve closed
9/21/2010	5:00:50 PM	SiCl4 post valve closed
9/21/2010	5:00:50 PM	Bubbler valve closed
9/21/2010	5:00:50 PM	Main Vac valve opened
9/21/2010	5:00:50 PM	Bypass valve opened
9/21/2010	5:00:50 PM	Helium MFC set to  0.000000
9/21/2010	5:00:50 PM	H2 MFC set to  0.000000
9/21/2010	5:00:50 PM	BCl3 MFC set to  0.000000
9/21/2010	5:00:50 PM	PHl3 MFC set to  0.000000
9/21/2010	5:00:50 PM	SiCl4 MFC set to  0.000000
9/21/2010	5:00:50 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	5:00:50 PM	Tube furnace set to 0
9/21/2010	5:01:50 PM	H2 valve closed
9/21/2010	5:01:50 PM	BCl3 valve closed
9/21/2010	5:01:50 PM	PH3 valve closed
9/21/2010	5:01:50 PM	SiCl4 pre valve closed
9/21/2010	5:01:50 PM	SiCl4 post valve closed
9/21/2010	5:01:50 PM	Bubbler valve closed
9/21/2010	5:01:50 PM	Helium valve opened
9/21/2010	5:01:50 PM	Main Vac valve opened
9/21/2010	5:01:50 PM	Bypass valve opened
9/21/2010	5:01:50 PM	Helium MFC set to  100.000000
9/21/2010	5:01:50 PM	H2 MFC set to  0.000000
9/21/2010	5:01:50 PM	BCl3 MFC set to  0.000000
9/21/2010	5:01:50 PM	PHl3 MFC set to  0.000000
9/21/2010	5:01:50 PM	SiCl4 MFC set to  0.000000
9/21/2010	5:01:50 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	5:01:50 PM	Tube furnace set to 0
9/21/2010	5:02:50 PM	Helium valve closed
9/21/2010	5:02:50 PM	H2 valve closed
9/21/2010	5:02:50 PM	BCl3 valve closed
9/21/2010	5:02:50 PM	PH3 valve closed
9/21/2010	5:02:50 PM	SiCl4 pre valve closed
9/21/2010	5:02:50 PM	SiCl4 post valve closed
9/21/2010	5:02:50 PM	Bubbler valve closed
9/21/2010	5:02:50 PM	Main Vac valve opened
9/21/2010	5:02:50 PM	Bypass valve opened
9/21/2010	5:02:50 PM	Helium MFC set to  0.000000
9/21/2010	5:02:50 PM	H2 MFC set to  0.000000
9/21/2010	5:02:50 PM	BCl3 MFC set to  0.000000
9/21/2010	5:02:50 PM	PHl3 MFC set to  0.000000
9/21/2010	5:02:50 PM	SiCl4 MFC set to  0.000000
9/21/2010	5:02:50 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	5:02:50 PM	Tube furnace set to 0
9/21/2010	5:03:50 PM	H2 valve closed
9/21/2010	5:03:50 PM	BCl3 valve closed
9/21/2010	5:03:50 PM	PH3 valve closed
9/21/2010	5:03:50 PM	SiCl4 pre valve closed
9/21/2010	5:03:50 PM	SiCl4 post valve closed
9/21/2010	5:03:50 PM	Bubbler valve closed
9/21/2010	5:03:50 PM	Helium valve opened
9/21/2010	5:03:50 PM	Main Vac valve opened
9/21/2010	5:03:50 PM	Bypass valve opened
9/21/2010	5:03:50 PM	Helium MFC set to  100.000000
9/21/2010	5:03:50 PM	H2 MFC set to  0.000000
9/21/2010	5:03:50 PM	BCl3 MFC set to  0.000000
9/21/2010	5:03:50 PM	PHl3 MFC set to  0.000000
9/21/2010	5:03:50 PM	SiCl4 MFC set to  0.000000
9/21/2010	5:03:50 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	5:03:51 PM	Tube furnace set to 0
9/21/2010	5:04:51 PM	Helium valve closed
9/21/2010	5:04:51 PM	H2 valve closed
9/21/2010	5:04:51 PM	BCl3 valve closed
9/21/2010	5:04:51 PM	PH3 valve closed
9/21/2010	5:04:51 PM	SiCl4 pre valve closed
9/21/2010	5:04:51 PM	SiCl4 post valve closed
9/21/2010	5:04:51 PM	Bubbler valve closed
9/21/2010	5:04:51 PM	Main Vac valve opened
9/21/2010	5:04:51 PM	Bypass valve opened
9/21/2010	5:04:51 PM	Helium MFC set to  0.000000
9/21/2010	5:04:51 PM	H2 MFC set to  0.000000
9/21/2010	5:04:51 PM	BCl3 MFC set to  0.000000
9/21/2010	5:04:51 PM	PHl3 MFC set to  0.000000
9/21/2010	5:04:51 PM	SiCl4 MFC set to  0.000000
9/21/2010	5:04:51 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	5:04:51 PM	Tube furnace set to 0
9/21/2010	5:05:51 PM	H2 valve closed
9/21/2010	5:05:51 PM	BCl3 valve closed
9/21/2010	5:05:51 PM	PH3 valve closed
9/21/2010	5:05:51 PM	SiCl4 pre valve closed
9/21/2010	5:05:51 PM	SiCl4 post valve closed
9/21/2010	5:05:51 PM	Bubbler valve closed
9/21/2010	5:05:51 PM	Helium valve opened
9/21/2010	5:05:51 PM	Main Vac valve opened
9/21/2010	5:05:51 PM	Bypass valve opened
9/21/2010	5:05:51 PM	Helium MFC set to  100.000000
9/21/2010	5:05:51 PM	H2 MFC set to  0.000000
9/21/2010	5:05:51 PM	BCl3 MFC set to  0.000000
9/21/2010	5:05:51 PM	PHl3 MFC set to  0.000000
9/21/2010	5:05:51 PM	SiCl4 MFC set to  0.000000
9/21/2010	5:05:51 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	5:05:51 PM	Tube furnace set to 0
9/21/2010	5:06:51 PM	Helium valve closed
9/21/2010	5:06:51 PM	H2 valve closed
9/21/2010	5:06:51 PM	BCl3 valve closed
9/21/2010	5:06:51 PM	PH3 valve closed
9/21/2010	5:06:51 PM	SiCl4 pre valve closed
9/21/2010	5:06:51 PM	SiCl4 post valve closed
9/21/2010	5:06:51 PM	Bubbler valve closed
9/21/2010	5:06:51 PM	Main Vac valve opened
9/21/2010	5:06:51 PM	Bypass valve opened
9/21/2010	5:06:51 PM	Helium MFC set to  0.000000
9/21/2010	5:06:51 PM	H2 MFC set to  0.000000
9/21/2010	5:06:51 PM	BCl3 MFC set to  0.000000
9/21/2010	5:06:51 PM	PHl3 MFC set to  0.000000
9/21/2010	5:06:51 PM	SiCl4 MFC set to  0.000000
9/21/2010	5:06:51 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	5:06:51 PM	Tube furnace set to 0
9/21/2010	5:07:51 PM	H2 valve closed
9/21/2010	5:07:51 PM	BCl3 valve closed
9/21/2010	5:07:51 PM	PH3 valve closed
9/21/2010	5:07:51 PM	SiCl4 pre valve closed
9/21/2010	5:07:51 PM	SiCl4 post valve closed
9/21/2010	5:07:51 PM	Bubbler valve closed
9/21/2010	5:07:51 PM	Helium valve opened
9/21/2010	5:07:51 PM	Main Vac valve opened
9/21/2010	5:07:51 PM	Bypass valve opened
9/21/2010	5:07:51 PM	Helium MFC set to  100.000000
9/21/2010	5:07:51 PM	H2 MFC set to  0.000000
9/21/2010	5:07:51 PM	BCl3 MFC set to  0.000000
9/21/2010	5:07:51 PM	PHl3 MFC set to  0.000000
9/21/2010	5:07:51 PM	SiCl4 MFC set to  0.000000
9/21/2010	5:07:51 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	5:07:51 PM	Tube furnace set to 0
9/21/2010	5:08:51 PM	Helium valve closed
9/21/2010	5:08:51 PM	H2 valve closed
9/21/2010	5:08:51 PM	BCl3 valve closed
9/21/2010	5:08:51 PM	PH3 valve closed
9/21/2010	5:08:51 PM	SiCl4 pre valve closed
9/21/2010	5:08:51 PM	SiCl4 post valve closed
9/21/2010	5:08:51 PM	Bubbler valve closed
9/21/2010	5:08:51 PM	Main Vac valve opened
9/21/2010	5:08:51 PM	Bypass valve opened
9/21/2010	5:08:51 PM	Helium MFC set to  0.000000
9/21/2010	5:08:51 PM	H2 MFC set to  0.000000
9/21/2010	5:08:51 PM	BCl3 MFC set to  0.000000
9/21/2010	5:08:51 PM	PHl3 MFC set to  0.000000
9/21/2010	5:08:51 PM	SiCl4 MFC set to  0.000000
9/21/2010	5:08:51 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	5:08:52 PM	Tube furnace set to 0
9/21/2010	5:09:52 PM	H2 valve closed
9/21/2010	5:09:52 PM	BCl3 valve closed
9/21/2010	5:09:52 PM	PH3 valve closed
9/21/2010	5:09:52 PM	SiCl4 pre valve closed
9/21/2010	5:09:52 PM	SiCl4 post valve closed
9/21/2010	5:09:52 PM	Bubbler valve closed
9/21/2010	5:09:52 PM	Helium valve opened
9/21/2010	5:09:52 PM	Main Vac valve opened
9/21/2010	5:09:52 PM	Bypass valve opened
9/21/2010	5:09:52 PM	Helium MFC set to  100.000000
9/21/2010	5:09:52 PM	H2 MFC set to  0.000000
9/21/2010	5:09:52 PM	BCl3 MFC set to  0.000000
9/21/2010	5:09:52 PM	PHl3 MFC set to  0.000000
9/21/2010	5:09:52 PM	SiCl4 MFC set to  0.000000
9/21/2010	5:09:52 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	5:09:52 PM	Tube furnace set to 0
9/21/2010	5:10:52 PM	Helium valve closed
9/21/2010	5:10:52 PM	H2 valve closed
9/21/2010	5:10:52 PM	BCl3 valve closed
9/21/2010	5:10:52 PM	PH3 valve closed
9/21/2010	5:10:52 PM	SiCl4 pre valve closed
9/21/2010	5:10:52 PM	SiCl4 post valve closed
9/21/2010	5:10:52 PM	Bubbler valve closed
9/21/2010	5:10:52 PM	Main Vac valve opened
9/21/2010	5:10:52 PM	Bypass valve opened
9/21/2010	5:10:52 PM	Helium MFC set to  0.000000
9/21/2010	5:10:52 PM	H2 MFC set to  0.000000
9/21/2010	5:10:52 PM	BCl3 MFC set to  0.000000
9/21/2010	5:10:52 PM	PHl3 MFC set to  0.000000
9/21/2010	5:10:52 PM	SiCl4 MFC set to  0.000000
9/21/2010	5:10:52 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	5:10:52 PM	Tube furnace set to 0
9/21/2010	5:10:54 PM	H2 valve closed
9/21/2010	5:10:54 PM	BCl3 valve closed
9/21/2010	5:10:54 PM	PH3 valve closed
9/21/2010	5:10:54 PM	SiCl4 pre valve closed
9/21/2010	5:10:54 PM	SiCl4 post valve closed
9/21/2010	5:10:54 PM	Bubbler valve closed
9/21/2010	5:10:54 PM	Helium valve opened
9/21/2010	5:10:54 PM	Main Vac valve opened
9/21/2010	5:10:54 PM	Bypass valve opened
9/21/2010	5:10:54 PM	Helium MFC set to  100.000000
9/21/2010	5:10:54 PM	H2 MFC set to  0.000000
9/21/2010	5:10:54 PM	BCl3 MFC set to  0.000000
9/21/2010	5:10:54 PM	PHl3 MFC set to  0.000000
9/21/2010	5:10:54 PM	SiCl4 MFC set to  0.000000
9/21/2010	5:10:54 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	5:10:54 PM	Tube furnace set to 0
9/21/2010	5:10:54 PM	Helium valve closed
9/21/2010	5:10:54 PM	H2 valve closed
9/21/2010	5:10:54 PM	BCl3 valve closed
9/21/2010	5:10:54 PM	PH3 valve closed
9/21/2010	5:10:54 PM	SiCl4 pre valve closed
9/21/2010	5:10:54 PM	SiCl4 post valve closed
9/21/2010	5:10:54 PM	Bubbler valve closed
9/21/2010	5:10:54 PM	Main Vac valve opened
9/21/2010	5:10:54 PM	Bypass valve opened
9/21/2010	5:10:54 PM	Helium MFC set to  0.000000
9/21/2010	5:10:54 PM	H2 MFC set to  0.000000
9/21/2010	5:10:54 PM	BCl3 MFC set to  0.000000
9/21/2010	5:10:54 PM	PHl3 MFC set to  0.000000
9/21/2010	5:10:54 PM	SiCl4 MFC set to  0.000000
9/21/2010	5:10:54 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	5:10:55 PM	Tube furnace set to 0
9/21/2010	5:10:55 PM	Run finished at 5:10 PM
9/21/2010	5:10:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/21/2010	5:16:34 PM	Recipe started at 5:16 PM
9/21/2010	5:16:34 PM	Helium valve closed
9/21/2010	5:16:34 PM	BCl3 valve closed
9/21/2010	5:16:34 PM	PH3 valve closed
9/21/2010	5:16:34 PM	SiCl4 pre valve closed
9/21/2010	5:16:34 PM	SiCl4 post valve closed
9/21/2010	5:16:34 PM	Main Vac valve closed
9/21/2010	5:16:34 PM	Bypass valve closed
9/21/2010	5:16:34 PM	Bubbler valve closed
9/21/2010	5:16:34 PM	H2 valve opened
9/21/2010	5:16:34 PM	Helium MFC set to  0.000000
9/21/2010	5:16:34 PM	H2 MFC set to  500.000000
9/21/2010	5:16:34 PM	BCl3 MFC set to  0.000000
9/21/2010	5:16:34 PM	PHl3 MFC set to  0.000000
9/21/2010	5:16:34 PM	SiCl4 MFC set to  0.000000
9/21/2010	5:16:34 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	5:16:34 PM	Tube furnace set to 0
9/21/2010	5:16:35 PM	Helium valve closed
9/21/2010	5:16:35 PM	BCl3 valve closed
9/21/2010	5:16:35 PM	PH3 valve closed
9/21/2010	5:16:35 PM	SiCl4 pre valve closed
9/21/2010	5:16:35 PM	SiCl4 post valve closed
9/21/2010	5:16:35 PM	Main Vac valve closed
9/21/2010	5:16:35 PM	Bypass valve closed
9/21/2010	5:16:35 PM	Bubbler valve closed
9/21/2010	5:16:35 PM	H2 valve opened
9/21/2010	5:16:35 PM	Helium MFC set to  0.000000
9/21/2010	5:16:35 PM	H2 MFC set to  500.000000
9/21/2010	5:16:35 PM	BCl3 MFC set to  0.000000
9/21/2010	5:16:35 PM	PHl3 MFC set to  0.000000
9/21/2010	5:16:35 PM	SiCl4 MFC set to  0.000000
9/21/2010	5:16:35 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	5:16:35 PM	Tube furnace set to 1000
9/21/2010	5:16:35 PM	Helium valve closed
9/21/2010	5:16:35 PM	H2 valve closed
9/21/2010	5:16:35 PM	BCl3 valve closed
9/21/2010	5:16:35 PM	PH3 valve closed
9/21/2010	5:16:35 PM	SiCl4 pre valve closed
9/21/2010	5:16:35 PM	SiCl4 post valve closed
9/21/2010	5:16:35 PM	Main Vac valve closed
9/21/2010	5:16:35 PM	Bubbler valve closed
9/21/2010	5:16:35 PM	Bypass valve closed
9/21/2010	5:16:35 PM	Helium MFC set to  0.000000
9/21/2010	5:16:35 PM	H2 MFC set to  0.000000
9/21/2010	5:16:35 PM	BCl3 MFC set to  0.000000
9/21/2010	5:16:35 PM	PHl3 MFC set to  0.000000
9/21/2010	5:16:35 PM	SiCl4 MFC set to  0.000000
9/21/2010	5:16:35 PM	Bypass solenoid MFC set to  760.000000
9/21/2010	5:16:35 PM	Tube furnace set to 0
9/21/2010	5:16:35 PM	Baratron reads 6.322147 Torr and NaOH valve is open.  Emergency exit.
9/21/2010	5:16:37 PM	Run aborted at 5:16 PM
9/21/2010	5:16:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/21/2010	5:16:42 PM	Recipe started at 5:16 PM
9/21/2010	5:16:42 PM	Helium valve closed
9/21/2010	5:16:42 PM	H2 valve closed
9/21/2010	5:16:42 PM	BCl3 valve closed
9/21/2010	5:16:42 PM	PH3 valve closed
9/21/2010	5:16:42 PM	SiCl4 pre valve closed
9/21/2010	5:16:42 PM	SiCl4 post valve closed
9/21/2010	5:16:42 PM	Main Vac valve closed
9/21/2010	5:16:42 PM	Bubbler valve closed
9/21/2010	5:16:42 PM	Bypass valve opened
9/21/2010	5:16:42 PM	Helium MFC set to  0.000000
9/21/2010	5:16:42 PM	H2 MFC set to  0.000000
9/21/2010	5:16:42 PM	BCl3 MFC set to  0.000000
9/21/2010	5:16:42 PM	PHl3 MFC set to  0.000000
9/21/2010	5:16:42 PM	SiCl4 MFC set to  0.000000
9/21/2010	5:16:42 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	5:16:42 PM	Tube furnace set to 0
9/21/2010	5:16:42 PM	Helium valve closed
9/21/2010	5:16:42 PM	H2 valve closed
9/21/2010	5:16:42 PM	BCl3 valve closed
9/21/2010	5:16:42 PM	PH3 valve closed
9/21/2010	5:16:42 PM	SiCl4 pre valve closed
9/21/2010	5:16:42 PM	SiCl4 post valve closed
9/21/2010	5:16:42 PM	Bubbler valve closed
9/21/2010	5:16:42 PM	Main Vac valve opened
9/21/2010	5:16:42 PM	Bypass valve opened
9/21/2010	5:16:42 PM	Helium MFC set to  0.000000
9/21/2010	5:16:42 PM	H2 MFC set to  0.000000
9/21/2010	5:16:42 PM	BCl3 MFC set to  0.000000
9/21/2010	5:16:42 PM	PHl3 MFC set to  0.000000
9/21/2010	5:16:42 PM	SiCl4 MFC set to  0.000000
9/21/2010	5:16:42 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	5:16:42 PM	Tube furnace set to 0
9/21/2010	5:16:42 PM	Run finished at 5:16 PM
9/21/2010	5:16:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/21/2010	5:17:19 PM	Recipe started at 5:17 PM
9/21/2010	5:17:19 PM	Helium valve closed
9/21/2010	5:17:19 PM	BCl3 valve closed
9/21/2010	5:17:19 PM	PH3 valve closed
9/21/2010	5:17:19 PM	SiCl4 pre valve closed
9/21/2010	5:17:19 PM	SiCl4 post valve closed
9/21/2010	5:17:19 PM	Main Vac valve closed
9/21/2010	5:17:19 PM	Bypass valve closed
9/21/2010	5:17:19 PM	Bubbler valve closed
9/21/2010	5:17:19 PM	H2 valve opened
9/21/2010	5:17:19 PM	Helium MFC set to  0.000000
9/21/2010	5:17:19 PM	H2 MFC set to  500.000000
9/21/2010	5:17:19 PM	BCl3 MFC set to  0.000000
9/21/2010	5:17:19 PM	PHl3 MFC set to  0.000000
9/21/2010	5:17:19 PM	SiCl4 MFC set to  0.000000
9/21/2010	5:17:19 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	5:17:19 PM	Tube furnace set to 0
9/21/2010	5:18:37 PM	Helium valve closed
9/21/2010	5:18:37 PM	BCl3 valve closed
9/21/2010	5:18:37 PM	PH3 valve closed
9/21/2010	5:18:37 PM	SiCl4 pre valve closed
9/21/2010	5:18:37 PM	SiCl4 post valve closed
9/21/2010	5:18:37 PM	Main Vac valve closed
9/21/2010	5:18:37 PM	Bypass valve closed
9/21/2010	5:18:37 PM	H2 valve opened
9/21/2010	5:18:37 PM	Bubbler valve opened
9/21/2010	5:18:37 PM	Helium MFC set to  0.000000
9/21/2010	5:18:37 PM	H2 MFC set to  500.000000
9/21/2010	5:18:37 PM	BCl3 MFC set to  0.000000
9/21/2010	5:18:37 PM	PHl3 MFC set to  0.000000
9/21/2010	5:18:37 PM	SiCl4 MFC set to  0.000000
9/21/2010	5:18:37 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	5:18:37 PM	Tube furnace set to 1000
9/21/2010	5:25:10 PM	Helium valve closed
9/21/2010	5:25:10 PM	H2 valve closed
9/21/2010	5:25:10 PM	BCl3 valve closed
9/21/2010	5:25:10 PM	PH3 valve closed
9/21/2010	5:25:10 PM	SiCl4 pre valve closed
9/21/2010	5:25:10 PM	SiCl4 post valve closed
9/21/2010	5:25:10 PM	Main Vac valve closed
9/21/2010	5:25:10 PM	Bubbler valve closed
9/21/2010	5:25:10 PM	Bypass valve closed
9/21/2010	5:25:10 PM	Helium MFC set to  0.000000
9/21/2010	5:25:10 PM	H2 MFC set to  0.000000
9/21/2010	5:25:10 PM	BCl3 MFC set to  0.000000
9/21/2010	5:25:10 PM	PHl3 MFC set to  0.000000
9/21/2010	5:25:10 PM	SiCl4 MFC set to  0.000000
9/21/2010	5:25:10 PM	Bypass solenoid MFC set to  760.000000
9/21/2010	5:25:10 PM	Tube furnace set to 0
9/21/2010	5:25:10 PM	Baratron reads 748.464117 Torr and NaOH valve is open.  Emergency exit.
9/21/2010	5:25:24 PM	Run aborted at 5:25 PM
9/21/2010	5:25:32 PM	Recipe started at 5:25 PM
9/21/2010	5:25:32 PM	Helium valve closed
9/21/2010	5:25:32 PM	BCl3 valve closed
9/21/2010	5:25:32 PM	PH3 valve closed
9/21/2010	5:25:32 PM	SiCl4 pre valve closed
9/21/2010	5:25:32 PM	SiCl4 post valve closed
9/21/2010	5:25:32 PM	Main Vac valve closed
9/21/2010	5:25:32 PM	Bypass valve closed
9/21/2010	5:25:32 PM	Bubbler valve closed
9/21/2010	5:25:32 PM	H2 valve opened
9/21/2010	5:25:32 PM	Helium MFC set to  0.000000
9/21/2010	5:25:32 PM	H2 MFC set to  500.000000
9/21/2010	5:25:32 PM	BCl3 MFC set to  0.000000
9/21/2010	5:25:32 PM	PHl3 MFC set to  0.000000
9/21/2010	5:25:32 PM	SiCl4 MFC set to  0.000000
9/21/2010	5:25:32 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	5:25:32 PM	Tube furnace set to 0
9/21/2010	5:25:34 PM	Helium valve closed
9/21/2010	5:25:34 PM	BCl3 valve closed
9/21/2010	5:25:34 PM	PH3 valve closed
9/21/2010	5:25:34 PM	SiCl4 pre valve closed
9/21/2010	5:25:34 PM	SiCl4 post valve closed
9/21/2010	5:25:34 PM	Main Vac valve closed
9/21/2010	5:25:34 PM	Bypass valve closed
9/21/2010	5:25:34 PM	H2 valve opened
9/21/2010	5:25:34 PM	Bubbler valve opened
9/21/2010	5:25:34 PM	Helium MFC set to  0.000000
9/21/2010	5:25:34 PM	H2 MFC set to  500.000000
9/21/2010	5:25:34 PM	BCl3 MFC set to  0.000000
9/21/2010	5:25:34 PM	PHl3 MFC set to  0.000000
9/21/2010	5:25:34 PM	SiCl4 MFC set to  0.000000
9/21/2010	5:25:34 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	5:25:34 PM	Tube furnace set to 1000
9/21/2010	5:45:19 PM	Helium valve closed
9/21/2010	5:45:19 PM	H2 valve closed
9/21/2010	5:45:19 PM	BCl3 valve closed
9/21/2010	5:45:19 PM	PH3 valve closed
9/21/2010	5:45:19 PM	SiCl4 pre valve closed
9/21/2010	5:45:19 PM	SiCl4 post valve closed
9/21/2010	5:45:19 PM	Main Vac valve closed
9/21/2010	5:45:19 PM	Bubbler valve closed
9/21/2010	5:45:19 PM	Bypass valve closed
9/21/2010	5:45:19 PM	Helium MFC set to  0.000000
9/21/2010	5:45:19 PM	H2 MFC set to  0.000000
9/21/2010	5:45:19 PM	BCl3 MFC set to  0.000000
9/21/2010	5:45:19 PM	PHl3 MFC set to  0.000000
9/21/2010	5:45:19 PM	SiCl4 MFC set to  0.000000
9/21/2010	5:45:19 PM	Bypass solenoid MFC set to  760.000000
9/21/2010	5:45:19 PM	Tube furnace set to 0
9/21/2010	5:45:19 PM	Baratron reads 749.484945 Torr and NaOH valve is open.  Emergency exit.
9/21/2010	5:47:31 PM	Run aborted at 5:47 PM
9/21/2010	5:47:47 PM	Recipe started at 5:47 PM
9/21/2010	5:47:47 PM	Helium valve closed
9/21/2010	5:47:47 PM	BCl3 valve closed
9/21/2010	5:47:47 PM	PH3 valve closed
9/21/2010	5:47:47 PM	SiCl4 pre valve closed
9/21/2010	5:47:47 PM	SiCl4 post valve closed
9/21/2010	5:47:47 PM	Main Vac valve closed
9/21/2010	5:47:47 PM	Bypass valve closed
9/21/2010	5:47:47 PM	Bubbler valve closed
9/21/2010	5:47:47 PM	H2 valve opened
9/21/2010	5:47:47 PM	Helium MFC set to  0.000000
9/21/2010	5:47:47 PM	H2 MFC set to  500.000000
9/21/2010	5:47:47 PM	BCl3 MFC set to  0.000000
9/21/2010	5:47:47 PM	PHl3 MFC set to  0.000000
9/21/2010	5:47:47 PM	SiCl4 MFC set to  0.000000
9/21/2010	5:47:47 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	5:47:48 PM	Tube furnace set to 0
9/21/2010	5:47:50 PM	Helium valve closed
9/21/2010	5:47:50 PM	BCl3 valve closed
9/21/2010	5:47:50 PM	PH3 valve closed
9/21/2010	5:47:50 PM	SiCl4 pre valve closed
9/21/2010	5:47:50 PM	SiCl4 post valve closed
9/21/2010	5:47:50 PM	Main Vac valve closed
9/21/2010	5:47:50 PM	Bypass valve closed
9/21/2010	5:47:50 PM	H2 valve opened
9/21/2010	5:47:50 PM	Bubbler valve opened
9/21/2010	5:47:50 PM	Helium MFC set to  0.000000
9/21/2010	5:47:50 PM	H2 MFC set to  500.000000
9/21/2010	5:47:50 PM	BCl3 MFC set to  0.000000
9/21/2010	5:47:50 PM	PHl3 MFC set to  0.000000
9/21/2010	5:47:50 PM	SiCl4 MFC set to  0.000000
9/21/2010	5:47:50 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	5:47:50 PM	Tube furnace set to 1000
9/21/2010	5:47:58 PM	Helium valve closed
9/21/2010	5:47:58 PM	H2 valve closed
9/21/2010	5:47:58 PM	BCl3 valve closed
9/21/2010	5:47:58 PM	PH3 valve closed
9/21/2010	5:47:58 PM	SiCl4 pre valve closed
9/21/2010	5:47:58 PM	SiCl4 post valve closed
9/21/2010	5:47:58 PM	Main Vac valve closed
9/21/2010	5:47:58 PM	Bubbler valve closed
9/21/2010	5:47:58 PM	Bypass valve closed
9/21/2010	5:47:58 PM	Helium MFC set to  0.000000
9/21/2010	5:47:58 PM	H2 MFC set to  0.000000
9/21/2010	5:47:58 PM	BCl3 MFC set to  0.000000
9/21/2010	5:47:58 PM	PHl3 MFC set to  0.000000
9/21/2010	5:47:58 PM	SiCl4 MFC set to  0.000000
9/21/2010	5:47:58 PM	Bypass solenoid MFC set to  760.000000
9/21/2010	5:47:58 PM	Tube furnace set to 0
9/21/2010	5:47:58 PM	Baratron reads 749.484945 Torr and NaOH valve is open.  Emergency exit.
9/21/2010	5:48:03 PM	Run aborted at 5:48 PM
9/21/2010	5:48:23 PM	Recipe started at 5:48 PM
9/21/2010	5:48:23 PM	Helium valve closed
9/21/2010	5:48:23 PM	BCl3 valve closed
9/21/2010	5:48:23 PM	PH3 valve closed
9/21/2010	5:48:23 PM	SiCl4 pre valve closed
9/21/2010	5:48:23 PM	SiCl4 post valve closed
9/21/2010	5:48:23 PM	Main Vac valve closed
9/21/2010	5:48:23 PM	Bypass valve closed
9/21/2010	5:48:23 PM	Bubbler valve closed
9/21/2010	5:48:23 PM	H2 valve opened
9/21/2010	5:48:23 PM	Helium MFC set to  0.000000
9/21/2010	5:48:23 PM	H2 MFC set to  500.000000
9/21/2010	5:48:23 PM	BCl3 MFC set to  0.000000
9/21/2010	5:48:23 PM	PHl3 MFC set to  0.000000
9/21/2010	5:48:23 PM	SiCl4 MFC set to  0.000000
9/21/2010	5:48:23 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	5:48:23 PM	Tube furnace set to 0
9/21/2010	5:48:25 PM	Helium valve closed
9/21/2010	5:48:25 PM	BCl3 valve closed
9/21/2010	5:48:25 PM	PH3 valve closed
9/21/2010	5:48:25 PM	SiCl4 pre valve closed
9/21/2010	5:48:25 PM	SiCl4 post valve closed
9/21/2010	5:48:25 PM	Main Vac valve closed
9/21/2010	5:48:25 PM	Bypass valve closed
9/21/2010	5:48:25 PM	H2 valve opened
9/21/2010	5:48:25 PM	Bubbler valve opened
9/21/2010	5:48:25 PM	Helium MFC set to  0.000000
9/21/2010	5:48:25 PM	H2 MFC set to  500.000000
9/21/2010	5:48:25 PM	BCl3 MFC set to  0.000000
9/21/2010	5:48:25 PM	PHl3 MFC set to  0.000000
9/21/2010	5:48:25 PM	SiCl4 MFC set to  0.000000
9/21/2010	5:48:25 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	5:48:26 PM	Tube furnace set to 1000
9/21/2010	5:48:36 PM	Run aborted at 5:48 PM
9/21/2010	5:48:36 PM	Helium valve closed
9/21/2010	5:48:36 PM	H2 valve closed
9/21/2010	5:48:36 PM	BCl3 valve closed
9/21/2010	5:48:36 PM	PH3 valve closed
9/21/2010	5:48:36 PM	SiCl4 pre valve closed
9/21/2010	5:48:36 PM	SiCl4 post valve closed
9/21/2010	5:48:36 PM	Bypass valve closed
9/21/2010	5:48:36 PM	Main Vac valve closed
9/21/2010	5:48:36 PM	Bubbler valve closed
9/21/2010	5:48:36 PM	Helium MFC set to  0.000000
9/21/2010	5:48:36 PM	H2 MFC set to  0.000000
9/21/2010	5:48:36 PM	BCl3 MFC set to  0.000000
9/21/2010	5:48:36 PM	PHl3 MFC set to  0.000000
9/21/2010	5:48:36 PM	SiCl4 MFC set to  0.000000
9/21/2010	5:48:36 PM	Tube furnace set to 0
9/21/2010	5:48:45 PM	Recipe started at 5:48 PM
9/21/2010	5:48:45 PM	Helium valve closed
9/21/2010	5:48:45 PM	BCl3 valve closed
9/21/2010	5:48:45 PM	PH3 valve closed
9/21/2010	5:48:45 PM	SiCl4 pre valve closed
9/21/2010	5:48:45 PM	SiCl4 post valve closed
9/21/2010	5:48:45 PM	Main Vac valve closed
9/21/2010	5:48:45 PM	Bypass valve closed
9/21/2010	5:48:45 PM	Bubbler valve closed
9/21/2010	5:48:45 PM	H2 valve opened
9/21/2010	5:48:45 PM	Helium MFC set to  0.000000
9/21/2010	5:48:45 PM	H2 MFC set to  500.000000
9/21/2010	5:48:45 PM	BCl3 MFC set to  0.000000
9/21/2010	5:48:45 PM	PHl3 MFC set to  0.000000
9/21/2010	5:48:45 PM	SiCl4 MFC set to  0.000000
9/21/2010	5:48:45 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	5:48:45 PM	Tube furnace set to 0
9/21/2010	5:48:47 PM	Helium valve closed
9/21/2010	5:48:47 PM	BCl3 valve closed
9/21/2010	5:48:47 PM	PH3 valve closed
9/21/2010	5:48:47 PM	SiCl4 pre valve closed
9/21/2010	5:48:47 PM	SiCl4 post valve closed
9/21/2010	5:48:47 PM	Main Vac valve closed
9/21/2010	5:48:47 PM	Bypass valve closed
9/21/2010	5:48:47 PM	H2 valve opened
9/21/2010	5:48:47 PM	Bubbler valve opened
9/21/2010	5:48:47 PM	Helium MFC set to  0.000000
9/21/2010	5:48:47 PM	H2 MFC set to  500.000000
9/21/2010	5:48:47 PM	BCl3 MFC set to  0.000000
9/21/2010	5:48:47 PM	PHl3 MFC set to  0.000000
9/21/2010	5:48:47 PM	SiCl4 MFC set to  0.000000
9/21/2010	5:48:47 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	5:48:48 PM	Tube furnace set to 1000
9/21/2010	6:08:48 PM	Helium valve closed
9/21/2010	6:08:48 PM	PH3 valve closed
9/21/2010	6:08:48 PM	Main Vac valve closed
9/21/2010	6:08:48 PM	Bypass valve closed
9/21/2010	6:08:48 PM	H2 valve opened
9/21/2010	6:08:48 PM	BCl3 valve opened
9/21/2010	6:08:48 PM	SiCl4 pre valve opened
9/21/2010	6:08:48 PM	SiCl4 post valve opened
9/21/2010	6:08:48 PM	Bubbler valve opened
9/21/2010	6:08:48 PM	Helium MFC set to  0.000000
9/21/2010	6:08:48 PM	H2 MFC set to  500.000000
9/21/2010	6:08:48 PM	BCl3 MFC set to  12.000000
9/21/2010	6:08:48 PM	PHl3 MFC set to  0.000000
9/21/2010	6:08:48 PM	SiCl4 MFC set to  50.000000
9/21/2010	6:08:48 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	6:08:48 PM	Tube furnace set to 1000
9/21/2010	6:20:48 PM	H2 valve closed
9/21/2010	6:20:48 PM	BCl3 valve closed
9/21/2010	6:20:48 PM	PH3 valve closed
9/21/2010	6:20:48 PM	SiCl4 pre valve closed
9/21/2010	6:20:48 PM	SiCl4 post valve closed
9/21/2010	6:20:48 PM	Main Vac valve closed
9/21/2010	6:20:48 PM	Bypass valve closed
9/21/2010	6:20:48 PM	Helium valve opened
9/21/2010	6:20:48 PM	Bubbler valve opened
9/21/2010	6:20:48 PM	Helium MFC set to  500.000000
9/21/2010	6:20:48 PM	H2 MFC set to  0.000000
9/21/2010	6:20:48 PM	BCl3 MFC set to  0.000000
9/21/2010	6:20:48 PM	PHl3 MFC set to  0.000000
9/21/2010	6:20:48 PM	SiCl4 MFC set to  0.000000
9/21/2010	6:20:48 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	6:20:48 PM	Tube furnace set to 0
9/21/2010	6:40:48 PM	Helium valve closed
9/21/2010	6:40:48 PM	H2 valve closed
9/21/2010	6:40:48 PM	BCl3 valve closed
9/21/2010	6:40:48 PM	PH3 valve closed
9/21/2010	6:40:48 PM	SiCl4 pre valve closed
9/21/2010	6:40:48 PM	SiCl4 post valve closed
9/21/2010	6:40:48 PM	Main Vac valve closed
9/21/2010	6:40:48 PM	Bypass valve closed
9/21/2010	6:40:48 PM	Bubbler valve closed
9/21/2010	6:40:48 PM	Helium MFC set to  0.000000
9/21/2010	6:40:48 PM	H2 MFC set to  0.000000
9/21/2010	6:40:48 PM	BCl3 MFC set to  0.000000
9/21/2010	6:40:48 PM	PHl3 MFC set to  0.000000
9/21/2010	6:40:48 PM	SiCl4 MFC set to  0.000000
9/21/2010	6:40:48 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	6:40:48 PM	Tube furnace set to 0
9/21/2010	6:40:48 PM	Run finished at 6:40 PM
9/21/2010	8:24:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/21/2010	8:24:01 PM	Recipe started at 8:24 PM
9/21/2010	8:24:01 PM	Helium valve closed
9/21/2010	8:24:01 PM	H2 valve closed
9/21/2010	8:24:01 PM	BCl3 valve closed
9/21/2010	8:24:01 PM	PH3 valve closed
9/21/2010	8:24:01 PM	SiCl4 pre valve closed
9/21/2010	8:24:01 PM	SiCl4 post valve closed
9/21/2010	8:24:01 PM	Main Vac valve closed
9/21/2010	8:24:01 PM	Bubbler valve closed
9/21/2010	8:24:02 PM	Bypass valve opened
9/21/2010	8:24:02 PM	Helium MFC set to  0.000000
9/21/2010	8:24:02 PM	H2 MFC set to  0.000000
9/21/2010	8:24:02 PM	BCl3 MFC set to  0.000000
9/21/2010	8:24:02 PM	PHl3 MFC set to  0.000000
9/21/2010	8:24:02 PM	SiCl4 MFC set to  0.000000
9/21/2010	8:24:02 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	8:24:02 PM	Tube furnace set to 0
9/21/2010	8:24:41 PM	Helium valve closed
9/21/2010	8:24:41 PM	H2 valve closed
9/21/2010	8:24:41 PM	BCl3 valve closed
9/21/2010	8:24:41 PM	PH3 valve closed
9/21/2010	8:24:41 PM	SiCl4 pre valve closed
9/21/2010	8:24:41 PM	SiCl4 post valve closed
9/21/2010	8:24:41 PM	Bubbler valve closed
9/21/2010	8:24:41 PM	Main Vac valve opened
9/21/2010	8:24:41 PM	Bypass valve opened
9/21/2010	8:24:41 PM	Helium MFC set to  0.000000
9/21/2010	8:24:41 PM	H2 MFC set to  0.000000
9/21/2010	8:24:41 PM	BCl3 MFC set to  0.000000
9/21/2010	8:24:41 PM	PHl3 MFC set to  0.000000
9/21/2010	8:24:41 PM	SiCl4 MFC set to  0.000000
9/21/2010	8:24:41 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	8:24:41 PM	Tube furnace set to 0
9/21/2010	8:24:42 PM	Run finished at 8:24 PM
9/21/2010	8:24:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/21/2010	8:25:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/21/2010	8:25:30 PM	Recipe started at 8:25 PM
9/21/2010	8:25:30 PM	Helium valve closed
9/21/2010	8:25:30 PM	H2 valve closed
9/21/2010	8:25:30 PM	BCl3 valve closed
9/21/2010	8:25:30 PM	PH3 valve closed
9/21/2010	8:25:30 PM	SiCl4 pre valve closed
9/21/2010	8:25:30 PM	SiCl4 post valve closed
9/21/2010	8:25:30 PM	Main Vac valve closed
9/21/2010	8:25:30 PM	Bubbler valve closed
9/21/2010	8:25:30 PM	Bypass valve opened
9/21/2010	8:25:30 PM	Helium MFC set to  0.000000
9/21/2010	8:25:30 PM	H2 MFC set to  0.000000
9/21/2010	8:25:30 PM	BCl3 MFC set to  0.000000
9/21/2010	8:25:30 PM	PHl3 MFC set to  0.000000
9/21/2010	8:25:30 PM	SiCl4 MFC set to  0.000000
9/21/2010	8:25:30 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	8:25:30 PM	Tube furnace set to 0
9/21/2010	8:25:30 PM	Helium valve closed
9/21/2010	8:25:30 PM	H2 valve closed
9/21/2010	8:25:30 PM	BCl3 valve closed
9/21/2010	8:25:30 PM	PH3 valve closed
9/21/2010	8:25:30 PM	SiCl4 pre valve closed
9/21/2010	8:25:30 PM	SiCl4 post valve closed
9/21/2010	8:25:30 PM	Bubbler valve closed
9/21/2010	8:25:30 PM	Main Vac valve opened
9/21/2010	8:25:30 PM	Bypass valve opened
9/21/2010	8:25:30 PM	Helium MFC set to  0.000000
9/21/2010	8:25:30 PM	H2 MFC set to  0.000000
9/21/2010	8:25:30 PM	BCl3 MFC set to  0.000000
9/21/2010	8:25:30 PM	PHl3 MFC set to  0.000000
9/21/2010	8:25:30 PM	SiCl4 MFC set to  0.000000
9/21/2010	8:25:30 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	8:25:30 PM	Tube furnace set to 0
9/21/2010	8:25:42 PM	Run aborted at 8:25 PM
9/21/2010	8:25:42 PM	Helium valve closed
9/21/2010	8:25:42 PM	H2 valve closed
9/21/2010	8:25:42 PM	BCl3 valve closed
9/21/2010	8:25:42 PM	PH3 valve closed
9/21/2010	8:25:42 PM	SiCl4 pre valve closed
9/21/2010	8:25:42 PM	SiCl4 post valve closed
9/21/2010	8:25:42 PM	Bypass valve closed
9/21/2010	8:25:42 PM	Main Vac valve closed
9/21/2010	8:25:42 PM	Bubbler valve closed
9/21/2010	8:25:42 PM	Helium MFC set to  0.000000
9/21/2010	8:25:42 PM	H2 MFC set to  0.000000
9/21/2010	8:25:42 PM	BCl3 MFC set to  0.000000
9/21/2010	8:25:42 PM	PHl3 MFC set to  0.000000
9/21/2010	8:25:42 PM	SiCl4 MFC set to  0.000000
9/21/2010	8:25:42 PM	Tube furnace set to 0
9/21/2010	8:25:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/21/2010	8:25:43 PM	Bypass valve opened
9/21/2010	8:25:44 PM	Main Vac valve opened
9/21/2010	8:25:48 PM	Bypass valve closed
9/21/2010	8:25:49 PM	Main Vac valve closed
9/21/2010	8:25:57 PM	Bypass valve opened
9/21/2010	8:25:57 PM	Main Vac valve opened
9/21/2010	8:25:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/21/2010	8:26:10 PM	Recipe started at 8:26 PM
9/21/2010	8:26:10 PM	Helium valve closed
9/21/2010	8:26:10 PM	H2 valve closed
9/21/2010	8:26:10 PM	BCl3 valve closed
9/21/2010	8:26:10 PM	PH3 valve closed
9/21/2010	8:26:10 PM	SiCl4 pre valve closed
9/21/2010	8:26:10 PM	SiCl4 post valve closed
9/21/2010	8:26:10 PM	Main Vac valve closed
9/21/2010	8:26:10 PM	Bubbler valve closed
9/21/2010	8:26:10 PM	Bypass valve opened
9/21/2010	8:26:10 PM	Helium MFC set to  0.000000
9/21/2010	8:26:10 PM	H2 MFC set to  0.000000
9/21/2010	8:26:10 PM	BCl3 MFC set to  0.000000
9/21/2010	8:26:10 PM	PHl3 MFC set to  0.000000
9/21/2010	8:26:10 PM	SiCl4 MFC set to  0.000000
9/21/2010	8:26:10 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	8:26:10 PM	Tube furnace set to 0
9/21/2010	8:26:11 PM	Helium valve closed
9/21/2010	8:26:11 PM	H2 valve closed
9/21/2010	8:26:11 PM	BCl3 valve closed
9/21/2010	8:26:11 PM	PH3 valve closed
9/21/2010	8:26:11 PM	SiCl4 pre valve closed
9/21/2010	8:26:11 PM	SiCl4 post valve closed
9/21/2010	8:26:11 PM	Bubbler valve closed
9/21/2010	8:26:11 PM	Main Vac valve opened
9/21/2010	8:26:11 PM	Bypass valve opened
9/21/2010	8:26:11 PM	Helium MFC set to  0.000000
9/21/2010	8:26:11 PM	H2 MFC set to  0.000000
9/21/2010	8:26:11 PM	BCl3 MFC set to  0.000000
9/21/2010	8:26:11 PM	PHl3 MFC set to  0.000000
9/21/2010	8:26:11 PM	SiCl4 MFC set to  0.000000
9/21/2010	8:26:11 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	8:26:11 PM	Tube furnace set to 0
9/21/2010	8:27:11 PM	H2 valve closed
9/21/2010	8:27:11 PM	BCl3 valve closed
9/21/2010	8:27:11 PM	PH3 valve closed
9/21/2010	8:27:11 PM	SiCl4 pre valve closed
9/21/2010	8:27:11 PM	SiCl4 post valve closed
9/21/2010	8:27:11 PM	Bubbler valve closed
9/21/2010	8:27:11 PM	Helium valve opened
9/21/2010	8:27:11 PM	Main Vac valve opened
9/21/2010	8:27:11 PM	Bypass valve opened
9/21/2010	8:27:11 PM	Helium MFC set to  100.000000
9/21/2010	8:27:11 PM	H2 MFC set to  0.000000
9/21/2010	8:27:11 PM	BCl3 MFC set to  0.000000
9/21/2010	8:27:11 PM	PHl3 MFC set to  0.000000
9/21/2010	8:27:11 PM	SiCl4 MFC set to  0.000000
9/21/2010	8:27:11 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	8:27:11 PM	Tube furnace set to 0
9/21/2010	8:28:11 PM	Helium valve closed
9/21/2010	8:28:11 PM	H2 valve closed
9/21/2010	8:28:11 PM	BCl3 valve closed
9/21/2010	8:28:11 PM	PH3 valve closed
9/21/2010	8:28:11 PM	SiCl4 pre valve closed
9/21/2010	8:28:11 PM	SiCl4 post valve closed
9/21/2010	8:28:11 PM	Bubbler valve closed
9/21/2010	8:28:11 PM	Main Vac valve opened
9/21/2010	8:28:11 PM	Bypass valve opened
9/21/2010	8:28:11 PM	Helium MFC set to  0.000000
9/21/2010	8:28:11 PM	H2 MFC set to  0.000000
9/21/2010	8:28:11 PM	BCl3 MFC set to  0.000000
9/21/2010	8:28:11 PM	PHl3 MFC set to  0.000000
9/21/2010	8:28:11 PM	SiCl4 MFC set to  0.000000
9/21/2010	8:28:11 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	8:28:11 PM	Tube furnace set to 0
9/21/2010	8:29:11 PM	H2 valve closed
9/21/2010	8:29:11 PM	BCl3 valve closed
9/21/2010	8:29:11 PM	PH3 valve closed
9/21/2010	8:29:11 PM	SiCl4 pre valve closed
9/21/2010	8:29:11 PM	SiCl4 post valve closed
9/21/2010	8:29:11 PM	Bubbler valve closed
9/21/2010	8:29:11 PM	Helium valve opened
9/21/2010	8:29:11 PM	Main Vac valve opened
9/21/2010	8:29:11 PM	Bypass valve opened
9/21/2010	8:29:11 PM	Helium MFC set to  100.000000
9/21/2010	8:29:11 PM	H2 MFC set to  0.000000
9/21/2010	8:29:11 PM	BCl3 MFC set to  0.000000
9/21/2010	8:29:11 PM	PHl3 MFC set to  0.000000
9/21/2010	8:29:11 PM	SiCl4 MFC set to  0.000000
9/21/2010	8:29:11 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	8:29:12 PM	Tube furnace set to 0
9/21/2010	8:30:12 PM	Helium valve closed
9/21/2010	8:30:12 PM	H2 valve closed
9/21/2010	8:30:12 PM	BCl3 valve closed
9/21/2010	8:30:12 PM	PH3 valve closed
9/21/2010	8:30:12 PM	SiCl4 pre valve closed
9/21/2010	8:30:12 PM	SiCl4 post valve closed
9/21/2010	8:30:12 PM	Bubbler valve closed
9/21/2010	8:30:12 PM	Main Vac valve opened
9/21/2010	8:30:12 PM	Bypass valve opened
9/21/2010	8:30:12 PM	Helium MFC set to  0.000000
9/21/2010	8:30:12 PM	H2 MFC set to  0.000000
9/21/2010	8:30:12 PM	BCl3 MFC set to  0.000000
9/21/2010	8:30:12 PM	PHl3 MFC set to  0.000000
9/21/2010	8:30:12 PM	SiCl4 MFC set to  0.000000
9/21/2010	8:30:12 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	8:30:12 PM	Tube furnace set to 0
9/21/2010	8:31:12 PM	H2 valve closed
9/21/2010	8:31:12 PM	BCl3 valve closed
9/21/2010	8:31:12 PM	PH3 valve closed
9/21/2010	8:31:12 PM	SiCl4 pre valve closed
9/21/2010	8:31:12 PM	SiCl4 post valve closed
9/21/2010	8:31:12 PM	Bubbler valve closed
9/21/2010	8:31:12 PM	Helium valve opened
9/21/2010	8:31:12 PM	Main Vac valve opened
9/21/2010	8:31:12 PM	Bypass valve opened
9/21/2010	8:31:12 PM	Helium MFC set to  100.000000
9/21/2010	8:31:12 PM	H2 MFC set to  0.000000
9/21/2010	8:31:12 PM	BCl3 MFC set to  0.000000
9/21/2010	8:31:12 PM	PHl3 MFC set to  0.000000
9/21/2010	8:31:12 PM	SiCl4 MFC set to  0.000000
9/21/2010	8:31:12 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	8:31:12 PM	Tube furnace set to 0
9/21/2010	8:32:12 PM	Helium valve closed
9/21/2010	8:32:12 PM	H2 valve closed
9/21/2010	8:32:12 PM	BCl3 valve closed
9/21/2010	8:32:12 PM	PH3 valve closed
9/21/2010	8:32:12 PM	SiCl4 pre valve closed
9/21/2010	8:32:12 PM	SiCl4 post valve closed
9/21/2010	8:32:12 PM	Bubbler valve closed
9/21/2010	8:32:12 PM	Main Vac valve opened
9/21/2010	8:32:12 PM	Bypass valve opened
9/21/2010	8:32:12 PM	Helium MFC set to  0.000000
9/21/2010	8:32:12 PM	H2 MFC set to  0.000000
9/21/2010	8:32:12 PM	BCl3 MFC set to  0.000000
9/21/2010	8:32:12 PM	PHl3 MFC set to  0.000000
9/21/2010	8:32:12 PM	SiCl4 MFC set to  0.000000
9/21/2010	8:32:12 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	8:32:12 PM	Tube furnace set to 0
9/21/2010	8:33:12 PM	H2 valve closed
9/21/2010	8:33:12 PM	BCl3 valve closed
9/21/2010	8:33:12 PM	PH3 valve closed
9/21/2010	8:33:12 PM	SiCl4 pre valve closed
9/21/2010	8:33:12 PM	SiCl4 post valve closed
9/21/2010	8:33:12 PM	Bubbler valve closed
9/21/2010	8:33:12 PM	Helium valve opened
9/21/2010	8:33:12 PM	Main Vac valve opened
9/21/2010	8:33:12 PM	Bypass valve opened
9/21/2010	8:33:12 PM	Helium MFC set to  100.000000
9/21/2010	8:33:12 PM	H2 MFC set to  0.000000
9/21/2010	8:33:12 PM	BCl3 MFC set to  0.000000
9/21/2010	8:33:12 PM	PHl3 MFC set to  0.000000
9/21/2010	8:33:12 PM	SiCl4 MFC set to  0.000000
9/21/2010	8:33:12 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	8:33:12 PM	Tube furnace set to 0
9/21/2010	8:34:12 PM	Helium valve closed
9/21/2010	8:34:12 PM	H2 valve closed
9/21/2010	8:34:12 PM	BCl3 valve closed
9/21/2010	8:34:12 PM	PH3 valve closed
9/21/2010	8:34:12 PM	SiCl4 pre valve closed
9/21/2010	8:34:12 PM	SiCl4 post valve closed
9/21/2010	8:34:12 PM	Bubbler valve closed
9/21/2010	8:34:12 PM	Main Vac valve opened
9/21/2010	8:34:12 PM	Bypass valve opened
9/21/2010	8:34:12 PM	Helium MFC set to  0.000000
9/21/2010	8:34:12 PM	H2 MFC set to  0.000000
9/21/2010	8:34:12 PM	BCl3 MFC set to  0.000000
9/21/2010	8:34:12 PM	PHl3 MFC set to  0.000000
9/21/2010	8:34:12 PM	SiCl4 MFC set to  0.000000
9/21/2010	8:34:12 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	8:34:13 PM	Tube furnace set to 0
9/21/2010	8:35:13 PM	H2 valve closed
9/21/2010	8:35:13 PM	BCl3 valve closed
9/21/2010	8:35:13 PM	PH3 valve closed
9/21/2010	8:35:13 PM	SiCl4 pre valve closed
9/21/2010	8:35:13 PM	SiCl4 post valve closed
9/21/2010	8:35:13 PM	Bubbler valve closed
9/21/2010	8:35:13 PM	Helium valve opened
9/21/2010	8:35:13 PM	Main Vac valve opened
9/21/2010	8:35:13 PM	Bypass valve opened
9/21/2010	8:35:13 PM	Helium MFC set to  100.000000
9/21/2010	8:35:13 PM	H2 MFC set to  0.000000
9/21/2010	8:35:13 PM	BCl3 MFC set to  0.000000
9/21/2010	8:35:13 PM	PHl3 MFC set to  0.000000
9/21/2010	8:35:13 PM	SiCl4 MFC set to  0.000000
9/21/2010	8:35:13 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	8:35:13 PM	Tube furnace set to 0
9/21/2010	8:36:13 PM	Helium valve closed
9/21/2010	8:36:13 PM	H2 valve closed
9/21/2010	8:36:13 PM	BCl3 valve closed
9/21/2010	8:36:13 PM	PH3 valve closed
9/21/2010	8:36:13 PM	SiCl4 pre valve closed
9/21/2010	8:36:13 PM	SiCl4 post valve closed
9/21/2010	8:36:13 PM	Bubbler valve closed
9/21/2010	8:36:13 PM	Main Vac valve opened
9/21/2010	8:36:13 PM	Bypass valve opened
9/21/2010	8:36:13 PM	Helium MFC set to  0.000000
9/21/2010	8:36:13 PM	H2 MFC set to  0.000000
9/21/2010	8:36:13 PM	BCl3 MFC set to  0.000000
9/21/2010	8:36:13 PM	PHl3 MFC set to  0.000000
9/21/2010	8:36:13 PM	SiCl4 MFC set to  0.000000
9/21/2010	8:36:13 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	8:36:13 PM	Tube furnace set to 0
9/21/2010	8:37:13 PM	H2 valve closed
9/21/2010	8:37:13 PM	BCl3 valve closed
9/21/2010	8:37:13 PM	PH3 valve closed
9/21/2010	8:37:13 PM	SiCl4 pre valve closed
9/21/2010	8:37:13 PM	SiCl4 post valve closed
9/21/2010	8:37:13 PM	Bubbler valve closed
9/21/2010	8:37:13 PM	Helium valve opened
9/21/2010	8:37:13 PM	Main Vac valve opened
9/21/2010	8:37:13 PM	Bypass valve opened
9/21/2010	8:37:13 PM	Helium MFC set to  100.000000
9/21/2010	8:37:13 PM	H2 MFC set to  0.000000
9/21/2010	8:37:13 PM	BCl3 MFC set to  0.000000
9/21/2010	8:37:13 PM	PHl3 MFC set to  0.000000
9/21/2010	8:37:13 PM	SiCl4 MFC set to  0.000000
9/21/2010	8:37:13 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	8:37:13 PM	Tube furnace set to 0
9/21/2010	8:38:13 PM	Helium valve closed
9/21/2010	8:38:13 PM	H2 valve closed
9/21/2010	8:38:13 PM	BCl3 valve closed
9/21/2010	8:38:13 PM	PH3 valve closed
9/21/2010	8:38:13 PM	SiCl4 pre valve closed
9/21/2010	8:38:13 PM	SiCl4 post valve closed
9/21/2010	8:38:13 PM	Bubbler valve closed
9/21/2010	8:38:13 PM	Main Vac valve opened
9/21/2010	8:38:13 PM	Bypass valve opened
9/21/2010	8:38:13 PM	Helium MFC set to  0.000000
9/21/2010	8:38:13 PM	H2 MFC set to  0.000000
9/21/2010	8:38:13 PM	BCl3 MFC set to  0.000000
9/21/2010	8:38:13 PM	PHl3 MFC set to  0.000000
9/21/2010	8:38:13 PM	SiCl4 MFC set to  0.000000
9/21/2010	8:38:13 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	8:38:13 PM	Tube furnace set to 0
9/21/2010	8:39:13 PM	H2 valve closed
9/21/2010	8:39:13 PM	BCl3 valve closed
9/21/2010	8:39:13 PM	PH3 valve closed
9/21/2010	8:39:13 PM	SiCl4 pre valve closed
9/21/2010	8:39:13 PM	SiCl4 post valve closed
9/21/2010	8:39:13 PM	Bubbler valve closed
9/21/2010	8:39:13 PM	Helium valve opened
9/21/2010	8:39:13 PM	Main Vac valve opened
9/21/2010	8:39:13 PM	Bypass valve opened
9/21/2010	8:39:13 PM	Helium MFC set to  100.000000
9/21/2010	8:39:13 PM	H2 MFC set to  0.000000
9/21/2010	8:39:13 PM	BCl3 MFC set to  0.000000
9/21/2010	8:39:13 PM	PHl3 MFC set to  0.000000
9/21/2010	8:39:13 PM	SiCl4 MFC set to  0.000000
9/21/2010	8:39:13 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	8:39:14 PM	Tube furnace set to 0
9/21/2010	8:40:14 PM	Helium valve closed
9/21/2010	8:40:14 PM	H2 valve closed
9/21/2010	8:40:14 PM	BCl3 valve closed
9/21/2010	8:40:14 PM	PH3 valve closed
9/21/2010	8:40:14 PM	SiCl4 pre valve closed
9/21/2010	8:40:14 PM	SiCl4 post valve closed
9/21/2010	8:40:14 PM	Bubbler valve closed
9/21/2010	8:40:14 PM	Main Vac valve opened
9/21/2010	8:40:14 PM	Bypass valve opened
9/21/2010	8:40:14 PM	Helium MFC set to  0.000000
9/21/2010	8:40:14 PM	H2 MFC set to  0.000000
9/21/2010	8:40:14 PM	BCl3 MFC set to  0.000000
9/21/2010	8:40:14 PM	PHl3 MFC set to  0.000000
9/21/2010	8:40:14 PM	SiCl4 MFC set to  0.000000
9/21/2010	8:40:14 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	8:40:14 PM	Tube furnace set to 0
9/21/2010	8:41:14 PM	H2 valve closed
9/21/2010	8:41:14 PM	BCl3 valve closed
9/21/2010	8:41:14 PM	PH3 valve closed
9/21/2010	8:41:14 PM	SiCl4 pre valve closed
9/21/2010	8:41:14 PM	SiCl4 post valve closed
9/21/2010	8:41:14 PM	Bubbler valve closed
9/21/2010	8:41:14 PM	Helium valve opened
9/21/2010	8:41:14 PM	Main Vac valve opened
9/21/2010	8:41:14 PM	Bypass valve opened
9/21/2010	8:41:14 PM	Helium MFC set to  100.000000
9/21/2010	8:41:14 PM	H2 MFC set to  0.000000
9/21/2010	8:41:14 PM	BCl3 MFC set to  0.000000
9/21/2010	8:41:14 PM	PHl3 MFC set to  0.000000
9/21/2010	8:41:14 PM	SiCl4 MFC set to  0.000000
9/21/2010	8:41:14 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	8:41:14 PM	Tube furnace set to 0
9/21/2010	8:42:14 PM	Helium valve closed
9/21/2010	8:42:14 PM	H2 valve closed
9/21/2010	8:42:14 PM	BCl3 valve closed
9/21/2010	8:42:14 PM	PH3 valve closed
9/21/2010	8:42:14 PM	SiCl4 pre valve closed
9/21/2010	8:42:14 PM	SiCl4 post valve closed
9/21/2010	8:42:14 PM	Bubbler valve closed
9/21/2010	8:42:14 PM	Main Vac valve opened
9/21/2010	8:42:14 PM	Bypass valve opened
9/21/2010	8:42:14 PM	Helium MFC set to  0.000000
9/21/2010	8:42:14 PM	H2 MFC set to  0.000000
9/21/2010	8:42:14 PM	BCl3 MFC set to  0.000000
9/21/2010	8:42:14 PM	PHl3 MFC set to  0.000000
9/21/2010	8:42:14 PM	SiCl4 MFC set to  0.000000
9/21/2010	8:42:14 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	8:42:14 PM	Tube furnace set to 0
9/21/2010	8:43:14 PM	H2 valve closed
9/21/2010	8:43:14 PM	BCl3 valve closed
9/21/2010	8:43:14 PM	PH3 valve closed
9/21/2010	8:43:14 PM	SiCl4 pre valve closed
9/21/2010	8:43:14 PM	SiCl4 post valve closed
9/21/2010	8:43:14 PM	Bubbler valve closed
9/21/2010	8:43:14 PM	Helium valve opened
9/21/2010	8:43:14 PM	Main Vac valve opened
9/21/2010	8:43:14 PM	Bypass valve opened
9/21/2010	8:43:14 PM	Helium MFC set to  100.000000
9/21/2010	8:43:14 PM	H2 MFC set to  0.000000
9/21/2010	8:43:14 PM	BCl3 MFC set to  0.000000
9/21/2010	8:43:14 PM	PHl3 MFC set to  0.000000
9/21/2010	8:43:14 PM	SiCl4 MFC set to  0.000000
9/21/2010	8:43:14 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	8:43:14 PM	Tube furnace set to 0
9/21/2010	8:44:14 PM	Helium valve closed
9/21/2010	8:44:14 PM	H2 valve closed
9/21/2010	8:44:14 PM	BCl3 valve closed
9/21/2010	8:44:14 PM	PH3 valve closed
9/21/2010	8:44:14 PM	SiCl4 pre valve closed
9/21/2010	8:44:14 PM	SiCl4 post valve closed
9/21/2010	8:44:14 PM	Bubbler valve closed
9/21/2010	8:44:14 PM	Main Vac valve opened
9/21/2010	8:44:14 PM	Bypass valve opened
9/21/2010	8:44:14 PM	Helium MFC set to  0.000000
9/21/2010	8:44:14 PM	H2 MFC set to  0.000000
9/21/2010	8:44:14 PM	BCl3 MFC set to  0.000000
9/21/2010	8:44:14 PM	PHl3 MFC set to  0.000000
9/21/2010	8:44:14 PM	SiCl4 MFC set to  0.000000
9/21/2010	8:44:14 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	8:44:14 PM	Tube furnace set to 0
9/21/2010	8:45:15 PM	H2 valve closed
9/21/2010	8:45:15 PM	BCl3 valve closed
9/21/2010	8:45:15 PM	PH3 valve closed
9/21/2010	8:45:15 PM	SiCl4 pre valve closed
9/21/2010	8:45:15 PM	SiCl4 post valve closed
9/21/2010	8:45:15 PM	Bubbler valve closed
9/21/2010	8:45:15 PM	Helium valve opened
9/21/2010	8:45:15 PM	Main Vac valve opened
9/21/2010	8:45:15 PM	Bypass valve opened
9/21/2010	8:45:15 PM	Helium MFC set to  100.000000
9/21/2010	8:45:15 PM	H2 MFC set to  0.000000
9/21/2010	8:45:15 PM	BCl3 MFC set to  0.000000
9/21/2010	8:45:15 PM	PHl3 MFC set to  0.000000
9/21/2010	8:45:15 PM	SiCl4 MFC set to  0.000000
9/21/2010	8:45:15 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	8:45:15 PM	Tube furnace set to 0
9/21/2010	8:46:15 PM	Helium valve closed
9/21/2010	8:46:15 PM	H2 valve closed
9/21/2010	8:46:15 PM	BCl3 valve closed
9/21/2010	8:46:15 PM	PH3 valve closed
9/21/2010	8:46:15 PM	SiCl4 pre valve closed
9/21/2010	8:46:15 PM	SiCl4 post valve closed
9/21/2010	8:46:15 PM	Bubbler valve closed
9/21/2010	8:46:15 PM	Main Vac valve opened
9/21/2010	8:46:15 PM	Bypass valve opened
9/21/2010	8:46:15 PM	Helium MFC set to  0.000000
9/21/2010	8:46:15 PM	H2 MFC set to  0.000000
9/21/2010	8:46:15 PM	BCl3 MFC set to  0.000000
9/21/2010	8:46:15 PM	PHl3 MFC set to  0.000000
9/21/2010	8:46:15 PM	SiCl4 MFC set to  0.000000
9/21/2010	8:46:15 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	8:46:15 PM	Tube furnace set to 0
9/21/2010	8:46:16 PM	Run finished at 8:46 PM
9/21/2010	8:46:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/21/2010	8:52:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/21/2010	8:52:20 PM	Recipe started at 8:52 PM
9/21/2010	8:52:20 PM	Helium valve closed
9/21/2010	8:52:20 PM	H2 valve closed
9/21/2010	8:52:20 PM	BCl3 valve closed
9/21/2010	8:52:20 PM	PH3 valve closed
9/21/2010	8:52:20 PM	SiCl4 pre valve closed
9/21/2010	8:52:20 PM	SiCl4 post valve closed
9/21/2010	8:52:20 PM	Main Vac valve closed
9/21/2010	8:52:20 PM	Bubbler valve closed
9/21/2010	8:52:20 PM	Bypass valve opened
9/21/2010	8:52:20 PM	Helium MFC set to  0.000000
9/21/2010	8:52:20 PM	H2 MFC set to  0.000000
9/21/2010	8:52:20 PM	BCl3 MFC set to  0.000000
9/21/2010	8:52:20 PM	PHl3 MFC set to  0.000000
9/21/2010	8:52:20 PM	SiCl4 MFC set to  0.000000
9/21/2010	8:52:20 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	8:52:21 PM	Tube furnace set to 0
9/21/2010	8:52:21 PM	Helium valve closed
9/21/2010	8:52:21 PM	H2 valve closed
9/21/2010	8:52:21 PM	BCl3 valve closed
9/21/2010	8:52:21 PM	PH3 valve closed
9/21/2010	8:52:21 PM	SiCl4 pre valve closed
9/21/2010	8:52:21 PM	SiCl4 post valve closed
9/21/2010	8:52:21 PM	Bubbler valve closed
9/21/2010	8:52:21 PM	Main Vac valve opened
9/21/2010	8:52:21 PM	Bypass valve opened
9/21/2010	8:52:21 PM	Helium MFC set to  0.000000
9/21/2010	8:52:21 PM	H2 MFC set to  0.000000
9/21/2010	8:52:21 PM	BCl3 MFC set to  0.000000
9/21/2010	8:52:21 PM	PHl3 MFC set to  0.000000
9/21/2010	8:52:21 PM	SiCl4 MFC set to  0.000000
9/21/2010	8:52:21 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	8:52:21 PM	Tube furnace set to 0
9/21/2010	8:53:21 PM	H2 valve closed
9/21/2010	8:53:21 PM	BCl3 valve closed
9/21/2010	8:53:21 PM	PH3 valve closed
9/21/2010	8:53:21 PM	SiCl4 pre valve closed
9/21/2010	8:53:21 PM	SiCl4 post valve closed
9/21/2010	8:53:21 PM	Bubbler valve closed
9/21/2010	8:53:21 PM	Helium valve opened
9/21/2010	8:53:21 PM	Main Vac valve opened
9/21/2010	8:53:21 PM	Bypass valve opened
9/21/2010	8:53:21 PM	Helium MFC set to  100.000000
9/21/2010	8:53:21 PM	H2 MFC set to  0.000000
9/21/2010	8:53:21 PM	BCl3 MFC set to  0.000000
9/21/2010	8:53:21 PM	PHl3 MFC set to  0.000000
9/21/2010	8:53:21 PM	SiCl4 MFC set to  0.000000
9/21/2010	8:53:21 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	8:53:21 PM	Tube furnace set to 0
9/21/2010	8:54:21 PM	Helium valve closed
9/21/2010	8:54:21 PM	H2 valve closed
9/21/2010	8:54:21 PM	BCl3 valve closed
9/21/2010	8:54:21 PM	PH3 valve closed
9/21/2010	8:54:21 PM	SiCl4 pre valve closed
9/21/2010	8:54:21 PM	SiCl4 post valve closed
9/21/2010	8:54:21 PM	Bubbler valve closed
9/21/2010	8:54:21 PM	Main Vac valve opened
9/21/2010	8:54:21 PM	Bypass valve opened
9/21/2010	8:54:21 PM	Helium MFC set to  0.000000
9/21/2010	8:54:21 PM	H2 MFC set to  0.000000
9/21/2010	8:54:21 PM	BCl3 MFC set to  0.000000
9/21/2010	8:54:21 PM	PHl3 MFC set to  0.000000
9/21/2010	8:54:21 PM	SiCl4 MFC set to  0.000000
9/21/2010	8:54:21 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	8:54:21 PM	Tube furnace set to 0
9/21/2010	8:55:21 PM	H2 valve closed
9/21/2010	8:55:21 PM	BCl3 valve closed
9/21/2010	8:55:21 PM	PH3 valve closed
9/21/2010	8:55:21 PM	SiCl4 pre valve closed
9/21/2010	8:55:21 PM	SiCl4 post valve closed
9/21/2010	8:55:21 PM	Bubbler valve closed
9/21/2010	8:55:21 PM	Helium valve opened
9/21/2010	8:55:21 PM	Main Vac valve opened
9/21/2010	8:55:21 PM	Bypass valve opened
9/21/2010	8:55:21 PM	Helium MFC set to  100.000000
9/21/2010	8:55:21 PM	H2 MFC set to  0.000000
9/21/2010	8:55:21 PM	BCl3 MFC set to  0.000000
9/21/2010	8:55:21 PM	PHl3 MFC set to  0.000000
9/21/2010	8:55:21 PM	SiCl4 MFC set to  0.000000
9/21/2010	8:55:21 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	8:55:22 PM	Tube furnace set to 0
9/21/2010	8:56:22 PM	Helium valve closed
9/21/2010	8:56:22 PM	H2 valve closed
9/21/2010	8:56:22 PM	BCl3 valve closed
9/21/2010	8:56:22 PM	PH3 valve closed
9/21/2010	8:56:22 PM	SiCl4 pre valve closed
9/21/2010	8:56:22 PM	SiCl4 post valve closed
9/21/2010	8:56:22 PM	Bubbler valve closed
9/21/2010	8:56:22 PM	Main Vac valve opened
9/21/2010	8:56:22 PM	Bypass valve opened
9/21/2010	8:56:22 PM	Helium MFC set to  0.000000
9/21/2010	8:56:22 PM	H2 MFC set to  0.000000
9/21/2010	8:56:22 PM	BCl3 MFC set to  0.000000
9/21/2010	8:56:22 PM	PHl3 MFC set to  0.000000
9/21/2010	8:56:22 PM	SiCl4 MFC set to  0.000000
9/21/2010	8:56:22 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	8:56:22 PM	Tube furnace set to 0
9/21/2010	8:57:22 PM	H2 valve closed
9/21/2010	8:57:22 PM	BCl3 valve closed
9/21/2010	8:57:22 PM	PH3 valve closed
9/21/2010	8:57:22 PM	SiCl4 pre valve closed
9/21/2010	8:57:22 PM	SiCl4 post valve closed
9/21/2010	8:57:22 PM	Bubbler valve closed
9/21/2010	8:57:22 PM	Helium valve opened
9/21/2010	8:57:22 PM	Main Vac valve opened
9/21/2010	8:57:22 PM	Bypass valve opened
9/21/2010	8:57:22 PM	Helium MFC set to  100.000000
9/21/2010	8:57:22 PM	H2 MFC set to  0.000000
9/21/2010	8:57:22 PM	BCl3 MFC set to  0.000000
9/21/2010	8:57:22 PM	PHl3 MFC set to  0.000000
9/21/2010	8:57:22 PM	SiCl4 MFC set to  0.000000
9/21/2010	8:57:22 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	8:57:22 PM	Tube furnace set to 0
9/21/2010	8:58:22 PM	Helium valve closed
9/21/2010	8:58:22 PM	H2 valve closed
9/21/2010	8:58:22 PM	BCl3 valve closed
9/21/2010	8:58:22 PM	PH3 valve closed
9/21/2010	8:58:22 PM	SiCl4 pre valve closed
9/21/2010	8:58:22 PM	SiCl4 post valve closed
9/21/2010	8:58:22 PM	Bubbler valve closed
9/21/2010	8:58:22 PM	Main Vac valve opened
9/21/2010	8:58:22 PM	Bypass valve opened
9/21/2010	8:58:22 PM	Helium MFC set to  0.000000
9/21/2010	8:58:22 PM	H2 MFC set to  0.000000
9/21/2010	8:58:22 PM	BCl3 MFC set to  0.000000
9/21/2010	8:58:22 PM	PHl3 MFC set to  0.000000
9/21/2010	8:58:22 PM	SiCl4 MFC set to  0.000000
9/21/2010	8:58:22 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	8:58:22 PM	Tube furnace set to 0
9/21/2010	8:59:22 PM	H2 valve closed
9/21/2010	8:59:22 PM	BCl3 valve closed
9/21/2010	8:59:22 PM	PH3 valve closed
9/21/2010	8:59:22 PM	SiCl4 pre valve closed
9/21/2010	8:59:22 PM	SiCl4 post valve closed
9/21/2010	8:59:22 PM	Bubbler valve closed
9/21/2010	8:59:22 PM	Helium valve opened
9/21/2010	8:59:22 PM	Main Vac valve opened
9/21/2010	8:59:22 PM	Bypass valve opened
9/21/2010	8:59:22 PM	Helium MFC set to  100.000000
9/21/2010	8:59:22 PM	H2 MFC set to  0.000000
9/21/2010	8:59:22 PM	BCl3 MFC set to  0.000000
9/21/2010	8:59:22 PM	PHl3 MFC set to  0.000000
9/21/2010	8:59:22 PM	SiCl4 MFC set to  0.000000
9/21/2010	8:59:22 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	8:59:22 PM	Tube furnace set to 0
9/21/2010	8:59:42 PM	Helium valve closed
9/21/2010	8:59:42 PM	H2 valve closed
9/21/2010	8:59:42 PM	BCl3 valve closed
9/21/2010	8:59:42 PM	PH3 valve closed
9/21/2010	8:59:42 PM	SiCl4 pre valve closed
9/21/2010	8:59:42 PM	SiCl4 post valve closed
9/21/2010	8:59:42 PM	Bubbler valve closed
9/21/2010	8:59:42 PM	Main Vac valve opened
9/21/2010	8:59:42 PM	Bypass valve opened
9/21/2010	8:59:42 PM	Helium MFC set to  0.000000
9/21/2010	8:59:42 PM	H2 MFC set to  0.000000
9/21/2010	8:59:42 PM	BCl3 MFC set to  0.000000
9/21/2010	8:59:42 PM	PHl3 MFC set to  0.000000
9/21/2010	8:59:42 PM	SiCl4 MFC set to  0.000000
9/21/2010	8:59:42 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	8:59:42 PM	Tube furnace set to 0
9/21/2010	8:59:43 PM	H2 valve closed
9/21/2010	8:59:43 PM	BCl3 valve closed
9/21/2010	8:59:43 PM	PH3 valve closed
9/21/2010	8:59:43 PM	SiCl4 pre valve closed
9/21/2010	8:59:43 PM	SiCl4 post valve closed
9/21/2010	8:59:43 PM	Bubbler valve closed
9/21/2010	8:59:43 PM	Helium valve opened
9/21/2010	8:59:43 PM	Main Vac valve opened
9/21/2010	8:59:43 PM	Bypass valve opened
9/21/2010	8:59:43 PM	Helium MFC set to  100.000000
9/21/2010	8:59:43 PM	H2 MFC set to  0.000000
9/21/2010	8:59:43 PM	BCl3 MFC set to  0.000000
9/21/2010	8:59:43 PM	PHl3 MFC set to  0.000000
9/21/2010	8:59:43 PM	SiCl4 MFC set to  0.000000
9/21/2010	8:59:43 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	8:59:43 PM	Tube furnace set to 0
9/21/2010	8:59:44 PM	Helium valve closed
9/21/2010	8:59:44 PM	H2 valve closed
9/21/2010	8:59:44 PM	BCl3 valve closed
9/21/2010	8:59:44 PM	PH3 valve closed
9/21/2010	8:59:44 PM	SiCl4 pre valve closed
9/21/2010	8:59:44 PM	SiCl4 post valve closed
9/21/2010	8:59:44 PM	Bubbler valve closed
9/21/2010	8:59:44 PM	Main Vac valve opened
9/21/2010	8:59:44 PM	Bypass valve opened
9/21/2010	8:59:44 PM	Helium MFC set to  0.000000
9/21/2010	8:59:44 PM	H2 MFC set to  0.000000
9/21/2010	8:59:44 PM	BCl3 MFC set to  0.000000
9/21/2010	8:59:44 PM	PHl3 MFC set to  0.000000
9/21/2010	8:59:44 PM	SiCl4 MFC set to  0.000000
9/21/2010	8:59:44 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	8:59:44 PM	Tube furnace set to 0
9/21/2010	8:59:45 PM	H2 valve closed
9/21/2010	8:59:45 PM	BCl3 valve closed
9/21/2010	8:59:45 PM	PH3 valve closed
9/21/2010	8:59:45 PM	SiCl4 pre valve closed
9/21/2010	8:59:45 PM	SiCl4 post valve closed
9/21/2010	8:59:45 PM	Bubbler valve closed
9/21/2010	8:59:45 PM	Helium valve opened
9/21/2010	8:59:45 PM	Main Vac valve opened
9/21/2010	8:59:45 PM	Bypass valve opened
9/21/2010	8:59:45 PM	Helium MFC set to  100.000000
9/21/2010	8:59:45 PM	H2 MFC set to  0.000000
9/21/2010	8:59:45 PM	BCl3 MFC set to  0.000000
9/21/2010	8:59:45 PM	PHl3 MFC set to  0.000000
9/21/2010	8:59:45 PM	SiCl4 MFC set to  0.000000
9/21/2010	8:59:45 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	8:59:45 PM	Tube furnace set to 0
9/21/2010	8:59:45 PM	Helium valve closed
9/21/2010	8:59:45 PM	H2 valve closed
9/21/2010	8:59:45 PM	BCl3 valve closed
9/21/2010	8:59:45 PM	PH3 valve closed
9/21/2010	8:59:45 PM	SiCl4 pre valve closed
9/21/2010	8:59:45 PM	SiCl4 post valve closed
9/21/2010	8:59:45 PM	Bubbler valve closed
9/21/2010	8:59:45 PM	Main Vac valve opened
9/21/2010	8:59:45 PM	Bypass valve opened
9/21/2010	8:59:45 PM	Helium MFC set to  0.000000
9/21/2010	8:59:45 PM	H2 MFC set to  0.000000
9/21/2010	8:59:45 PM	BCl3 MFC set to  0.000000
9/21/2010	8:59:45 PM	PHl3 MFC set to  0.000000
9/21/2010	8:59:45 PM	SiCl4 MFC set to  0.000000
9/21/2010	8:59:45 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	8:59:45 PM	Tube furnace set to 0
9/21/2010	8:59:48 PM	H2 valve closed
9/21/2010	8:59:48 PM	BCl3 valve closed
9/21/2010	8:59:48 PM	PH3 valve closed
9/21/2010	8:59:48 PM	SiCl4 pre valve closed
9/21/2010	8:59:48 PM	SiCl4 post valve closed
9/21/2010	8:59:48 PM	Bubbler valve closed
9/21/2010	8:59:48 PM	Helium valve opened
9/21/2010	8:59:48 PM	Main Vac valve opened
9/21/2010	8:59:48 PM	Bypass valve opened
9/21/2010	8:59:48 PM	Helium MFC set to  100.000000
9/21/2010	8:59:48 PM	H2 MFC set to  0.000000
9/21/2010	8:59:48 PM	BCl3 MFC set to  0.000000
9/21/2010	8:59:48 PM	PHl3 MFC set to  0.000000
9/21/2010	8:59:48 PM	SiCl4 MFC set to  0.000000
9/21/2010	8:59:48 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	8:59:48 PM	Tube furnace set to 0
9/21/2010	8:59:49 PM	Run aborted at 8:59 PM
9/21/2010	8:59:49 PM	Helium valve closed
9/21/2010	8:59:49 PM	H2 valve closed
9/21/2010	8:59:49 PM	BCl3 valve closed
9/21/2010	8:59:49 PM	PH3 valve closed
9/21/2010	8:59:49 PM	SiCl4 pre valve closed
9/21/2010	8:59:49 PM	SiCl4 post valve closed
9/21/2010	8:59:49 PM	Bypass valve closed
9/21/2010	8:59:49 PM	Main Vac valve closed
9/21/2010	8:59:49 PM	Bubbler valve closed
9/21/2010	8:59:49 PM	Helium MFC set to  0.000000
9/21/2010	8:59:49 PM	H2 MFC set to  0.000000
9/21/2010	8:59:49 PM	BCl3 MFC set to  0.000000
9/21/2010	8:59:49 PM	PHl3 MFC set to  0.000000
9/21/2010	8:59:49 PM	SiCl4 MFC set to  0.000000
9/21/2010	8:59:49 PM	Tube furnace set to 0
9/21/2010	8:59:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/21/2010	8:59:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/21/2010	8:59:51 PM	Recipe started at 8:59 PM
9/21/2010	8:59:51 PM	Helium valve closed
9/21/2010	8:59:51 PM	H2 valve closed
9/21/2010	8:59:51 PM	BCl3 valve closed
9/21/2010	8:59:51 PM	PH3 valve closed
9/21/2010	8:59:51 PM	SiCl4 pre valve closed
9/21/2010	8:59:51 PM	SiCl4 post valve closed
9/21/2010	8:59:51 PM	Main Vac valve closed
9/21/2010	8:59:51 PM	Bubbler valve closed
9/21/2010	8:59:51 PM	Bypass valve opened
9/21/2010	8:59:51 PM	Helium MFC set to  0.000000
9/21/2010	8:59:51 PM	H2 MFC set to  0.000000
9/21/2010	8:59:51 PM	BCl3 MFC set to  0.000000
9/21/2010	8:59:51 PM	PHl3 MFC set to  0.000000
9/21/2010	8:59:51 PM	SiCl4 MFC set to  0.000000
9/21/2010	8:59:51 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	8:59:51 PM	Tube furnace set to 0
9/21/2010	8:59:51 PM	Helium valve closed
9/21/2010	8:59:51 PM	H2 valve closed
9/21/2010	8:59:51 PM	BCl3 valve closed
9/21/2010	8:59:51 PM	PH3 valve closed
9/21/2010	8:59:51 PM	SiCl4 pre valve closed
9/21/2010	8:59:51 PM	SiCl4 post valve closed
9/21/2010	8:59:51 PM	Bubbler valve closed
9/21/2010	8:59:51 PM	Main Vac valve opened
9/21/2010	8:59:51 PM	Bypass valve opened
9/21/2010	8:59:51 PM	Helium MFC set to  0.000000
9/21/2010	8:59:51 PM	H2 MFC set to  0.000000
9/21/2010	8:59:51 PM	BCl3 MFC set to  0.000000
9/21/2010	8:59:51 PM	PHl3 MFC set to  0.000000
9/21/2010	8:59:51 PM	SiCl4 MFC set to  0.000000
9/21/2010	8:59:51 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	8:59:52 PM	Tube furnace set to 0
9/21/2010	8:59:52 PM	Run finished at 8:59 PM
9/21/2010	8:59:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/21/2010	9:06:47 PM	Recipe started at 9:06 PM
9/21/2010	9:06:47 PM	Helium valve closed
9/21/2010	9:06:47 PM	BCl3 valve closed
9/21/2010	9:06:47 PM	PH3 valve closed
9/21/2010	9:06:47 PM	SiCl4 pre valve closed
9/21/2010	9:06:47 PM	SiCl4 post valve closed
9/21/2010	9:06:47 PM	Main Vac valve closed
9/21/2010	9:06:47 PM	Bypass valve closed
9/21/2010	9:06:47 PM	Bubbler valve closed
9/21/2010	9:06:47 PM	H2 valve opened
9/21/2010	9:06:47 PM	Helium MFC set to  0.000000
9/21/2010	9:06:47 PM	H2 MFC set to  500.000000
9/21/2010	9:06:47 PM	BCl3 MFC set to  0.000000
9/21/2010	9:06:47 PM	PHl3 MFC set to  0.000000
9/21/2010	9:06:47 PM	SiCl4 MFC set to  0.000000
9/21/2010	9:06:47 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	9:06:47 PM	Tube furnace set to 0
9/21/2010	9:08:06 PM	Helium valve closed
9/21/2010	9:08:06 PM	BCl3 valve closed
9/21/2010	9:08:06 PM	PH3 valve closed
9/21/2010	9:08:06 PM	SiCl4 pre valve closed
9/21/2010	9:08:06 PM	SiCl4 post valve closed
9/21/2010	9:08:06 PM	Main Vac valve closed
9/21/2010	9:08:06 PM	Bypass valve closed
9/21/2010	9:08:06 PM	H2 valve opened
9/21/2010	9:08:06 PM	Bubbler valve opened
9/21/2010	9:08:06 PM	Helium MFC set to  0.000000
9/21/2010	9:08:06 PM	H2 MFC set to  500.000000
9/21/2010	9:08:06 PM	BCl3 MFC set to  0.000000
9/21/2010	9:08:06 PM	PHl3 MFC set to  0.000000
9/21/2010	9:08:06 PM	SiCl4 MFC set to  0.000000
9/21/2010	9:08:06 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	9:08:06 PM	Tube furnace set to 1000
9/21/2010	9:28:06 PM	Helium valve closed
9/21/2010	9:28:06 PM	PH3 valve closed
9/21/2010	9:28:06 PM	Main Vac valve closed
9/21/2010	9:28:06 PM	Bypass valve closed
9/21/2010	9:28:06 PM	H2 valve opened
9/21/2010	9:28:06 PM	BCl3 valve opened
9/21/2010	9:28:06 PM	SiCl4 pre valve opened
9/21/2010	9:28:06 PM	SiCl4 post valve opened
9/21/2010	9:28:06 PM	Bubbler valve opened
9/21/2010	9:28:06 PM	Helium MFC set to  0.000000
9/21/2010	9:28:06 PM	H2 MFC set to  500.000000
9/21/2010	9:28:06 PM	BCl3 MFC set to  25.000000
9/21/2010	9:28:06 PM	PHl3 MFC set to  0.000000
9/21/2010	9:28:06 PM	SiCl4 MFC set to  50.000000
9/21/2010	9:28:06 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	9:28:06 PM	Tube furnace set to 1000
9/21/2010	9:40:06 PM	H2 valve closed
9/21/2010	9:40:06 PM	BCl3 valve closed
9/21/2010	9:40:06 PM	PH3 valve closed
9/21/2010	9:40:06 PM	SiCl4 pre valve closed
9/21/2010	9:40:06 PM	SiCl4 post valve closed
9/21/2010	9:40:06 PM	Main Vac valve closed
9/21/2010	9:40:06 PM	Bypass valve closed
9/21/2010	9:40:06 PM	Helium valve opened
9/21/2010	9:40:06 PM	Bubbler valve opened
9/21/2010	9:40:06 PM	Helium MFC set to  500.000000
9/21/2010	9:40:06 PM	H2 MFC set to  0.000000
9/21/2010	9:40:06 PM	BCl3 MFC set to  0.000000
9/21/2010	9:40:06 PM	PHl3 MFC set to  0.000000
9/21/2010	9:40:06 PM	SiCl4 MFC set to  0.000000
9/21/2010	9:40:06 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	9:40:06 PM	Tube furnace set to 0
9/21/2010	10:00:06 PM	Helium valve closed
9/21/2010	10:00:06 PM	H2 valve closed
9/21/2010	10:00:06 PM	BCl3 valve closed
9/21/2010	10:00:06 PM	PH3 valve closed
9/21/2010	10:00:06 PM	SiCl4 pre valve closed
9/21/2010	10:00:06 PM	SiCl4 post valve closed
9/21/2010	10:00:06 PM	Main Vac valve closed
9/21/2010	10:00:06 PM	Bypass valve closed
9/21/2010	10:00:06 PM	Bubbler valve closed
9/21/2010	10:00:06 PM	Helium MFC set to  0.000000
9/21/2010	10:00:06 PM	H2 MFC set to  0.000000
9/21/2010	10:00:06 PM	BCl3 MFC set to  0.000000
9/21/2010	10:00:06 PM	PHl3 MFC set to  0.000000
9/21/2010	10:00:06 PM	SiCl4 MFC set to  0.000000
9/21/2010	10:00:06 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	10:00:06 PM	Tube furnace set to 0
9/21/2010	10:00:07 PM	Run finished at 10:00 PM
9/21/2010	11:05:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/21/2010	11:05:03 PM	Recipe started at 11:05 PM
9/21/2010	11:05:03 PM	Helium valve closed
9/21/2010	11:05:03 PM	H2 valve closed
9/21/2010	11:05:03 PM	BCl3 valve closed
9/21/2010	11:05:03 PM	PH3 valve closed
9/21/2010	11:05:03 PM	SiCl4 pre valve closed
9/21/2010	11:05:03 PM	SiCl4 post valve closed
9/21/2010	11:05:03 PM	Main Vac valve closed
9/21/2010	11:05:03 PM	Bubbler valve closed
9/21/2010	11:05:03 PM	Bypass valve opened
9/21/2010	11:05:03 PM	Helium MFC set to  0.000000
9/21/2010	11:05:03 PM	H2 MFC set to  0.000000
9/21/2010	11:05:03 PM	BCl3 MFC set to  0.000000
9/21/2010	11:05:03 PM	PHl3 MFC set to  0.000000
9/21/2010	11:05:03 PM	SiCl4 MFC set to  0.000000
9/21/2010	11:05:03 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	11:05:03 PM	Tube furnace set to 0
9/21/2010	11:05:44 PM	Helium valve closed
9/21/2010	11:05:44 PM	H2 valve closed
9/21/2010	11:05:44 PM	BCl3 valve closed
9/21/2010	11:05:44 PM	PH3 valve closed
9/21/2010	11:05:44 PM	SiCl4 pre valve closed
9/21/2010	11:05:44 PM	SiCl4 post valve closed
9/21/2010	11:05:44 PM	Bubbler valve closed
9/21/2010	11:05:44 PM	Main Vac valve opened
9/21/2010	11:05:44 PM	Bypass valve opened
9/21/2010	11:05:44 PM	Helium MFC set to  0.000000
9/21/2010	11:05:44 PM	H2 MFC set to  0.000000
9/21/2010	11:05:44 PM	BCl3 MFC set to  0.000000
9/21/2010	11:05:44 PM	PHl3 MFC set to  0.000000
9/21/2010	11:05:44 PM	SiCl4 MFC set to  0.000000
9/21/2010	11:05:44 PM	Bypass solenoid MFC set to  0.000000
9/21/2010	11:05:44 PM	Tube furnace set to 0
9/21/2010	11:05:45 PM	Run finished at 11:05 PM
9/21/2010	11:05:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
